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    • 1. 发明申请
    • IN-LIQUID PLASMA FILM-FORMING APPARATUS, ELECTRODE FOR IN-LIQUID PLASMA, AND FILM-FORMING METHOD USING IN-LIQUID PLASMA
    • 液体等离子体成膜装置,液体等离子体电极和使用液体等离子体的成膜方法
    • US20110229656A1
    • 2011-09-22
    • US12671773
    • 2009-03-02
    • Kenji ShibataToshihisa ShimoKyoko KumagaiHidetaka HayashiShinya OkudaShinfuku NomuraHiromichi Toyota
    • Kenji ShibataToshihisa ShimoKyoko KumagaiHidetaka HayashiShinya OkudaShinfuku NomuraHiromichi Toyota
    • H05H1/48
    • C23C16/509C23C16/26C23C16/4485H01J37/32357
    • In an in-liquid plasma film-forming apparatus having: a vessel 1 being capable of accommodating a substrate “S” and a liquid “L” including raw material therein; an electrode 2 for in-liquid plasma, electrode 2 which is disposed in the vessel 1; an electric power device 3 for supplying electricity to the electrode 2 for in-liquid plasma; the electrode 2 for in-liquid plasma is equipped with: a main electrode 21 having a discharging end 22; an auxiliary electrode 26 not only facing the discharging end 22 but also being disposed between the discharging end 22 and the substrate “S” that face each other; and a plasma generating unit 29 having a space that is demarcated by a surface 22a of the discharging end 22 and a surface 26a of the auxiliary electrode 26 facing the surface 22a, and being for generating plasma by means of electricity being supplied to the main electrode 21. And, a decomposed component of the raw material is deposited onto a surface of the substrate “S” by contacting the plasma, which has generated at the plasma generating unit 29, with the substrate “S.”By means of the present construction, it becomes feasible to generate plasma in liquid without ever using a second electrode that serves as a substrate.
    • 在液体等离子体成膜装置中,具有容纳基材“S”的容器1和包含原料的液体“L” 用于液体内等离子体的电极2,设置在容器1中的电极2; 用于向用于液体内等离子体的电极2供电的电力装置3; 用于液体内等离子体的电极2装备有:具有放电端22的主电极21; 辅助电极26不仅面向放电端22,而且还设置在放电端22和彼此相对的衬底“S”之间; 以及等离子体产生单元29,其具有由排放端22的表面22a和辅助电极26的面向表面22a的表面26a划分的空间,并且用于通过向主电极供电的方式产生等离子体 并且,通过使在等离子体产生单元29产生的等离子体与基板“S”接触,将原料的分解成分沉积在基板“S”的表面上。借助于本构造 在不用使用作为基板的第二电极的情况下,可以在液体中产生等离子体。
    • 5. 发明授权
    • In-liquid plasma electrode, in-liquid plasma generating apparatus and in-liquid plasma generating method
    • 液体内等离子体电极,液体内等离子体发生装置和液体内等离子体生成方法
    • US08653404B2
    • 2014-02-18
    • US11792174
    • 2005-12-02
    • Hitotoshi MuraseToshihisa ShimoHiroaki TakashimaHiromichi ToyotaShinfuku NomuraTsunehiro Maehara
    • Hitotoshi MuraseToshihisa ShimoHiroaki TakashimaHiromichi ToyotaShinfuku NomuraTsunehiro Maehara
    • B23K10/00
    • B01J19/088B01J2219/0809B01J2219/0835B01J2219/0877H05H1/46H05H1/48H05H2001/466
    • An in-liquid plasma electrode according to the present invention is an in-liquid plasma electrode for generating plasma in a liquid and has an electrically conductive member having an electric discharge end surface in contact with the liquid, and an electrically insulating member covering an outer periphery of the conductive member at least except the electric discharge end surface. Preferably, d and x satisfy −2d≦x≦2d, where d is a length of a minor axis of the cross section when a conductive end portion of the electrically conductive member having the electric discharge end surface has an approximately circular cross section, or d is a length of a short side of the cross section when the conductive end portion has an approximately rectangular cross section, and x is a distance from a reference plane to a plane containing the electric discharge end surface when the reference plane is an end surface of the electrically insulating member that is approximately parallel with the electric discharge end surface. Owing to this construction, it is possible to provide an in-liquid plasma electrode which can simply generate plasma in a wide variety of liquids including a conductive liquid such as water and alcohol, and furthermore an in-liquid plasma generating apparatus having this electrode, and an in-liquid plasma generating method using this electrode.
    • 根据本发明的液体内等离子体电极是用于在液体中产生等离子体并具有与液体相接触的放电端面的导电构件的液体内等离子体电极,以及覆盖外部的电绝缘构件 至少除了放电端面之外,导电构件的周边。 优选地,d和x满足-2d @ x @ 2d,其中d是当具有放电端表面的导电构件的导电端部具有大致圆形横截面时横截面的短轴的长度,或 d是当导电端部具有大致矩形横截面时横截面的短边长度,x是当基准面为端面时,从基准面到包含放电端面的面的距离 所述电绝缘构件与所述放电端面大致平行。 由于这种结构,可以提供一种液体等离子体电极,其可以简单地在包括诸如水和醇的导电液体的各种液体中产生等离子体,此外还提供具有该电极的液体内等离子体产生装置, 以及使用该电极的液体内等离子体生成方法。