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    • 1. 发明专利
    • Hot food and method for producing the same
    • 热食品及其生产方法
    • JP2007054014A
    • 2007-03-08
    • JP2005245908
    • 2005-08-26
    • Murata SetsuShigeru NakajimaHisaharu Oki茂 中嶋久治 大木村田 節
    • OKI HISAHARUNAKAJIMA SHIGERU
    • A23L3/24A23L3/00
    • PROBLEM TO BE SOLVED: To provide an excellent hot food storable for a long period, heated so as to enable purchasers to eat/drink it immediately on the spot (e.g. at the vending machine) even if using ingredients which may contain heat-resistant bacteria.
      SOLUTION: The hot food is such that the breeding of heat-resistant bacteria is inhibited by a sterilization treatment comprising exposure to superheated steam of 140-750°C, preferably 150-600°C, more preferably 200-500°C. A method for producing such a hot food is also provided, involving a sterilization treatment comprising exposure of the original food to superheated steam of 150-750°C.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供长时间保存的优质热食品,加热,以便即使使用可能含有热量的成分,也可以立即在现场(例如在自动贩卖机)上进行饮食。 抗菌细菌。 解决方案:热食物是通过灭菌处理来抑制耐热细菌的繁殖,包括暴露于140-750℃,优选150-600℃,更优选200-500℃的过热蒸汽 。 还提供了一种生产这种热食品的方法,包括灭菌处理,包括将原始食物暴露于150-750℃的过热蒸汽中。 版权所有(C)2007,JPO&INPIT
    • 7. 发明授权
    • Film formation method and apparatus for semiconductor process
    • 用于半导体工艺的成膜方法和装置
    • US08168270B2
    • 2012-05-01
    • US11896752
    • 2007-09-05
    • Kazuhide HasebeYoshihiro IshidaTakehiko FujitaJun OgawaShigeru Nakajima
    • Kazuhide HasebeYoshihiro IshidaTakehiko FujitaJun OgawaShigeru Nakajima
    • C23C16/513
    • C23C16/45525C23C16/45527C23C16/45542C23C16/45544
    • An oxide film is formed on a target substrate by CVD, in a process field to be selectively supplied with a first process gas including a source gas containing a film source element and no amino group, a second process gas including an oxidizing gas, and a third process gas including a preliminary treatment gas. A first step includes an excitation period of supplying the third process gas excited by an exciting mechanism, thereby performing a preliminary treatment on the target substrate by preliminary treatment gas radicals. A second step performs supply of the first process gas, thereby adsorbing the film source element on the target substrate. A third step includes an excitation period of supplying the second process gas excited by an exciting mechanism, thereby oxidizing the film source element adsorbed on the target substrate by oxidizing gas radicals.
    • 在目标基板上通过CVD形成氧化膜,在选择性地供给包括含有膜源元素而不含氨基的源气体的第一工艺气体的工艺领域中,包含氧化气体的第二工艺气体和 包括初步处理气体的第三工艺气体。 第一步骤包括供给由激励机构激励的第三处理气体的激发期,由此通过预处理气体基团对目标基板进行预处理。 第二步进行第一处理气体的供给,从而将膜源元件吸附在目标基板上。 第三步骤包括供给由激励机构激励的第二处理气体的激励周期,从而通过氧化气体基团氧化吸附在目标基板上的膜源元件。
    • 9. 发明申请
    • FILM FORMATION APPARATUS AND METHOD FOR USING SAME
    • 胶片形成装置及其使用方法
    • US20100189927A1
    • 2010-07-29
    • US12684283
    • 2010-01-08
    • Jun SATOKiyotaka KikuchiHiroki MurakamiShigeru NakajimaKazuhide Hasebe
    • Jun SATOKiyotaka KikuchiHiroki MurakamiShigeru NakajimaKazuhide Hasebe
    • C23C16/50C23C16/44C23C16/00C23C16/52
    • C23C16/4405
    • A method for using a film formation apparatus includes performing a main cleaning process and a post cleaning process in this order inside a reaction chamber. The main cleaning process is arranged to supply a cleaning gas containing fluorine into the reaction chamber while exhausting gas from inside the reaction chamber, thereby etching a film formation by-product containing silicon. The post cleaning process is arranged to remove a silicon-containing fluoride generated by the main cleaning process and remaining inside the reaction chamber and to alternately repeat, a plurality of times, supplying an oxidizing gas into the reaction chamber to transform the silicon-containing fluoride into an intermediate product by oxidization, and supplying hydrogen fluoride gas into the reaction chamber while exhausting gas from inside the reaction chamber to remove the intermediate product by a reaction between the hydrogen fluoride gas and the intermediate product.
    • 使用成膜装置的方法包括在反应室内依次进行主清洗处理和后清洗处理。 主要的清洗过程是在从反应室内部排出气体的同时,向反应室内供给含有氟的清洗气体,从而蚀刻含有硅的成膜副产物。 后清洗处理被设置为除去由主要清洗过程产生的含氟氟化物,并保留在反应室内,并交替重复多次,将氧化气体供应到反应室中以将含硅氟化物 通过氧化进入中间产物,并且在从反应室内排出气体的同时将氟化氢气体供应到反应室中,以通过氟化氢气体和中间产物之间的反应除去中间产物。