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    • 3. 发明授权
    • Vacuum sealed RF/microwave microresonator
    • 真空密封RF /微波微谐振器
    • US06621134B1
    • 2003-09-16
    • US10067299
    • 2002-02-07
    • Shayne Zurn
    • Shayne Zurn
    • H01L2982
    • H03H9/505B81B2201/0271B81C1/00246B81C2203/0735H03H9/2463
    • An electromechanical structure such as a MEMS resonator formed in the surface of a semiconductor body. A flexible beam containing a conductive plate is integrally formed in a cavity in the surface of a semiconductor body. A second conductive plate is parallel to the first along a sidewall of the cavity. A voltage applied across the first and second conductive plates forces the flexible beam to vibrate horizontally. A cap layer seals the cavity and maintains a vacuum in the cavity. The structure is smaller than the wavelength of the RF signal generated therefrom and, therefore, virtually shielded.
    • 形成在半导体本体的表面上的诸如MEMS谐振器的机电结构。 包含导电板的柔性梁一体地形成在半导体本体的表面中的空腔中。 第二导电板沿着空腔的侧壁平行于第一导电板。 施加在第一和第二导电板上的电压迫使柔性梁水平振动。 盖层密封空腔并在空腔中保持真空。 该结构小于从其产生的RF信号的波长,因此实际上被屏蔽。
    • 7. 发明申请
    • Mechanical serpentine device
    • 机械蛇形装置
    • US20060156851A1
    • 2006-07-20
    • US11293701
    • 2005-12-01
    • Stephen JacobsenDavid MarkusDavid MarceauShayne Zurn
    • Stephen JacobsenDavid MarkusDavid MarceauShayne Zurn
    • B25J18/00
    • B25J18/06Y10T74/20305
    • A serpentine device having a proximal end and a distal end comprising a series of discs arrayed in succession and on center along a common, neutral axis, wherein the discs comprise a first and second surface; and at least one flexible interconnect extending between and connecting each disc to any succeeding disc according to a pre-determined connection configuration, wherein the interconnects are indirectly connected to one another through the discs and configured to provide torsional and bending support to each of the discs connected thereto under an applied load, thus achieving a continuum of flexibility along an entire length of the serpentine device, as well as to facilitate the torquability of the serpentine device. The serpentine device may further comprise a bendable member and at least one transfer element configured to perform one or more transfer functions, namely the transfer of energy, work, fluid, electricity, light energy, sound energy, matter, etc. from one location to another location, and particularly from a source to one or more of the discs of the serpentine device. An actuation system is also featured, which is configured to selectively actuate the discs in a pre-determined direction in three-dimensional space.
    • 具有近端和远端的蛇形装置包括沿着共同的中立轴线连续排列并且在中心上的一系列盘,其中盘包括第一和第二表面; 以及至少一个柔性互连件,其根据预定的连接配置在每个盘片之间延伸并连接到任何后续的盘片,其中所述互连件通过所述盘片彼此间接连接并且被配置为向每个盘片提供扭转和弯曲支撑 在施加的负载下与其连接,从而在蛇形装置的整个长度上实现柔性的连续,以及促进蛇形装置的扭力。 蛇形装置还可以包括可弯曲构件和至少一个传送构件,其被配置为执行一个或多个传递功能,即将能量,工作,流体,电,光能,声能,物质等从一个位置传递到 另一位置,特别是从源头到蛇形装置的一个或多个盘。 还具有致动系统,其被构造成在三维空间中以预定的方向选择性地致动盘。