会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Microgyroscope with two resonant plates
    • 具有两个谐振板的微镜
    • US06467348B1
    • 2002-10-22
    • US09702845
    • 2000-11-01
    • Hoon SongSeog-soon BaekHyun-cheol KimByeoung Ju HaYong-soo Oh
    • Hoon SongSeog-soon BaekHyun-cheol KimByeoung Ju HaYong-soo Oh
    • G01P904
    • G01C19/574
    • A microgyroscope with two resonant plates is provided. The microgyroscope includes a substrate; first and second frames provided on the substrate to have a predetermined height, the first and second frames facing each other; a plurality of anchors supporting the first and second frames with respect to the substrate; first and second resonant plates provided between the first and second frames to be separated from each other by a predetermined distance; and a matching link unit connected to the first and second resonant plates so that it links the motion of one resonant plate to the motion of the other resonant plate such that the matching link unit is moved by the motion of one resonant plate in a first direction and then moves the other resonant plate in a second direction opposite to the first direction. In the microgyroscope, the difference between the resonance frequencies of the two resonant plates is removed by a self resonant matching structure implemented by the matching link, so that the range of an allowable process error is large, and the microgyroscope can be easily manufactured. Additionally, the reliability and the linearity of a resonance structure are improved. Since the driving beam and the sensing beam are separately designed, mode coupling can be prevented, thereby increasing the sensing sensibility.
    • 提供具有两个谐振板的微型陀螺仪。 微陀螺仪包括基底; 设置在基板上以具有预定高度的第一和第二框架,第一和第二框架彼此面对; 多个锚固件,其相对于所述基板支撑所述第一和第二框架; 设置在第一和第二框架之间的第一和第二谐振板彼此分开预定距离; 以及连接到第一和第二谐振板的匹配连接单元,使得它将一个谐振板的运动连接到另一个谐振板的运动,使得匹配连接单元通过一个谐振板在第一方向上的运动而移动 然后沿与第一方向相反的第二方向移动另一个谐振板。 在微陀螺仪中,通过由匹配链路实现的自谐振匹配结构去除两个谐振板的谐振频率之间的差异,使得允许的工艺误差的范围大,并且可以容易地制造微型陀螺仪。 此外,提高了谐振结构的可靠性和线性度。 由于驱动光束和感测光束是分开设计的,因此可以防止模式耦合,从而增加感测灵敏度。