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    • 2. 发明公开
    • Method and apparatus for determining a material's characteristics by photoreflectance using improved computer control
    • 用于通过测量使用改进的计算机控制的反射照片确定材料的性质的方法和装置。
    • EP0409271A2
    • 1991-01-23
    • EP90113969.1
    • 1990-07-20
    • Pollak, Fred H.Shen, Hong-En
    • Pollak, Fred H.Shen, Hong-En
    • G01N21/55G01N21/17
    • G01N21/1717G01J2001/242G01N21/55G01N2021/1719G01N2021/1725G01N2021/8461G01N2201/0695
    • A method and apparatus for determining the charac­teristics of materials, particularly of semiconductors, semi­conductor heterostructures and semiconductor interfaces by the use of photoreflectance, in which monochromatic light and modulated light beam reflected from the sample (62) is detec­ted to produce a d.c. signal and an a.c. signal, whereby the d.c. signal is applied to one input of a computer (70) and the a.c. signal is used with another input of the computer (70) which controls the light intensity of the monochromatic light impinging on the sample (62) to maintain the d.c. signal sub­stantially constant. A stepping motor (53) is preferably utilized for varying the light intensity of the monochromatic light which is controlled by a computer (70) to re-establish rapidly a predetermined d.c. signal established during normal­ization procedures when the light intensity of the monochrom­atic light changes, especially during change of its wave­length. Additionally, the modulation frequency of the modul­ated beam and/or the wavelength of the monochromatic light can also be varied by the computer (70).
    • 检测到一个用于确定性采矿方法和装置的材料特性特别是半导体,半导体异质结构和半导体界面通过使用光反射的,其中单色光和调制的光束从所述样品(62)反射,以产生一个直流 信号和交流 信号,由此所述直流 信号被施加到一台计算机的一个输入端(70)和所述交流 信号与所述计算机(70),其控制所述单色光照射在样品(62)的光强度的另一个输入端用于保持直流 大致恒定信号。 步进电机(53)优选地用于由计算机(70)改变所述单色光的光强度所有这一切都被控制以重新建立快速预定直流 期间归一化程序信号时建立的单色光的变化的光强度,其波长的变化期间爱更是如此。 另外,调制的束和/或单色的光的波长的调制频率因此可以由计算机(70)改变。