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1. 发明申请

WO2009096578A1 METHOD FOR PRODUCING GROUP III NITRIDE-BASED COMPOUND SEMICONDUCTOR, WAFER INCLUDING GROUP III NITRIDE-BASED COMPOUND SEMICONDUCTOR, AND GROUP III NITRIDE-BASED COMPOUND SEMICONDUCTOR DEVICE 审中-公开
标题翻译：用于生产III族氮化物的化合物半导体的方法，包括III族氮化物化合物半导体的滤波器和基于III族氮化物的化合物半导体器件
公开(公告)号：WO2009096578A1
公开(公告)日：2009-08-06
申请号：PCT/JP2009/051681
申请日：2009-01-27
申请人： TOYODA GOSEI CO., LTD. , OKUNO, Koji , NITTA, Shugo , SAITO, Yoshiki , USHIDA, Yasuhisa , NAKADA, Naoyuki , BOYAMA, Shinya
发明人： OKUNO, Koji , NITTA, Shugo , SAITO, Yoshiki , USHIDA, Yasuhisa , NAKADA, Naoyuki , BOYAMA, Shinya
IPC分类号： C30B29/38 , C23C16/20 , C23C16/34 , C30B25/18 , H01L21/205 , H01L33/00
CPC分类号： H01L21/0242 , C30B25/18 , C30B29/403 , H01L21/02433 , H01L21/0254 , H01L21/02609 , H01L21/0262 , H01L21/02658 , H01L33/007
摘要： To produce a Group III nitride-based compound semiconductor having a m-plane main surface and uniformly oriented crystal axes. A mesa having a side surface having an off-angle of 45° or less from c-plane is formed in a a-plane main surface of a sapphire substrate. Subsequently, trimethylaluminum is supplied at 300°C to 420°C, to thereby form an aluminum layer having a thickness of 4 nm or less. The aluminum layer is nitridated to form an aluminum nitride layer. Through the procedure, a Group III nitride-based compound semiconductor is epitaxially grown only from a side surface of the mesa having an off-angle of 45° or less from c-plane in the sapphire substrate having an a-plane main surface. Thus, a Group III nitride-based compound semiconductor having m-plane which is parallel to the main surface of the sapphire substrate can be formed.
摘要翻译：制造具有m面主面和均匀取向的晶轴的III族氮化物系化合物半导体。在蓝宝石基板的a面主表面上形成具有从c面偏离45°以下的侧面的台面。随后，在300℃〜420℃下供给三甲基铝，形成厚度为4nm以下的铝层。将铝层氮化以形成氮化铝层。通过该方法，在具有a面主表面的蓝宝石衬底中，从c面开始只从具有45°以下偏离角的台面的侧面外延生长III族氮化物系化合物半导体。因此，可以形成具有与蓝宝石基板的主表面平行的m面的III族氮化物系化合物半导体。

2. 发明专利

JP2003059117A Card type disk and management method for the same 审中-公开
标题翻译：卡类型盘及其管理方法
公开(公告)号：JP2003059117A
公开(公告)日：2003-02-28
申请号：JP2001247414
申请日：2001-08-16
申请人： Hajime Komori , Saito Yoshiki , 肇小森 , 斎藤芳樹
发明人： KOMORI HAJIME
IPC分类号： B42D15/10 , G11B7/004 , G11B7/24 , G11B20/10
摘要： PROBLEM TO BE SOLVED: To facilitate the registration on-line and to certify that a registered person is a member after registration. SOLUTION: This card type optical disk has a card body 2, a hole 3 formed at this card body 2, an information recording surface 5 of a circular shape centering at this hole 3 and a non-information recording surface 6 exclusive of the information recording surface 5. The non-information recording surface 6 is annexed with an identification symbol 8 intrinsic to every card type optical disk and the information recording surface 5 is recorded with a program readable by a computer 20. This program is so constituted as to send this identification symbol 8 through a network 21 to registration computers 22 and 23 for urging the computer reading the program to input the identification symbol 8 annexed to the non-information recording surface 6 and for registering the inputted identification symbol 8.
摘要翻译：要解决的问题：为了方便在线注册，并在注册后证明注册人是会员。解决方案：该卡型光盘具有卡体2，形成在该卡体2上的孔3，以该孔3为中心的圆形信息记录表面5和不包含信息记录的非信息记录表面6 非信息记录表面6附加有每个卡型光盘固有的识别符号8，并且信息记录表面5被记录有可由计算机20读取的程序。该程序被构造成发送这个识别符号8通过网络21到注册计算机22和23，用于敦促计算机读取程序以输入附加到非信息记录表面6的识别符号8并用于登记输入的识别符号8。

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