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1. 发明授权

EP1174783B1 Process-chamber flow control system 失效
标题翻译：过程室流量控制系统
公开(公告)号：EP1174783B1
公开(公告)日：2006-08-09
申请号：EP01116749.1
申请日：1992-03-13
申请人： PALMER, David W.
发明人： PALMER, David W.
IPC分类号： G05D7/00 , G05D7/01 , G05D7/06 , G05D16/10 , F24F3/16 , F24F11/047
CPC分类号： G05D7/0635 , F24F3/161 , F24F11/74 , F24F11/75
摘要： To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.

2. 发明公开

EP1174783A1 Process-chamber flow control system 失效
标题翻译：过程室流量控制系统
公开(公告)号：EP1174783A1
公开(公告)日：2002-01-23
申请号：EP01116749.1
申请日：1992-03-13
申请人： PALMER, David W.
发明人： PALMER, David W.
IPC分类号： G05D7/00 , G05D7/01 , G05D7/06 , G05D16/10 , F24F3/16 , F24F11/047
CPC分类号： G05D7/0635 , F24F3/161 , F24F11/74 , F24F11/75
摘要： To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.
摘要翻译：为了控制进入和/或离开处理室（例如洁净室）的空气流，将两级系统设置在进入和/或离开处理室的导管中。一个阶段包括调节器，其具有布置在环境与空气源或真空源之间的增压室（7,79）。调节器将压力保持在充气室内，压力介于环境压力和来源压力之间，并且压力与环境压力不同。调节器包括具有暴露于在环境与源之间流动的气室中的空气的前面（52）的活塞（5）以及暴露于环境压力的远端面（51）。活塞安装成可变地阻止通过调节器的空气流动，并且活塞的重量倾向于使活塞沿一个方向移动，从而减小活塞对气流的阻抗。另一个阶段包括位于调节器和环境之间的可调节阀（21,25,95），用于进一步阻止空气流动。

3. 发明公开

EP0853266A2 Process-chamber flow control system 失效
标题翻译： Prozesskammer的Durchflussregelungssystem
公开(公告)号：EP0853266A2
公开(公告)日：1998-07-15
申请号：EP98100282.7
申请日：1992-03-13
申请人： PALMER, David W.
发明人： PALMER, David W.
IPC分类号： G05D7/01
CPC分类号： G05D7/0635 , F24F3/161 , F24F11/74 , F24F11/75
摘要： To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.
摘要翻译：为了控制进入和/或离开处理室（例如洁净室）的空气流，两级系统设置在通向处理室和/或离开处理室的导管中。一级包括调节器，其具有设置在环境和空气源或真空源之间的增压室（7,79）。调节器在气室中保持在环境和源的压力之间的压力，这是与环境压力不同的恒定量。调节器包括具有暴露于在环境和源之间流动的增压室中的空气的正面（52）的活塞（5）和暴露于环境压力的远侧面（51）。活塞被安装成可变地阻碍通过调节器的空气流动，并且使得活塞的重量倾向于沿着一个方向移动活塞，以便减小活塞在气流上的阻抗。另一级包括位于调节器和环境之间的可调节阀（21,25,95），用于进一步阻碍空气流动。

4. 发明授权

EP0575533B1 PROCESS-CHAMBER FLOW CONTROL SYSTEM 失效
标题翻译：流动控制系统工艺室
公开(公告)号：EP0575533B1
公开(公告)日：1998-07-15
申请号：EP92908979.5
申请日：1992-03-13
申请人： PALMER, David W.
发明人： PALMER, David W.
IPC分类号： G05D7/00 , G05D7/01 , G05D7/06
CPC分类号： G05D7/0635 , F24F3/161 , F24F11/74 , F24F11/75
摘要： To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.

5. 发明公开

EP0667007A4 SYSTEM FOR CONTROLLING FLOW THROUGH A PROCESS REGION. 失效
标题翻译：控制系统设计与电源通过治疗区。
公开(公告)号：EP0667007A4
公开(公告)日：1995-10-11
申请号：EP94900432
申请日：1993-10-22
申请人： PALMER DAVID W
发明人： PALMER DAVID W
IPC分类号： F15B1/00 , B01D53/26 , B01L1/00 , B08B15/02 , F24F3/16 , F24F7/06 , F24F11/02 , F24F11/047 , F24F13/10 , F24F13/12 , F24F13/14 , G05D7/01 , G05D7/06 , G05D16/10 , G05D16/20 , G05D7/03
CPC分类号： B08B15/023 , F24F3/161 , F24F11/75 , F24F13/12 , F24F13/1426 , F24F2013/1433 , F24F2013/146 , F24F2013/1466 , G05D16/106 , G05D16/2093
摘要： A regulator for maintaining a constant partial vacuum in a region includes a path, through which fluid passes from the region to a vacuum source, and a piston (2) movably mounted at a constriction point (30). The piston has a frontal face (15), exposed to fluid in the path upstream of the constriction point (30). A piston distal face (16), exposed to a reference pressure, such as the pressure of region and piston weight tends to widen the path at the constriction point (30). A force is exerted on the piston by a spring (21) under compression, in a direction that tends to narrow the path at the constriction point. A buffering gas, introduced to the area between the piston's skirt (29) and the piston mounting structure (65), may be used to keep fumes from backing up into the region and/or to provide a bearing.

6. 发明公开

EP0575523A4 FLOW REGULATOR ADAPTABLE FOR USE WITH EXHAUST FROM A PROCESS CHAMBER. 失效
标题翻译：流量调节器具有可定制的工艺室排水用途。
公开(公告)号：EP0575523A4
公开(公告)日：1995-04-19
申请号：EP92908728
申请日：1992-03-13
申请人： PALMER DAVID
发明人： PALMER DAVID
IPC分类号： F16K31/12 , F16K31/126 , F24F3/16 , F24F7/06 , F24F11/04 , F24F11/047 , G05D7/00 , G05D7/01 , G05D7/06 , G05D16/10
CPC分类号： G05D7/0635 , F24F3/161 , F24F11/74 , F24F11/75
摘要： To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.

7. 发明公开

EP0804708A1 IMPROVED FLOW REGULATOR 失效
标题翻译：改良式稳压器
公开(公告)号：EP0804708A1
公开(公告)日：1997-11-05
申请号：EP96905155.0
申请日：1996-01-16
申请人： PALMER, David W.
发明人： PALMER, David W.
IPC分类号： B08B15 , F24F3 , F24F11 , F24F13 , G05D7 , G05D16
CPC分类号： F24F13/14 , B08B15/023 , F24F3/161 , F24F11/75 , F24F13/12 , F24F13/1426 , F24F2013/1433 , F24F2013/146 , F24F2013/1466 , F24F2110/40 , F24F2221/26 , G05D16/04 , Y10T137/7784 , Y10T137/7785 , Y10T137/8733 , Y10T137/87499
摘要： A regulator including a movably, preferably hingedly, mounted member having a distal face, exposed to a reference pressure, and a frontal face, exposed to fluid passing through the regulator. Attached to the member is a structure that variably impedes fluid flowing through the regulator. The amount that this structure impedes the fluid flow varies as a function of the difference between the pressure of fluid on the frontal face of the member and the reference pressure. The impeder may be an integral part of the piston extending into the path of the fluid flowing through the regulator, or it may be a separate structure attached to the member. As the member moves in response to changes in pressure differential across the piston, each movable segment is displaced with respect to its corresponding fixed segment. As the corresponding segments are further displaced with respect to each other, the impedance to flow increases. A restoring force or torque exerts a force on the member so as to tend to lessen the resistance on the fluid flow, and so that when there is no flow through the passageway the resistance is relatively low. The member may be mounted at the top of the regulator in order to make the regulator easy to clean to clean and maintain. A dashpot may be included in the regulator so as to reduce high-frequency oscillations that may occur in a finely tuned regulator. The regulator may include a bypass channel that permits a portion of the flow to bypass the impeder. A variable throttle valve mounted in the bypass channel is used to adjust the effect of the bypass channel.

8. 发明公开

EP0667006A1 REMOTE REGION VACUUM REGULATOR 失效
标题翻译：远程区域真空调节器
公开(公告)号：EP0667006A1
公开(公告)日：1995-08-16
申请号：EP93925005.0
申请日：1993-10-22
申请人： PALMER, David W.
发明人： PALMER, David W.
IPC分类号： F24F7 , B01D53 , B01L1 , B08B15 , F24F3 , F24F11 , F24F13 , G05D7 , G05D16
CPC分类号： F24F13/14 , B08B15/023 , F24F3/161 , F24F11/75 , F24F13/12 , F24F13/1426 , F24F2013/1466 , F24F2110/40 , F24F2221/26 , G05D16/04 , Y10S137/907 , Y10T137/7788 , Y10T137/7791
摘要： A regulator, which may be used to regulate in a remote region a constant partial vacuum. The regulator controls the flow of gas from an environment, through a region and to an evacuation means. The regulator's fluid path is bounded on opposite sides by two plates, which may be hingedly mounted, so that the two plates are substantially parallel to each other. Each of the plates have a conduit side, facing the fluid path, and a side facing a reference pressure. The first plate's reference-pressure side may be exposed to the region's pressure, and the second plate's reference-pressure side may be exposed to the environment's pressure. The regulator also includes an impeder attached to the plates for variably impeding the flow through the path based on the position of the plates. Preferably, the impeder includes a fixed grate and a movable grate. The fixed grate does not move with respect to the path. The movable grate is hingedly attached to the plates at points distal from the pivot points. The two grates are disposed immediately adjacent to each other, so that as the movable grate moves with respect to the fixed grate the impedance on the flow varies.
摘要翻译：调节器控制气体从环境流向区域并流向疏散装置。调节器的流体路径由两个铰接安装的平行板（51,55）在相对两侧限定。每个板具有面向流体路径（10）的导管侧（52,56）和面向参考压力的参考侧（53,57）。第一块板的参考压力侧可能会暴露在该区域的压力下，而第二块板的参考压力侧可能会暴露在环境压力下。该调节器还包括阻抗器（96,97），其包括固定的格栅（97）和在远离枢轴点（84,85）的点（86,87）处铰接地连接到板上的可移动格栅（96）。随着可移动炉排相对于固定炉排移动，流量阻抗变化。

9. 发明公开

EP0575533A4 PROCESS-CHAMBER FLOW CONTROL SYSTEM. 失效
标题翻译：流动控制系统工艺室。
公开(公告)号：EP0575533A4
公开(公告)日：1995-04-19
申请号：EP92908979
申请日：1992-03-13
申请人： PALMER DAVID W
发明人： PALMER DAVID W
IPC分类号： F16K31/12 , F16K31/126 , F24F3/16 , F24F7/06 , F24F11/04 , F24F11/047 , G05D7/00 , G05D7/01 , G05D7/06 , G05D16/10
CPC分类号： G05D7/0635 , F24F3/161 , F24F11/74 , F24F11/75
摘要： To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.

10. 发明公开

EP0575523A1 FLOW REGULATOR ADAPTABLE FOR USE WITH EXHAUST FROM A PROCESS CHAMBER 失效
标题翻译：流量调节器具有可定制的工艺室排水用途。
公开(公告)号：EP0575523A1
公开(公告)日：1993-12-29
申请号：EP92908728.0
申请日：1992-03-13
申请人： PALMER, David
发明人： PALMER, David
IPC分类号： F16K31 , F24F3 , F24F7 , F24F11 , G05D7 , G05D16
CPC分类号： G05D7/0635 , F24F3/161 , F24F11/74 , F24F11/75
摘要： To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.

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