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    • 3. 发明申请
    • DEVICE FOR PULLING UP SINGLE CRYSTAL
    • 用于拉出单晶的装置
    • WO1993000462A1
    • 1993-01-07
    • PCT/JP1991000849
    • 1991-06-24
    • KOMATSU ELECTRONIC METALS CO., LTD.TOMIOKA, JunsukeNAGAI, KazunoriMATSUZAKI, Akihiro
    • KOMATSU ELECTRONIC METALS CO., LTD.
    • C30B15/00
    • C30B35/00C30B15/14Y10T117/1032Y10T117/1052Y10T117/1068
    • A device for pulling up a single crystal produced through the Czochralski process, characterized in that: one side thereof facing the quartz crucible is composed of a heat absorbing body whereas the other a heat insulating body; a first cylindrical screen having at upper and lower ends an outwardly directed annular rim and inwardly directed one, respectively, and also having a corner part which faces said crucible and is formed into a curved or polygonal surface is disposed around a single crystal pulling up area with said annular rim at the lower end positioned near an area in which molten material is filled; and a second screen in the shape of parabola at cross-section to open at the central part while surrounding the single crystal pulling up area, and having an outwardly directed annular rim at the upper end is provided inside said first screen, and, thus, the device intends to quickly pull up a single crystal bar while preventing contamination of crystal otherwise caused by impurities and interruption of single-crystallization. A second screen in such a cross-sectional shape as extending along the first screen may be disposed inside the first screen and the second screen may be provided with a forced cooling mechanism.
    • 一种用于提拉通过切克劳斯基法生产的单晶的装置,其特征在于,其面对石英坩埚的一侧由吸热体组成,而另一侧由绝热体构成; 第一圆柱形屏幕在上端和下端分别具有向外指向的环形边缘和向内指向的环形边缘,并且还具有面向所述坩埚并且形成为弯曲或多边形表面的拐角部分围绕单晶提拉区域 其下端处的所述环形边缘位于熔融材料填充区域附近; 并且在所述第一屏幕的内部设置有呈抛物线形状的第二屏幕,所述第二屏幕在横截面处在中心部分处开放,同时围绕所述单晶提拉区域,并且在所述第一屏幕的内侧设置有向外定向的环形边缘, 该装置意图快速拉起单晶棒,同时防止由杂质引起的晶体污染和单结晶中断。 沿着第一屏幕延伸的这种横截面形状的第二屏幕可以设置在第一屏幕内部,并且第二屏幕可以设置有强制冷却机构。