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    • 6. 发明授权
    • Collimator for high takeoff angle energy dispersive spectroscopy (EDS)
detectors
    • 用于高起飞角能量色散光谱(EDS)检测器的准直器
    • US5847388A
    • 1998-12-08
    • US872945
    • 1997-06-11
    • Steven J. FooteMinoru Shinohara
    • Steven J. FooteMinoru Shinohara
    • H01J37/252H01J37/244
    • H01J37/244H01J2237/2442H01J2237/2555
    • A two-piece collimator for use in high takeoff angle energy dispersive spectroscopy (EDS) is provided. The two-piece collimator includes a base section and an extension section. The collimator base section may be attached rigidly to the end of an EDS detector tube. The collimator extension section is removably attached to and extends from the base section. Apertures through the base and extension sections are easily aligned with each other and with an EDS detector. The length of the collimator extension section is preferably selected such that the distal end of the extension section extends below the bottom of an upper pole piece of an electron microscope in which the collimator is employed. A two-piece collimator in accordance with the present invention effectively reduces stray radiation, including back scattered electrons, which may cause artifacts in a detected EDS X-ray spectrum. Alternatively, a collimator in accordance with the present invention may be used in combination with an existing pole piece insert collimation device by removing the extension section from the two-piece collimator.
    • 提供了一种用于高起飞角能量色散光谱(EDS)的两件式准直器。 两件式准直器包括基部和延伸部。 准直器基部可以刚性地附接到EDS检测器管的端部。 准直器延伸部分可拆卸地附接到基部并从基部延伸。 通过基座和延伸部分的孔径可以很容易地与EDS检测器对准。 优选地选择准直器延伸部分的长度,使得延伸部分的远端延伸到其中使用准直器的电子显微镜的上极片的底部的下方。 根据本发明的两件式准直器有效地减少包含背散射电子的杂散辐射,这可能在检测到的EDS X射线光谱中引起伪影。 或者,根据本发明的准直器可以与现有的极片插入准直装置组合使用,通过从两件式准直器移除延伸部分。