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    • 2. 发明专利
    • Improvements in electric lamp shade carriers
    • GB683419A
    • 1952-11-26
    • GB925950
    • 1950-04-14
    • KENNETH COLLINS
    • F21V1/02
    • 683,419. Lampshade carriers. COLLINS, K. March 8, 1951 [April 14, 1950], No. 9259/50. Class 75(ii) In a lampshade carrier of the kind having two-part articulated arms 2, 2a extending upwardly from a lampholder ring 1 and terminating in a lampshade support, formed by stepped radial arms 6, at least one of the stepped arms 6 has a key member 8 extending radially from the rising portion thereof above the shade supporting portion to engage the upper side of a lampshade frame ring 12 and hold the shade 11 in whatever angular position is given to the upper parts 2a of the carrier arms. The key members 8 may be formed of wire shaped as shown and welded to the arm 6 of the shade support, and the two-part carrier arms may have a locking nut 4 to hold them in the desired angular relationship. Alternatively the key member 8 may be formed integral with the lampshade support by appropriate bending of the wire thereof. The Provisional Specification describes a key member in the form of a curved wire clip arranged to co-operate with one of the lamp shade rib members.
    • 7. 发明申请
    • Plasma immersion ion implantation reactor having multiple ion shower grids
    • 具有多个离子淋浴网格的等离子体浸没离子注入反应器
    • US20060019039A1
    • 2006-01-26
    • US10895784
    • 2004-07-20
    • Hiroji HanawaTsutomu TanakaKenneth CollinsAmir Al-BayatiKartik RamaswamyAndrew Nguyen
    • Hiroji HanawaTsutomu TanakaKenneth CollinsAmir Al-BayatiKartik RamaswamyAndrew Nguyen
    • C23C14/00
    • H01J37/32357C23C14/046C23C14/48C23C16/045H01J37/32412
    • A plasma immersion ion implantation process for implanting a selected species at a desired ion implantation depth profile in a workpiece is carried out in a reactor chamber having a set of plural parallel ion shower grids that divide the chamber into an upper ion generation region and a lower process region, each of the ion shower grids having plural orifices in mutual registration from grid to grid, the plural orifices oriented in a non-parallel direction relative to a surface plane of the respective ion shower grid. The process includes placing a workpiece in the process region, the workpiece having a workpiece surface generally facing the surface plane of the closest one of the plural ion shower grids, and furnishing the selected species into the ion generation region. The process further includes evacuating the process region, and applying plasma source power to generate a plasma of the selected species in the ion generation region. The process also includes applying successive grid potentials to successive ones of the grids and applying a bias potential to the workpiece. The combination of the grid and bias potentials corresponds to the desired ion implantation depth profile in the workpiece.
    • 在具有一组多个并联离子淋浴网格的反应室中进行用于在工件中以期望的离子注入深度分布植入选定物种的等离子体浸没离子注入方法,该多个平行离子淋浴网将腔室分成上部离子产生区域和下部 处理区域,每个离子淋浴栅格具有从栅格到栅格相互配准的多个孔,多个孔相对于各个离子喷淋栅格的表面平行于非平行方向。 该工艺包括将工件放置在工艺区域中,工件具有大致面对多个离子淋浴栅格中最接近的一个的表面的工件表面,并将所选择的物质提供到离子产生区域中。 该方法还包括抽空处理区域,以及施加等离子体源功率以在离子产生区域中产生所选物种的等离子体。 该过程还包括将连续的栅格电势施加到连续的栅格并向工件施加偏置电位。 栅格和偏置电位的组合对应于工件中期望的离子注入深度分布。
    • 9. 发明申请
    • Reactive sputter deposition plasma reactor and process using plural ion shower grids
    • 反应溅射沉积等离子体反应器和使用多个离子淋浴网格的方法
    • US20050211547A1
    • 2005-09-29
    • US10873609
    • 2004-06-22
    • Hiroji HanawaTsutomu TanakaKenneth CollinsAmir Al-BayatiKartik RamaswamyAndrew Nguyen
    • Hiroji HanawaTsutomu TanakaKenneth CollinsAmir Al-BayatiKartik RamaswamyAndrew Nguyen
    • C23C14/00C23C14/34C23C14/35C23C16/04C23C16/507H01J37/32
    • H01J37/32449C23C14/0036C23C14/358C23C16/045C23C16/507H01J37/32357
    • A reactive sputter deposition process is carried out in a reactor chamber having a set of plural parallel ion shower grids that divide the chamber into an upper ion generation region and a lower process region, each of the ion shower grids having plural orifices in mutual registration from grid to grid, each orifice being oriented in a non-parallel direction relative to a surface plane of the respective grid. A workpiece is placed in the process region, the workpiece having a workpiece surface generally facing the surface plane of nearest one of the ion shower grids. The process includes sputtering deposition precursor species from a sputter target comprising a semiconductor species in the ion generation region, applying RF plasma source power to the ion generation region so as to generate a plasma of the deposition precursor species sputtered from the target, applying successive grid potentials to successive ones of the grids to create a flux of ions through at least some of the plural grids, and furnishing a gas species into the reactor chamber for combining with the semiconductor atoms to form molecules that deposit on the workpiece surface.
    • 反应性溅射沉积工艺在具有一组多个平行离子淋浴网格的反应器室中进行,所述多个并联离子淋浴网将腔室分成上部离子产生区域和下部处理区域,每个离子淋浴网格具有相互配准的多个孔口 网格到网格,每个孔口相对于相应网格的表面平面在非平行方向上定向。 工件被放置在工艺区域中,工件的工件表面一般面对最接近离子淋浴网格的表面。 该方法包括从离子产生区域中包含半导体物质的溅射靶溅射沉积前体物质,将RF等离子体源功率施加到离子产生区域,以产生从靶溅射的沉积前体物质的等离子体,施加连续格栅 通过至少一些多个栅格产生离子通量的电势,并且将气体物质提供到反应器室中以与半导体原子组合以形成沉积在工件表面上的分子。
    • 10. 发明申请
    • Chemical vapor deposition plasma reactor having an ion shower grid
    • 具有离子淋浴网格的化学气相沉积等离子体反应器
    • US20050211171A1
    • 2005-09-29
    • US10873474
    • 2004-06-22
    • Hiroji HanawaTsutomu TanakaKenneth CollinsAmir Al-BayatiKartik RamaswamyAndrew Nguyen
    • Hiroji HanawaTsutomu TanakaKenneth CollinsAmir Al-BayatiKartik RamaswamyAndrew Nguyen
    • C23C16/00C23C16/04C23C16/507H01J37/32
    • H01J37/32449C23C16/045C23C16/507H01J37/32357
    • A plasma reactor for processing a semiconductor workpiece includes a reactor chamber and an ion shower grid dividing the chamber into an upper ion generation region and a lower process region, the ion shower grid having plural orifices oriented in a non-parallel direction relative to a surface plane of the grid. A workpiece support in the process region has a workpiece support surface in facing relationship to the ion shower grid. The reactor further includes a reactive species source for introducing into the ion generation region a chemical vapor deposition precursor species, a vacuum pump coupled to the process region, a plasma source power applicator for generating a plasma in the ion generation region and a grid potential source coupled to the ion shower grid. The orifices through the grid have an aspect ratio sufficient to limit ion trajectories in the process region to a narrow angular range about the non-parallel direction and a resistance to gas flow sufficient to support a pressure drop of at least a factor of about 4 across the grid.
    • 用于处理半导体工件的等离子体反应器包括反应室和将室分成上离子产生区域和下处理区域的离子喷淋栅格,离子喷淋栅格具有相对于表面在非平行方向上取向的多个孔口 电网的平面 在工艺区域中的工件支撑件具有与离子淋浴网格面对的工件支撑表面。 所述反应器还包括用于将化学气相沉积前体物质,耦合到所述工艺区域的真空泵引入所述离子产生区域中的反应物质源,用于在所述离子产生区域中产生等离子体的等离子体源功率施加器和栅极电位源 耦合到离子淋浴网格。 通过电网的孔口具有足以将过程区域中的离子轨迹限制在围绕非平行方向的窄角度范围的宽高比,以及足以支持至少约4倍的压降的气流阻力 电网。