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1. 发明授权

US09630411B2 Method of improving the yield of a nozzle plate fabrication process 有权
公开(公告)号：US09630411B2
公开(公告)日：2017-04-25
申请号：US14113826
申请日：2012-04-17
申请人： Paul Van Der Sluis , Alwin Rogier Martijn Verschueren , Adrianus Antonius Johannes Op 't Hoog , Jeroen Herman Lammers
发明人： Paul Van Der Sluis , Alwin Rogier Martijn Verschueren , Adrianus Antonius Johannes Op 't Hoog , Jeroen Herman Lammers
IPC分类号： G01R31/28 , B41J2/16
CPC分类号： B41J2/162 , B41J2/1625 , Y10T29/49401 , Y10T29/53
摘要： There is provided a method of improving the yield of a nozzle plate fabrication process, the method comprising determining a variation in the size of nozzles in a nozzle plate from a predetermined size or range of sizes for the nozzles, the nozzles in the nozzle plate having been fabricated using a plurality of mandrels, each mandrel defining a respective nozzle in the nozzle plate and determining modifications to the size of one or more mandrels in the plurality of mandrels to compensate for the determined variation in the size of nozzles in the nozzle plate. Also provided is a method of fabricating a nozzle plate, the method comprising fabricating a nozzle plate having a plurality of nozzles using a plurality of mandrels on a substrate, each mandrel defining a respective nozzle in the nozzle plate, the mandrels in the plurality of mandrels having varying sizes in order to compensate for local variations in the fabrication process that would result in local variations in the size of nozzles in the nozzle plate from a predetermined size or range of sizes.

2. 发明授权

US09572944B2 Nebulizer, a control unit for controlling the same, a nebulizing element and a method of operating a nebulizer 有权
标题翻译：雾化器，用于控制雾化器的控制单元，雾化元件和操作喷雾器的方法
公开(公告)号：US09572944B2
公开(公告)日：2017-02-21
申请号：US14344724
申请日：2012-08-30
申请人： Paul Van Der Sluis , Alwin Rogier Martijn Verschueren , Markus Hijlkema , Jeroen Herman Lammers
发明人： Paul Van Der Sluis , Alwin Rogier Martijn Verschueren , Markus Hijlkema , Jeroen Herman Lammers
IPC分类号： B05B1/08 , A61M11/00 , A61M15/00 , B05B12/08 , B05B17/00
CPC分类号： A61M11/001 , A61M11/005 , A61M15/0085 , A61M2205/33 , A61M2205/50 , A61M2205/60 , A61M2205/6018 , A61M2205/6054 , A61M2205/6063 , B05B12/08 , B05B17/0638 , B05B17/0646 , B05B17/0669
摘要： There is provided a control unit for controlling the operation of a nebulizer, the nebulizer comprising a reservoir chamber for storing a liquid to be nebulised, an actuator, and a nebulizing element comprising a plurality of nozzles arranged to nebulize the liquid upon operation of the actuator; wherein the control unit is configured to obtain an indication of the size of the nozzles in the nebulizing element; and control the operation of the actuator based on the obtained indication to provide nebulised liquid at a required output rate and/or with droplets of a required size.
摘要翻译：提供了一种用于控制雾化器操作的控制单元，喷雾器包括用于存储要喷雾的液体的储存室，致动器和雾化元件，该喷雾元件包括多个喷嘴，喷嘴布置成在致动器操作时使液体雾化 ; 其中所述控制单元被配置为获得所述喷雾元件中的喷嘴的尺寸的指示; 并且基于所获得的指示来控制致动器的操作，以提供所需输出速率的雾化液体和/或所需尺寸的液滴。

3. 发明授权

US08696969B2 Imprint lithography method and apparatus 有权
标题翻译：压印光刻方法和装置
公开(公告)号：US08696969B2
公开(公告)日：2014-04-15
申请号：US12698368
申请日：2010-02-02
申请人： Sander Frederik Wuister , Johan Frederik Dijksman , Yvonne Wendela Kruijt-Stegeman , Jeroen Herman Lammers , Leendert Van Der Tempel
发明人： Sander Frederik Wuister , Johan Frederik Dijksman , Yvonne Wendela Kruijt-Stegeman , Jeroen Herman Lammers , Leendert Van Der Tempel
IPC分类号： B29C59/02
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An imprint lithography method is provided. The method includes undertaking first and second imprints, which comprises for each imprint: for an area of a substrate provided with a plurality of drops of imprintable medium in respectively first and second configurations, imprinting a pattern in the imprintable medium using a same imprint template, pockets being formed between the drops of the imprintable medium, the imprint template and the substrate during the imprinting of the pattern, wherein the first configuration of drops of imprintable medium is different from the second configuration of drops of imprintable medium, such that pockets formed during the second imprint are formed at different locations relative to the imprint template to pockets formed during the first imprint.
摘要翻译：提供压印光刻方法。该方法包括进行第一和第二印记，其包括用于每个印记：对于分别具有多个可压印介质的第一和第二配置的液滴的基板的区域，使用相同的印模模板将图案压印在可压印介质中，在压印图案期间，在可压印介质的液滴，压印模板和基板之间形成凹穴，其中可压印介质的液滴的第一配置不同于可压印介质的液滴的第二配置，第二印记形成在相对于印模模板的不同位置，形成在第一印记中形成的凹坑。

4. 发明申请

US20130269151A1 VACUUM CLEANING DEVICE, COMPRISING A UNIT WITH A MOVABLE SURFACE FOR GENERATING AN OSCILLATING AIRFLOW 有权
标题翻译：真空清洁装置，包含用于产生振荡气流的可移动表面的单元
公开(公告)号：US20130269151A1
公开(公告)日：2013-10-17
申请号：US13995712
申请日：2011-12-27
申请人： Gerben Kooijman , Jan Frederik Suijver , Okke Ouweltjes , Jeroen Herman Lammers
发明人： Gerben Kooijman , Jan Frederik Suijver , Okke Ouweltjes , Jeroen Herman Lammers
IPC分类号： A47L9/10
CPC分类号： A47L9/106 , A47L5/14 , A47L9/0072 , A47L9/02 , A47L9/0483 , B08B5/02
摘要： A vacuum cleaning device comprises a unit (1) for aerodynamically affecting dust particles and/or a surface (40) to be cleaned in order for the particles to become dislodged from the surface (40) and to be received by the unit (1). The unit (1) comprises a housing (10) having an internal space (11) enclosed by a housing wall (12) in which at least one opening (13) is arranged, a movable surface (30) which is integrated in the housing wall (12), and means (31) for actuating the movable surface (30), which are adapted to realize an oscillating movement of the surface (30) that causes air to alternately be drawn into the housing (10) through the opening (13) and expelled from the housing (10) through the opening (13). At least a portion of the housing wall (12), particularly a portion of the housing wall (12) in which the opening (13) is located, is movably arranged in the unit (1).
摘要翻译：真空清洁装置包括用于空气动力学影响灰尘颗粒的单元（1）和/或待清洁的表面（40），以使颗粒从表面（40）移出并被单元（1）接收，。单元（1）包括壳体（10），其具有由壳体壁（12）包围的内部空间（11），其中布置有至少一个开口（13）;可移动表面（30），其集成在壳体壁（12）和用于致动可移动表面（30）的装置（31），其适于实现表面（30）的振荡运动，其使空气交替地通过开口（10）被吸入壳体（10） 13），并通过开口（13）从壳体（10）排出。壳体壁（12）的至少一部分，特别是开口（13）所在的壳体壁（12）的一部分可移动地布置在单元（1）中。

5. 发明申请

US20100258274A1 COOLING DEVICE UTILIZING INTERNAL SYNTHETIC JETS 有权
标题翻译：使用内部合成喷嘴的冷却装置
公开(公告)号：US20100258274A1
公开(公告)日：2010-10-14
申请号：US12746208
申请日：2008-11-28
申请人： Leendert Van Der Tempel , Jeroen Herman Lammers , Petrus Johannes Maria Van Os
发明人： Leendert Van Der Tempel , Jeroen Herman Lammers , Petrus Johannes Maria Van Os
IPC分类号： F28D21/00
CPC分类号： F04F7/00 , F21V29/63 , F21V33/0056 , F21Y2115/10 , H01L2924/0002 , H01L2924/00
摘要： A synthetic jet cooling device (1) for cooling an object (5), comprising: a transducer (10) adapted to generate velocity waves, and an enclosure (4) arranged to receive the velocity waves via an actuated aperture (8). The enclosure (4) is sufficiently large to generate, at the actuated aperture (8), an internal synthetic jet inside the enclosure (4). Furthermore, the enclosure (4) is arranged to contain the object (5), thereby enabling cooling of the object (5) by the internal synthetic jet. The arrangement typically permits multifunctional use of an existing enclosure, containing the object to be cooled, both for its original purpose (e.g. a reflector in a lamp, or a LED backlight module) and as an enclosure generating internal synthetic jets, why the cooling device typically requires virtually no extra space and weight, and can be provided at a low cost.
摘要翻译： 1.一种用于冷却物体（5）的合成喷射冷却装置（1），包括：适于产生速度波的换能器（10），以及经由致动孔（8）接收所述速度波的外壳（4）。外壳（4）足够大以在致动的孔（8）处产生在外壳（4）内的合成射流。此外，外壳（4）被布置成容纳物体（5），从而能够通过内部合成射流来冷却物体（5）。该装置通常允许多功能使用包含要冷却的物体的现有外壳，其原始目的（例如，灯中的反射器或LED背光模块）以及产生内部合成射流的外壳，为什么冷却装置通常几乎不需要额外的空间和重量，并且可以以低成本提供。

6. 发明申请

US20090146347A1 Imprint lithography 有权
标题翻译：印刷光刻
公开(公告)号：US20090146347A1
公开(公告)日：2009-06-11
申请号：US12314246
申请日：2008-12-05
申请人： Yvonne Wendela Kruijt-Stegeman , Sander Frederik Wuister , Ivar Schram , Jeroen Herman Lammers
发明人： Yvonne Wendela Kruijt-Stegeman , Sander Frederik Wuister , Ivar Schram , Jeroen Herman Lammers
IPC分类号： B29C59/02
CPC分类号： G03F7/0002 , B29C43/021 , B29C2043/025 , B82Y10/00 , B82Y40/00
摘要： An imprint template cover for an imprint template having a pattern feature thereon. The cover is configured such that, in use, it extends around the pattern feature of the imprint template, and such that the cover does not contact the pattern feature.
摘要翻译：用于其上具有图案特征的印模模板的印模模板盖。盖被构造成使得在使用中它围绕压印模板的图案特征延伸，并且使得盖不接触图案特征。

7. 发明授权

US09645489B2 Imprint lithography 有权
公开(公告)号：US09645489B2
公开(公告)日：2017-05-09
申请号：US13026574
申请日：2011-02-14
申请人： Jeroen Herman Lammers , Sander Frederik Wuister , Roelof Koole
发明人： Jeroen Herman Lammers , Sander Frederik Wuister , Roelof Koole
IPC分类号： B32B33/00 , B29C59/02 , G03F7/00 , B82Y10/00 , B82Y40/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10T428/24802
摘要： An imprint lithography template is disclosed. The imprint lithography template includes a plurality of pattern features extending from a plane of a body of the imprint lithography template, and away from that body, the pattern features to be used to apply a pattern into an imprintable medium. The imprint lithography template further includes a plurality of assist features in the form of recesses extending from the plane of that body of the imprint lithography template, and into that body. A method for forming the assist features in the imprint lithography template, using self-assembled block copolymers as an etch resist, is also disclosed.

8. 发明授权

US09596969B2 Vacuum cleaning device, comprising a unit with a movable surface for generating an oscillating airflow 有权
公开(公告)号：US09596969B2
公开(公告)日：2017-03-21
申请号：US13995712
申请日：2011-12-27
申请人： Gerben Kooijman , Jan Frederik Suijver , Okke Ouweltjes , Jeroen Herman Lammers
发明人： Gerben Kooijman , Jan Frederik Suijver , Okke Ouweltjes , Jeroen Herman Lammers
IPC分类号： A47L5/00 , A47L9/10 , A47L5/14 , A47L9/00 , A47L9/02 , A47L9/04 , B08B5/02
CPC分类号： A47L9/106 , A47L5/14 , A47L9/0072 , A47L9/02 , A47L9/0483 , B08B5/02
摘要： A vacuum cleaning device comprises a unit (1) for aerodynamically affecting dust particles and/or a surface (40) to be cleaned in order for the particles to become dislodged from the surface (40) and to be received by the unit (1). The unit (1) comprises a housing (10) having an internal space (11) enclosed by a housing wall (12) in which at least one opening (13) is arranged, a movable surface (30) which is integrated in the housing wall (12), and means (31) for actuating the movable surface (30), which are adapted to realize an oscillating movement of the surface (30) that causes air to alternately be drawn into the housing (10) through the opening (13) and expelled from the housing (10) through the opening (13). At least a portion of the housing wall (12), particularly a portion of the housing wall (12) in which the opening (13) is located, is movably arranged in the unit (1).

9. 发明授权

US09547235B2 Imprint lithography apparatus and method 有权
标题翻译：压印光刻设备及方法
公开(公告)号：US09547235B2
公开(公告)日：2017-01-17
申请号：US12898084
申请日：2010-10-05
申请人： Jeroen Herman Lammers , Sander Frederik Wuister , Yvonne Wendela Kruijt-Stegeman , Roelof Koole
发明人： Jeroen Herman Lammers , Sander Frederik Wuister , Yvonne Wendela Kruijt-Stegeman , Roelof Koole
IPC分类号： G03F7/00 , B82Y10/00 , B82Y40/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An imprint lithography method is disclosed for forming a patterned layer from an imprintable liquid medium on a substrate by means of an imprint template having a patterned surface. The method involves contacting the patterned surface and imprintable liquid medium together for a filling period. Light emergent (e.g., scattered or reflected) from an interface between the medium and the patterned surface is collected and measured during the filling period to obtain data concerning one or more voids at the interface, and an estimated end time for the filling period is derived from a relationship between the data and time. The method may allow subsequent process steps to be undertaken more rapidly, with reduced risk of defects arising from remnants of unfilled voids. An imprint lithography apparatus and component for putting the method into effect are also disclosed.
摘要翻译：公开了一种压印光刻方法，用于通过具有图案化表面的压印模板从衬底上的可压印液体介质形成图案化层。该方法包括将图案化表面和可压印液体介质接合在一起，以达到填充时间。在填充期间收集和测量从介质和图案化表面之间的界面出现的轻微的（例如，散射或反射）以获得关于界面处的一个或多个空隙的数据，并且导出填充时间的估计结束时间从数据和时间之间的关系。该方法可以允许更快速地进行随后的工艺步骤，同时减少由未填充的空隙残余物引起的缺陷的风险。还公开了一种用于使该方法生效的压印光刻设备和组件。

10. 发明授权

US08961801B2 Imprint lithography method and apparatus 有权
标题翻译：压印光刻方法和装置
公开(公告)号：US08961801B2
公开(公告)日：2015-02-24
申请号：US12869381
申请日：2010-08-26
申请人： Sander Frederik Wuister , Vadim Yevgenyevich Banine , Johan Frederik Dijksman , Yvonne Wendela Kruijt-Stegeman , Jeroen Herman Lammers , Roelof Koole
发明人： Sander Frederik Wuister , Vadim Yevgenyevich Banine , Johan Frederik Dijksman , Yvonne Wendela Kruijt-Stegeman , Jeroen Herman Lammers , Roelof Koole
IPC分类号： C03C15/00 , B44C1/20 , B82Y10/00 , B82Y40/00 , G03F7/00
CPC分类号： B29C43/34 , B29C43/021 , B29C43/58 , B29C2043/025 , B29K2101/12 , B44C1/20 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： In an embodiment, there is provided an imprint lithography method that includes providing a first amount of imprintable medium on a first area of a substrate, the first amount of imprintable medium, when fixed, having a first etch rate; and providing a second amount of imprintable medium on a second, different area of the substrate, the second amount of imprintable medium, when fixed, having a second, different etch rate.
摘要翻译：在一个实施例中，提供了压印光刻方法，其包括在衬底的第一区域上提供第一量的可压印介质，当固定时，第一量的可压印介质具有第一蚀刻速率; 以及在所述基板的第二不同区域上提供第二量的可压印介质，所述第二量的可压印介质在固定时具有第二不同的蚀刻速率。

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