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1. 发明授权

US09666407B2 Electrostatic quadrupole deflector for microcolumn 有权
公开(公告)号：US09666407B2
公开(公告)日：2017-05-30
申请号：US14631330
申请日：2015-02-25
申请人： Tae Sik Oh , Ho Seob Kim , Dae Wook Kim
发明人： Tae Sik Oh , Ho Seob Kim , Dae Wook Kim
IPC分类号： H01J37/147 , H01J37/073 , H01J37/26 , H01J9/02
CPC分类号： H01J37/1477 , H01J9/02 , H01J37/073 , H01J37/26 , H01J2237/04924 , H01J2237/1516
摘要： Disclosed is an electrostatic quadrupole deflector for a microcolumn. The deflector includes an electron beam passage hole, deflecting electrodes to which a deflection voltage is applied, and floating electrodes to which the deflection voltage is not applied. The deflector is structurally stable and has a simple driving system. The deflector has good performance and characteristics.

2. 发明授权

US08071955B2 Magnetic deflector for an electron column 有权
标题翻译：用于电子柱的磁偏转器
公开(公告)号：US08071955B2
公开(公告)日：2011-12-06
申请号：US12600266
申请日：2008-05-15
申请人： Ho Seob Kim , Young Chul Kim
发明人： Ho Seob Kim , Young Chul Kim
IPC分类号： H01J3/26 , H01J37/14 , H01J37/147
CPC分类号： H01J37/147 , H01J37/153 , H01J37/28 , H01J2237/1205 , H01J2237/152 , H01J2237/1532
摘要： The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).
摘要翻译：本发明一般涉及用于产生电子束的微柱偏转器，更具体地，涉及一种能够扫描或移动电子束或用作使用磁场的标称器的偏转器。根据本发明的偏转器（100）包括一个或多个偏转器电极。每个偏转器电极包括由导体或半导体制成的芯体（12）和缠绕在芯部（12）上的线圈（11）。

3. 发明申请

US20080315096A1 Portable Electron Microscope Using Micro-Column 有权
标题翻译：便携式电子显微镜使用微柱
公开(公告)号：US20080315096A1
公开(公告)日：2008-12-25
申请号：US11792156
申请日：2005-09-01
申请人： Ho Seob Kim , Byeng Jin Kim
发明人： Ho Seob Kim , Byeng Jin Kim
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , G01N23/04 , H01J37/04 , H01J37/185 , H01J2237/0245 , H01J2237/04924 , H01J2237/1205 , H01J2237/1503 , H01J2237/1825 , H01J2237/188 , H01J2237/204
摘要： Provided is a portable electron microscope using a microcolumn. The portable electron microscope includes a microcolumn, a low vacuum pump, a high vacuum pump, an ultra-high vacuum ion pump, a first chamber for receiving and fixing the microcolumn and a sample to be measured and forming a vacuum by means of the pumps, a controller, and a case for receiving the pumps, the chamber and the controller.
摘要翻译：提供了使用微柱的便携式电子显微镜。便携式电子显微镜包括微柱，低真空泵，高真空泵，超高真空离子泵，用于接收和固定微柱的第一室和待测量的样品并通过泵形成真空，控制器和用于接收泵，腔室和控制器的壳体。

4. 发明申请

US20080211380A1 Scanning Field Emission Display 审中-公开
标题翻译：扫描场发射显示
公开(公告)号：US20080211380A1
公开(公告)日：2008-09-04
申请号：US11573612
申请日：2005-08-11
申请人： Ho Seob Kim , Byeng Jin Kim
发明人： Ho Seob Kim , Byeng Jin Kim
IPC分类号： H01J1/62
CPC分类号： H01J31/127
摘要： Provided is a scanning field emission display (SFED). The SFED includes an electron emitter and a module for inducing electron emission of the electron emitter and deflecting an electron beam. A multi-SFED may be realized as a large-sized thin and flat display by arranging in an n×m array.
摘要翻译：提供了扫描场发射显示（SFED）。 SFED包括电子发射器和用于诱导电子发射体的电子发射和偏转电子束的模块。多SFED可以通过以n×m阵列排列而实现为大尺寸的薄型平板显示器。

5. 发明授权

US06281508B1 Precision alignment and assembly of microlenses and microcolumns 失效
标题翻译：精密对准和组装微透镜和微柱
公开(公告)号：US06281508B1
公开(公告)日：2001-08-28
申请号：US09246573
申请日：1999-02-08
申请人： Kim Y. Lee , Ho-Seob Kim , Stephen A. Rishton , Tai-Hon Philip Chang
发明人： Kim Y. Lee , Ho-Seob Kim , Stephen A. Rishton , Tai-Hon Philip Chang
IPC分类号： G21K108
CPC分类号： B82Y15/00 , H01J9/18 , H01J37/12 , H01J2237/1205
摘要： A method and the associated apparatus for alignment and assembly of microlenses and microcolumns in which aligning structures such as rigid fibers are used to precisely align multiple microlens components. Alignment openings are formed in the microlens components and standard optical fibers are threaded through the openings in each microlens component as they are stacked. The fibers provide sufficient stiffness and stability to the structure to precisely align the apertures of the microlens components and thereby allow for increased assembly efficiency over traditional microlens and microcolumn bonding techniques.
摘要翻译：用于对准和组装微透镜和微柱的方法和相关联的装置，其中使用诸如刚性纤维的对准结构来精确对准多个微透镜组件。在微透镜部件中形成对准开口，并且当它们堆叠时，标准光纤穿过每个微透镜部件中的开口。纤维为结构提供足够的刚度和稳定性，以精确地对准微透镜部件的孔，从而相对于传统的微透镜和微柱接合技术允许提高组装效率。

6. 发明授权

US08324573B2 Detector for electron column and method for detecting electrons for electron column 有权
标题翻译：用于电子柱的检测器和用于检测电子柱的电子的方法
公开(公告)号：US08324573B2
公开(公告)日：2012-12-04
申请号：US12064071
申请日：2006-08-18
申请人： Ho Seob Kim
发明人： Ho Seob Kim
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/244 , H01J2237/2444
摘要： In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi-conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons—resulting from the collision of the electron beam generated by a microcolumn—are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.
摘要翻译：在传统的微通道板（MCP），二次电子（SE）检测器或半导体检测器中，电子数通过其自身的结构被放大。对于这种放大，由于其自身的结构和材料，外部施加小的电压差或产生。经过上述步骤的电子的电流被外部放大电路放大。在本发明中，由微柱产生的电子束的碰撞产生的电子通过周围的导电布线来检测。使用外部的放大电路来检测检测到的电子，与常规的检测方法类似。

7. 发明授权

US08173978B2 Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same 有权
标题翻译：用多微柱和多微柱控制电子束的方法
公开(公告)号：US08173978B2
公开(公告)日：2012-05-08
申请号：US11571695
申请日：2005-07-05
申请人： Ho Seob Kim , Byeng Jin Kim
发明人： Ho Seob Kim , Byeng Jin Kim
IPC分类号： H01J37/08
CPC分类号： H01J37/263 , B82Y10/00 , B82Y40/00 , H01J3/14 , H01J37/04 , H01J37/3007 , H01J37/302 , H01J37/3174 , H01J2237/1205 , H01J2237/248 , H01J2237/28 , H01J2237/31752
摘要： Provided is a method for controlling electron beams in a multi-microcolumn, in which unit microcolumns having an electron emitter, a lens, and a deflector are arranged in an n×m matrix. A voltage is uniformly or differentially applied to each electron emitter or extractor. The same control voltage or different voltages are applied to a region at coordinates in a control division area of each extractor to deflect the electron beams. Lens layers not corresponding to the extractors are collectively or individually controlled so as to efficiently control the electron beams of the unit microcolumn. Further, a multi-microcolumn using the method is provided.
摘要翻译：提供了一种用于控制多微柱中的电子束的方法，其中具有电子发射器，透镜和偏转器的单元微柱以n×m矩阵排列。电压均匀或差分施加到每个电子发射器或提取器。将相同的控制电压或不同的电压施加到每个提取器的控制分割区域中的坐标处的区域以偏转电子束。不对应于提取器的透镜层被集体地或单独地控制，以便有效地控制单元微柱的电子束。此外，提供了使用该方法的多微柱。

8. 发明授权

US07968844B2 Hole inspection apparatus and hole inspection method using the same 有权
标题翻译：孔检查装置及孔检查方法采用该方法
公开(公告)号：US07968844B2
公开(公告)日：2011-06-28
申请号：US12295770
申请日：2007-04-03
申请人： Ho Seob Kim
发明人： Ho Seob Kim
IPC分类号： H01J49/00
CPC分类号： H01J37/28 , G01R31/307 , H01J37/244 , H01J2237/0635 , H01J2237/22 , H01J2237/244 , H01J2237/24564 , H01J2237/24592 , H01J2237/281 , H01J2237/2817 , H01J2237/317 , H01L22/12 , H01L22/14
摘要： Disclosed herein is an apparatus and method for inspecting the via holes of a semiconductor device using electron beams. The apparatus includes electron beam irradiation means, a current measuring means, and a current measuring means and data processing means. The electron beam irradiation means radiate respective electron beams to inspect a plurality of inspection target holes. The current measuring means measures current, which is generated by irradiating the electron beams, radiated from the electron beam irradiation means, through a conductive layer located under the holes, or through the conductive layer and a separate detector. The data processing means processes data acquired through the measurement of the current measuring means.
摘要翻译：本发明公开了一种使用电子束检查半导体器件的通孔的装置和方法。该装置包括电子束照射装置，电流测量装置以及电流测量装置和数据处理装置。电子束照射装置照射各个电子束来检查多个检查目标孔。电流测量装置测量通过从电子束照射装置辐射的电子束通过位于孔下面的导电层或通过导电层和单独的检测器照射而产生的电流。数据处理装置处理通过测量当前测量装置获得的数据。

9. 发明申请

US20100163745A1 Housing for A Micro-Column 审中-公开
标题翻译：微柱房
公开(公告)号：US20100163745A1
公开(公告)日：2010-07-01
申请号：US11817069
申请日：2006-02-23
申请人： Ho Seob Kim , Byeng Jin Kim
发明人： Ho Seob Kim , Byeng Jin Kim
IPC分类号： H01J3/26 , G21K1/00
CPC分类号： H01J37/28 , H01J37/023 , H01J37/067
摘要： Disclosed therein is a housing for micro-column, which can easily align and assemble the micro-column and improve stability of the micro-column. The housing for manufacturing micro-column including an electron emitter, deflectors, and lenses, the housing includes: an electron emitter holder in which the electron emitter is inserted; a holder base in which the electron emitter holder is inserted; and a column base coupled with the holder base, whereby the electron emitter can be aligned and fixed between the electron emitter holder and the holder base in X- and Y-axial directions via bolts and socket set screws inserted into the tap holes.
摘要翻译：其中公开了一种用于微柱的壳体，其可以容易地对准和组装微柱并提高微柱的稳定性。用于制造包括电子发射器，偏转器和透镜的微型列的外壳包括：电子发射器支架，其中插入电子发射器; 其中插入电子发射器支架的支架基座; 以及与保持器基座连接的列底座，由此电子发射器可以通过插入到抽头孔中的螺栓和插座固定螺钉在X和Y轴方向上对准和固定在电子发射器支架和保持器基座之间。

10. 发明申请

US20100084566A1 Electron Column Using A Magnetic Lens Layer Having Permanent Magnets 审中-公开
标题翻译：使用具有永磁体的磁性透镜层的电子柱
公开(公告)号：US20100084566A1
公开(公告)日：2010-04-08
申请号：US12445257
申请日：2007-10-09
申请人： Ho Seob Kim
发明人： Ho Seob Kim
IPC分类号： H01J37/14
CPC分类号： H01J37/145 , B82Y10/00 , B82Y40/00 , H01J37/12 , H01J37/143 , H01J37/3174 , H01J2237/1205 , H01J2237/1405 , H01J2237/26 , H01J2237/3175
摘要： Disclosed herein is an electron column using a magnetic lens layer. The electron column includes a magnetic lens layer for condensing an electron beam using permanent magnets. The magnetic lens layer includes a support plate, an aperture formed through the support plate, and permanent magnets arranged around the aperture and disposed on or inserted into the support plate.
摘要翻译：本文公开了使用磁性透镜层的电子柱。电子柱包括用于使用永久磁体冷凝电子束的磁透镜层。磁性透镜层包括支撑板，通过支撑板形成的孔和围绕孔布置并设置在支撑板上或插入到支撑板中的永磁体。

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