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    • 3. 发明申请
    • POSITIONING APPARATUS PARTICULARLY FOR USE IN A VACUUM ENVIRONMENT
    • 定位装置特别用于真空环境
    • WO1988009945A1
    • 1988-12-15
    • PCT/GB1988000433
    • 1988-06-03
    • RENISHAW PLCTUCKER, Philip, MartinHAYDEN, Brian, Elliott
    • RENISHAW PLC
    • G02B07/00
    • H02N2/046B23Q1/36G01J3/06G02B7/003G03F7/70691H01L21/682
    • The invention provides a positioning apparatus for accurately positioning one part of a device relative to another and is designed to be vacuum compatible for use in vacuum chambers at ultra-high vacuum. To achieve this, no lubrication is allowable on relatively movable parts so that all sliding contact at relatively movable surfaces must be avoided. The preferred embodiment is for use in rotating a diffraction grating inside a Cerny-Turner monochromator at ultra-high vacuum. A linear piezo electric INCHWORM translator (60) is used inside the vacuum chamber to drive an output member (64) in very small incremental steps with very high accuracy. A tape (61) is used to transmit the linear motion of the output member into rotary motion of the diffraction grating support (53). This is achieved by wrapping the tape around a cylindrical support (58) of the diffraction grating and attaching both ends of the tape via a tensioning device (65) to the output member (64) giving slip-free transmission of motion. A flexural pivot (48, 49) is used for supporting the cylindrical support from fixed structure to allow the rotation of the support without sliding of backlash. A detector e.g. an opto-electronic scale reader (74) reads the position of the rotary support directly from a tape scale (73) wrapped around it to provide an indication of the movement of the grating.
    • 本发明提供了一种定位装置,用于将装置的一部分相对于另一装置精确地定位,并且被设计为在超高真空下用于真空室中的真空兼容性。 为了实现这一点,在相对可动部件上不允许润滑,从而必须避免在相对移动的表面上的所有滑动接触。 优选实施例用于以超高真空旋转Cerny-Turner单色仪内的衍射光栅。 在真空室内使用线性压电INCHWORM转换器(60),以非常高的精度以非常小的增量步进驱动输出构件(64)。 带(61)用于将输出构件的线性运动传递到衍射光栅支架(53)的旋转运动。 这通过将带缠绕在衍射光栅的圆柱形支撑件(58)上并通过张紧装置(65)将带的两端连接到输出构件(64)而实现,从而提供无滑动的运动传播。 弯曲枢轴(48,49)用于从固定结构支撑圆柱形支撑件,以允许支撑件的旋转而不滑动齿隙。 检测器 光电子秤读取器(74)直接从缠绕在其上的磁带秤(73)读取旋转支架的位置,以提供光栅运动的指示。