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    • 1. 发明公开
    • Air conditioning system for semi-conductor or display manufacturing process and inner filter unit of the air conditioning system
    • 半导体或显示器制造工艺的空调系统和空调系统的内部过滤器
    • KR20120062653A
    • 2012-06-14
    • KR20120043143
    • 2012-04-25
    • GEMVAX & KAEL CO LTD
    • LEE HOO KUNKIM SEONG RYEOLKIM KWANG SOO
    • H01L21/02
    • H01L21/02F04D27/002F24F13/02F24F2007/001
    • PURPOSE: An air conditioning system and an inner filter unit arranged for the same are provided to prevent a stain phenomenon of a substrate due to illuminance degradation by reducing concentration of an organic compound. CONSTITUTION: An outer filter unit(110) eliminates contaminants in external air by being connected to an inlet duct. A concordant flow duct connects a confluence part and an inner filter unit(120). The inner filter unit eliminates contaminants in internal air by being connected to one side of the concordant flow duct. An inner duct(107) guides the internal air to the inner filter unit by being connected to the inner filter unit. A guide duct(104) guides joined air in the confluence part to work area. A free filter is installed on an entrance of the work area for eliminating particles in the air.
    • 目的:为了防止由于降低有机化合物的浓度引起的照度降低而导致的基板的污染现象,设置有空调系统和内部过滤器单元。 构成:外部过滤器单元(110)通过连接到入口管道来消除外部空气中的污染物。 一个汇合流道连接汇合部分和内部过滤器单元(120)。 内部过滤器单元通过连接到一致的流动管道的一侧来消除内部空气中的污染物。 内部管道(107)通过连接到内部过滤器单元将内部空气引导到内部过滤器单元。 引导管道(104)将合流部分中的接合空气引导到工作区域。 在工作区的入口处安装一个免费的过滤器,用于消除空气中的颗粒。
    • 2. 发明公开
    • Refrigerator system for semiconductor process
    • 用于半导体工艺的制冷系统
    • KR20120068793A
    • 2012-06-27
    • KR20120051671
    • 2012-05-15
    • GEMVAX & KAEL CO LTD
    • LEE HOO KUNLEE SUNG KUNKIM OK GIJANG KIL NAMKIM HONG HYUN
    • H01L21/02
    • H01L21/67034F04D25/08F24F13/0209H01L21/67098
    • PURPOSE: An air conditioning system for a semiconductor process is provided to remove NOX by independently installing an additional NOX filter in the front or rear of a chemical filter. CONSTITUTION: Outer air or circulating air of a semiconductor process is inputted into an inlet duct(11). A control unit(30) comprises a refrigerator(31), a heater, and a humidifier and controls the temperature and humidity of the circulating air. A filter unit(20) includes a pre-filter, a chemical filter, and an NOX filter(27). The filter unit removes contaminant of ionic molecule and dust included in the outer air or circulating air. The NOX filter comprises one or more anion exchange resin layers in the front or rear of the chemical filter and absorbs NOX.
    • 目的:提供半导体工艺的空调系统,通过在化学过滤器的前面或后面独立安装附加的NOX过滤器来去除NOX。 构成:将半导体工艺的外部空气或循环空气输入入口管道(11)。 控制单元(30)包括冰箱(31),加热器和加湿器,并且控制循环空气的温度和湿度。 过滤器单元(20)包括预过滤器,化学过滤器和NO x过滤器(27)。 过滤器单元去除外部空气或循环空气中包含的离子分子和灰尘的污染物。 NOX过滤器在化学过滤器的前面或后面包含一个或多个阴离子交换树脂层,并吸收NOX。