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    • 9. 发明专利
    • Probe head control mechanism for probe card assembly
    • 探头卡组件探头控制机制
    • JP2011075342A
    • 2011-04-14
    • JP2009225635
    • 2009-09-29
    • Formfactor Incフォームファクター, インコーポレイテッド
    • MCFARLAND ANDREW WLIEW BRANDONPORTER JAMES M JRYASUMURA KEVIN Y
    • G01R31/28G01R1/06H01L21/66
    • PROBLEM TO BE SOLVED: To overcome the problem with a conventional probe card assembly, wherein usable material characteristics of components are varied, resulting in limiting the sphere and the accuracy in adjustment of movement by heat.
      SOLUTION: The probe card assembly includes a first probe head having a contact element which is disposed on the respective surface for forming electric contact with a corresponding terminal of a corresponding electronic device, a second probe head having the contact element which is disposed on the respective surface for forming the electric contact with a corresponding terminal of a corresponding electronic device, and a control mechanism which is connected to the first and second probe heads and controls movement of the first and second probe heads to a first direction parallel substantially to the respective surfaces thereof, more than to a second direction perpendicular substantially to the respective surfaces.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了克服常规探针卡组件的问题,其中组件的可用材料特性是变化的,导致球体的限制和由热量调节的精度。 解决方案:探针卡组件包括具有接触元件的第一探针头,该接触元件设置在相应的表面上,用于与对应的电子设备的相应端子形成电接触;第二探针头,其具有布置的接触元件 在相应的表面上形成与对应的电子设备的相应端子的电接触;以及控制机构,其连接到第一和第二探头,并且控制第一和第二探头的运动到基本相同的第一方向 其各自的表面大于垂直于相应表面垂直的第二方向。 版权所有(C)2011,JPO&INPIT