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1. 发明申请

WO2010047768A1 VERY HIGH POWER LASER CHAMBER OPTICAL IMPROVEMENTS 审中-公开
标题翻译：非常大的功率激光室光学改进
公开(公告)号：WO2010047768A1
公开(公告)日：2010-04-29
申请号：PCT/US2009/005691
申请日：2009-10-20
申请人： CYMER, INC. , YE, Hong , ROKITSKI, Rostislava , BERGSTEDT, Robert, A. , ERSHOV, Alexander, I. , LIU, Lauren , VIATELLA, John, W. , RAO, Rajasekhar, H. , CYBULSKI, Raymond, F. , DUFFEY, Thomas, P. , BROWN, Daniel, J. W. , FERRELL, James, J.
发明人： YE, Hong , ROKITSKI, Rostislava , BERGSTEDT, Robert, A. , ERSHOV, Alexander, I. , LIU, Lauren , VIATELLA, John, W. , RAO, Rajasekhar, H. , CYBULSKI, Raymond, F. , DUFFEY, Thomas, P. , BROWN, Daniel, J. W. , FERRELL, James, J.
IPC分类号： H01S3/08
CPC分类号： G02B5/04 , G02B5/12 , H01S3/0057 , H01S3/0346 , H01S3/081 , H01S3/225
摘要： An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.
摘要翻译：所公开的主题的一个方面包括减少由以下至少之一组成的光束反向棱镜的激光吸收的方法：增加第一入射点和倒角之间的第一距离，其中第一入射点在在棱镜的第一反射面和第二反射面之间形成棱镜的第一反射面和倒角，其中倒角具有倒角面; 增加第二入射点和倒角之间的第二距离，其中第二入射点在棱镜的第二反射表面上; 并且增加棱镜倒角的倒角表面的反射率。还公开了一种确定光学部件的主切割的方法。还公开了包括至少一个初级切割光学部件的激光器。

2. 发明申请

WO2007005512A3 GAS DISCHARGE LASER LINE NARROWING MODULE 审中-公开
标题翻译：气体放电激光线路延迟模块
公开(公告)号：WO2007005512A3
公开(公告)日：2007-11-22
申请号：PCT/US2006025350
申请日：2006-06-28
申请人： CYMER INC , CYBULSKI RAYMOND F , BERGSTEDT ROBERT A , PARTLO WILLIAM N , SANDSTROM RICHARD L , WANG GON
发明人： CYBULSKI RAYMOND F , BERGSTEDT ROBERT A , PARTLO WILLIAM N , SANDSTROM RICHARD L , WANG GON
IPC分类号： H01S3/22 , H01S3/03
CPC分类号： H01S3/03 , H01S3/034 , H01S3/036 , H01S3/1055 , H01S3/225
摘要： A line narrowed gas discharge laser system and method of operating same is disclosed which may comprise a dispersive center wavelength selective element; a beam expander comprising a plurality of refractive elements; a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element; each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element; a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system. The dispersive element may comprise a grating and the beam expander may comprise a plurality of prisms. The housing may contain the dispersive center wavelength selective element and the beam expander. The housing positioning element may comprise a position locking mechanism.
摘要翻译：公开了一种窄气体放电激光系统及其操作方法，其可以包括分散中心波长选择元件; 包括多个折射元件的光束扩展器; 折射元件定位机构，其定位折射元件中的至少一个，以改变激光束在分散中心波长选择元件上的入射角; 分散中心波长选择元件和扩束器中的每一个彼此对准并且至少包含分散中心波长选择元件的壳体; 壳体定位机构相对于气体放电激光系统的光轴定位壳体。色散元件可以包括光栅，并且光束扩展器可以包括多个棱镜。壳体可以包含分散中心波长选择元件和扩束器。壳体定位元件可以包括位置锁定机构。

3. 发明申请

WO2007005512A2 GAS DISCHARGE LASER LINE NARROWING MODULE 审中-公开
标题翻译：气体放电激光线窄行模块
公开(公告)号：WO2007005512A2
公开(公告)日：2007-01-11
申请号：PCT/US2006/025350
申请日：2006-06-28
申请人： CYMER, INC. , CYBULSKI, Raymond, F. , BERGSTEDT, Robert, A. , PARTLO, William, N. , SANDSTROM, Richard, L. , WANG, Gon
发明人： CYBULSKI, Raymond, F. , BERGSTEDT, Robert, A. , PARTLO, William, N. , SANDSTROM, Richard, L. , WANG, Gon
IPC分类号： H01S3/22 , H01S3/03
CPC分类号： H01S3/03 , H01S3/034 , H01S3/036 , H01S3/1055 , H01S3/225
摘要： A line narrowed gas discharge laser system and method of operating same is disclosed which may comprise a dispersive center wavelength selective element; a beam expander comprising a plurality of refractive elements; a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element; each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element; a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system. The dispersive element may comprise a grating and the beam expander may comprise a plurality of prisms. The housing may contain the dispersive center wavelength selective element and the beam expander. The housing positioning element may comprise a position locking mechanism.
摘要翻译：公开了一种线变窄的气体放电激光系统及其操作方法，其可以包括色散中心波长选择元件; 包括多个折射元件的扩束器; 折射元件定位机构，所述折射元件定位机构定位所述折射元件中的至少一个，以改变所述色散中心波长选择元件上的激光束的入射角; 色散中心波长选择元件和扩束器中的每一个彼此对齐并且与至少包含色散中心波长选择元件的外壳对齐; 壳体定位机构，其相对于气体放电激光系统的光轴定位壳体。色散元件可以包括光栅，并且扩束器可以包括多个棱镜。外壳可以包含色散中心波长选择元件和扩束器。外壳定位元件可以包括位置锁定机构。

4. 发明申请

WO2003003531A1 LINE NARROWING UNIT WITH FLEXURAL GRATING MOUNT 审中-公开
标题翻译：带有柔性砂光装置的线性单元
公开(公告)号：WO2003003531A1
公开(公告)日：2003-01-09
申请号：PCT/US2002/017999
申请日：2002-06-05
申请人： CYMER, INC. , TITUS, Clay, C. , HULBURD, William, G. , CYBULSKI, Raymond, F. , ALGOTS, John, M. , LYSIK, Michael, S.
发明人： TITUS, Clay, C. , HULBURD, William, G. , CYBULSKI, Raymond, F. , ALGOTS, John, M. , LYSIK, Michael, S.
IPC分类号： H01S3/08
CPC分类号： H01S3/036 , G03F7/70025 , G03F7/70575 , H01S3/02 , H01S3/03 , H01S3/034 , H01S3/0401 , H01S3/08009 , H01S3/08059 , H01S3/0812 , H01S3/086 , H01S3/13 , H01S3/134 , H01S3/1392 , H01S3/225 , H01S3/2256
摘要： A grating based line narrowing device for line narrowing lasers producing high energy laser beams. A flexure grating mount is provided which virtually eliminates stress on the grating caused by differential thermal expansion between the grating and the housing structure. The grating which is comprised of a very thin aluminum surface on a thick ultra low expansion glass substrate is attached to an aluminum housing structure using a flexure grating mount. At least one flexure joint is provided in the grating mount which permits thermal expansion and contraction of the substrate. In some embodiments the mount comprises a metal plate and the flexure joint is a H-Flex joint (124) with four legs (126) which is machined into the metal plate. In another embodiment two H-Flex joints are provided. In other embodiments, the flexure joint is a dovetail joint permitting one end of the mount to slip relative to the other.
摘要翻译：用于生产高能量激光束的线窄激光器的基于光栅的线窄化装置。提供了弯曲光栅安装件，其实际上消除了由光栅和壳体结构之间的不同热膨胀引起的对光栅的应力。在厚的超低膨胀玻璃基板上由非常薄的铝表面构成的光栅使用弯曲光栅安装件附接到铝外壳结构。在光栅安装件中设置至少一个挠性接头，其允许基板的热膨胀和收缩。在一些实施例中，安装件包括金属板，并且挠性接头是H-Flex接头（124），其具有被加工到金属板中的四个腿部（126）。在另一个实施例中，提供了两个H-Flex接头。在其它实施例中，挠曲接头是燕尾接头，允许安装座的一端相对于另一端滑动。

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