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    • 2. 发明公开
    • WAFER PROCESSING MACHINE.
    • VORRICHTUNGZUR BEHANDLUNG VON SCHEIBEN。
    • EP0168437A4
    • 1988-06-20
    • EP85900556
    • 1984-12-20
    • DIMOCK JACK ACLARKE PETER J
    • DIMOCK JACK A
    • H01L21/67B65G49/06C23C14/34C23C14/56H01L21/00H01L21/203H01L21/285H01L21/31B65G1/06B65G5/00B65G25/04B65G47/08
    • H01L21/6715C23C14/566
    • A sputter coating machine (11) includes a rectilinearly translatable load-lock door (16) closing off one end of an evacuable chamber (12). Wafers (21) to be coated are loaded and unloaded by an elevator blade (24) onto a chuck (57) carried from the inside surface of the door (16). A clamping ring (85) clamps the wafer (21) to the chuck (57) and advances the wafer (21) through the open throat of a gate-valve portion (15) of the chamber (12) into position opposite a magnetron sputter gun (105) carried from a second door (13) closing off the other end of the chamber (12). The second door (13) is movable away from the chamber (12) on guide rails (141) and pivotable about an axis (138) for ease of maintenance.
    • 溅射涂布机(11)包括封闭可抽真空室(12)的一端的可直线平移的装载锁门(16)。 待涂覆的晶片(21)由升降机叶片(24)装载和卸载到从门(16)的内表面携带的卡盘(57)上。 夹持环(85)将晶片(21)夹持到卡盘(57)并且通过腔室(12)的闸阀部分(15)的开口喉部将晶片(21)推进到与磁控管溅射器 从第二门(13)携带的枪(105)封闭腔室(12)的另一端。 第二门(13)可在导轨(141)上远离腔室(12)移动并且可围绕轴线(138)枢转以便于维护。
    • 5. 发明公开
    • Ball check valve
    • Kugelrückschlagventil
    • EP0708283A2
    • 1996-04-24
    • EP95307443.2
    • 1995-10-19
    • Clarke, PeterClarke, ReneClarke, BrendonClarke, CarlClarke, CherylClarke, Edit
    • The designation of the inventor has not yet been filed
    • F16K15/04
    • F16K27/0245F16K15/04
    • A ball valve comprising:
         a first body portion (16¹) having an inlet (32¹), an outlet (34¹) and an aperture (26¹);
         a second body portion (50¹) closing off the aperture (26¹) of the first body portion (16¹), the first and second body portions (16¹,50¹) together defining a chamber;
         a valve seat (46¹) in the first body portion (16¹) dividing the chamber into inlet and outlet regions (62¹,64¹);
         a ball guide (56¹) forming part of the second body portion disposed in the outlet region (64¹);
         a ball (70¹) movable between a first position in which it sits on the valve seat (46¹) and blocks fluid flow between the outlet and inlet, and a second position in which the ball abuts against the ball guide (56¹) and fluid can flow between the inlet and outlet, the second body portion being detachable from the first body portion, the aperture (26¹) being sized such that, on removal of the second body portion, access is provided to the valve seat.
    • 一种球阀,包括:具有入口(32 1),出口(34)和孔径(26 1)的第一主体部分(16 1); 封闭第一主体部分(16 1)的孔(26 1)的第二主体部分(50 1),第一和第二主体部分(16 1,50 1)在一起 定义一个房间; 在第一主体部分(16 1)中的阀座(46 1)将腔室分成入口和出口区域(62 1,64 1); 形成设置在出口区域(64 1)中的第二主体部分的滚珠导向件(56 1); 在第一位置和第二位置之间可移动的球(70),所述第一位置位于所述阀座(46)上并阻止所述出口和入口之间的流体流动;以及第二位置,所述球与所述球引导件 (56 1),并且流体可以在入口和出口之间流动,第二主体部分可从第一主体部分拆卸,孔(26)的尺寸使得在移除第二主体部分时,进入 被提供到阀座。
    • 9. 发明公开
    • Diaphragm pump
    • 隔膜泵
    • EP0713009A2
    • 1996-05-22
    • EP95308267.4
    • 1995-11-17
    • Clarke, PeterClarke, EditClarke, ReneClarke, BrendonClarke, CarlClarke, Cheryl
    • Clarke, Peter
    • F04B43/02
    • F04B43/02
    • A diaphragm pump (10) comprising:
      a chamber (12) opening at opposite end portions to provide an inlet (14 and an outlet (16), and including an aperture (30) defined in a surface of the chamber between the inlet and outlet;
      a flexible diaphragm (40) having an inner region (42) and an outer region (44), the outer region (44) sealing against the surface of the chamber surrounding the aperture to close off the aperture, the chamber and the diaphragm (40) thereby defining a passageway (50) providing fluid communication between the inlet and outlet;
      a one-way inlet valve (25) coupled to the inlet (14) and a one-way outlet valve (27) coupled to the outlet (16);
      the inner region (42) of the diaphragm (40) being reciprocatable within the chamber (12), whereby on reciprocation of the inner region fluid is drawn in via the inlet valve and expelled via the outlet valve,
      wherein the diaphragm (40) is angled such that the plane of the diaphragm faces the outlet (16).
    • 1。一种隔膜泵(10),包括:在相对的端部处开口以提供入口(14和出口(16)并且包括限定在所述入口和出口之间的所述腔室的表面中的孔口(30)的腔室(12) ;具有内部区域(42)和外部区域(44)的柔性隔膜(40),所述外部区域(44)密封所述腔室的包围所述孔的表面以封闭所述孔,所述腔室和所述隔膜 从而限定在入口和出口之间提供流体连通的通道(50);联接到入口(14)的单向入口阀(25)和联接到出口(16)的单向出口阀(27) );隔膜(40)的内部区域(42)可在腔室(12)内往复运动,由此在内部区域往复运动时,流体通过入口阀吸入并通过出口阀排出,其中隔膜 )成角度,使得隔膜的平面面向出口(16)。