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    • 2. 发明公开
    • WAFER PROCESSING MACHINE.
    • VORRICHTUNGZUR BEHANDLUNG VON SCHEIBEN。
    • EP0168437A4
    • 1988-06-20
    • EP85900556
    • 1984-12-20
    • DIMOCK JACK ACLARKE PETER J
    • DIMOCK JACK A
    • H01L21/67B65G49/06C23C14/34C23C14/56H01L21/00H01L21/203H01L21/285H01L21/31B65G1/06B65G5/00B65G25/04B65G47/08
    • H01L21/6715C23C14/566
    • A sputter coating machine (11) includes a rectilinearly translatable load-lock door (16) closing off one end of an evacuable chamber (12). Wafers (21) to be coated are loaded and unloaded by an elevator blade (24) onto a chuck (57) carried from the inside surface of the door (16). A clamping ring (85) clamps the wafer (21) to the chuck (57) and advances the wafer (21) through the open throat of a gate-valve portion (15) of the chamber (12) into position opposite a magnetron sputter gun (105) carried from a second door (13) closing off the other end of the chamber (12). The second door (13) is movable away from the chamber (12) on guide rails (141) and pivotable about an axis (138) for ease of maintenance.
    • 溅射涂布机(11)包括封闭可抽真空室(12)的一端的可直线平移的装载锁门(16)。 待涂覆的晶片(21)由升降机叶片(24)装载和卸载到从门(16)的内表面携带的卡盘(57)上。 夹持环(85)将晶片(21)夹持到卡盘(57)并且通过腔室(12)的闸阀部分(15)的开口喉部将晶片(21)推进到与磁控管溅射器 从第二门(13)携带的枪(105)封闭腔室(12)的另一端。 第二门(13)可在导轨(141)上远离腔室(12)移动并且可围绕轴线(138)枢转以便于维护。
    • 6. 发明公开
    • Diaphragm pump
    • 隔膜泵
    • EP0713009A2
    • 1996-05-22
    • EP95308267.4
    • 1995-11-17
    • Clarke, PeterClarke, EditClarke, ReneClarke, BrendonClarke, CarlClarke, Cheryl
    • Clarke, Peter
    • F04B43/02
    • F04B43/02
    • A diaphragm pump (10) comprising:
      a chamber (12) opening at opposite end portions to provide an inlet (14 and an outlet (16), and including an aperture (30) defined in a surface of the chamber between the inlet and outlet;
      a flexible diaphragm (40) having an inner region (42) and an outer region (44), the outer region (44) sealing against the surface of the chamber surrounding the aperture to close off the aperture, the chamber and the diaphragm (40) thereby defining a passageway (50) providing fluid communication between the inlet and outlet;
      a one-way inlet valve (25) coupled to the inlet (14) and a one-way outlet valve (27) coupled to the outlet (16);
      the inner region (42) of the diaphragm (40) being reciprocatable within the chamber (12), whereby on reciprocation of the inner region fluid is drawn in via the inlet valve and expelled via the outlet valve,
      wherein the diaphragm (40) is angled such that the plane of the diaphragm faces the outlet (16).
    • 1。一种隔膜泵(10),包括:在相对的端部处开口以提供入口(14和出口(16)并且包括限定在所述入口和出口之间的所述腔室的表面中的孔口(30)的腔室(12) ;具有内部区域(42)和外部区域(44)的柔性隔膜(40),所述外部区域(44)密封所述腔室的包围所述孔的表面以封闭所述孔,所述腔室和所述隔膜 从而限定在入口和出口之间提供流体连通的通道(50);联接到入口(14)的单向入口阀(25)和联接到出口(16)的单向出口阀(27) );隔膜(40)的内部区域(42)可在腔室(12)内往复运动,由此在内部区域往复运动时,流体通过入口阀吸入并通过出口阀排出,其中隔膜 )成角度,使得隔膜的平面面向出口(16)。
    • 9. 发明公开
    • INJECTION MOULDING METHOD
    • 成型工艺
    • EP2483050A1
    • 2012-08-08
    • EP10759905.2
    • 2010-09-30
    • Clarke, Peter Reginald
    • Clarke, Peter Reginald
    • B29C45/57B29C45/56
    • B29C45/572B29C45/56B29C2045/563B29C2045/567B29K2105/253
    • A method of injection moulding an article, the method comprising the steps of: (a) providing an injection mould comprising first and second mould parts, and having at least one movable portion of one of the first and second mould parts; (b) disposing the first and second mould parts in a fully closed configuration so as to define mould cavity therebetween for moulding an article, in the fully closed configuration the first and second mould parts defining a cavity outer surface which defines the outer shape of the article to be moulded in the mould cavity; (c) injecting molten material into the cavity at an injection inlet of the cavity; (d) during the injecting step, moving at least one movable portion of one of the first and second mould parts from a forward position, defining the article to be moulded, to a rearward position thereby to increase the volume of the mould cavity in the fully closed configuration and to reduce the flow length/thickness ratio of the cavity; (e) filling the mould cavity with the molten material; and (f) after filling the mould cavity, returning the at least one movable portion from the rearward position to the forward position thereby expelling excess molten material back through the injection inlet.