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    • 7. 发明申请
    • PLASMA CONFINEMENT RING ASSEMBLY FOR PLASMA PROCESSING CHAMBERS
    • 用于等离子体处理室的等离子体约束环组件
    • WO2012039744A2
    • 2012-03-29
    • PCT/US2011/001501
    • 2011-08-25
    • LAM RESEARCH CORPORATIONDE LA LLERA, AnthonyCARMAN, DavidTAYLOR, Travis, R.ULLAL, Saurabh, J.SINGH, Harmeet
    • DE LA LLERA, AnthonyCARMAN, DavidTAYLOR, Travis, R.ULLAL, Saurabh, J.SINGH, Harmeet
    • H01L21/3065
    • H01L21/67069
    • A plasma confinement ring assembly with a single movable lower ring can be used for controlling wafer area pressure in a capacitively coupled plasma reaction chamber wherein a wafer is supported on a lower electrode assembly and process gas is introduced into the chamber by an upper showerhead electrode assembly. The assembly includes an upper ring, the lower ring, hangers, hanger caps, spacer sleeves and washers. The lower ring is supported by the hangers and is movable towards the upper ring when the washers come into contact with the lower electrode assembly during adjustment of the gap between the upper and lower electrodes. The hanger caps engage upper ends of the hangers and fit in upper portions of hanger bores in the upper ring. The spacer sleeves surround lower sections of the hangers and fit within lower portions of the hanger bores. The washers fit between enlarged heads of the hangers and a lower surface of the lower ring. The spacer sleeves are dimensioned to avoid rubbing against the inner surfaces of the hanger bores during lifting of the lower ring.
    • 可以使用具有单个可移动下环的等离子体约束环组件来控制电容耦合等离子体反应室中的晶片面积压力,其中晶片支撑在下电极组件上并且将处理气体引入 该室由上部喷头电极组件组成。 该组件包括上部环,下部环,衣架,衣架帽,隔套和垫圈。 当调节上下电极之间的间隙时,垫圈与下电极组件接触时,下环由吊架支撑并可朝上环移动。 衣架帽与衣架的上端接合并且装配在上环中的衣架孔的上部中。 隔离套筒围绕吊架的下部并装配在吊架孔的下部内。 垫圈放在衣架的扩大头部和下部环的下表面之间。 隔离套的尺寸设计为避免在提升下环期间与悬挂孔的内表面摩擦。
    • 9. 发明申请
    • SYMMETRIC RF RETURN PATH LINER
    • SYMMETRIC RF返回路线
    • WO2013078420A2
    • 2013-05-30
    • PCT/US2012/066404
    • 2012-11-21
    • LAM RESEARCH CORPORATIONCARMAN, DavidTAYLOR, TravisRAMDUTT, Devin
    • CARMAN, DavidTAYLOR, TravisRAMDUTT, Devin
    • H01L21/02
    • H01L21/02H01J37/32091H01J37/32477H01L21/6831
    • An apparatus and system for plasma processing a substrate using RF power includes a chamber (100) having walls for housing an electrostatic chuck (ESC) (227) and a top electrode (210). The top electrode is oriented opposite the ESC to define a processing region. An inner liner (200) with a tubular shaped wall (200a) is defined within and is spaced apart from the walls of the chamber and is oriented to surround the processing region. The tubular shaped wall extends a height between a top and a bottom. The tubular shaped wall has functional openings for substrate access and facilities access and dummy openings oriented to define symmetry for selected ones of the functional openings. A plurality of straps (216) are connected to the bottom of the tubular shaped wall of the inner liner and are electrically coupled to a ground ring (232) within the chamber to provide an RF power return path during plasma processing.
    • 用于使用RF功率等离子体处理衬底的装置和系统包括具有用于容纳静电吸盘(ESC)(227)和顶部电极(210)的壁的腔室(100)。 顶部电极与ESC相对定向以限定处理区域。 具有管状壁(200a)的内衬(200)被限定在室的壁内并与室的壁间隔开并被定向成包围处理区域。 管状壁在顶部和底部之间延伸高度。 管形壁具有用于基板接近和设施接近的功能开口和被定向成为所选择的功能开口限定对称性的虚拟开口。 多个带(216)连接到内衬管的管状壁的底部,并且电耦合到室内的接地环(232),以在等离子体处理期间提供RF功率返回路径。
    • 10. 发明申请
    • GAMING NETWORK AND PERIPHERALS AND DEVICE IDENTIFICATION
    • 游戏网络和外设及设备识别
    • WO2007030288A3
    • 2007-09-13
    • PCT/US2006032073
    • 2006-08-15
    • BALLY GAMING INT INCROBB HAROLD KMORROW JAMES WCARMAN DAVID WOSGOOD PAUL RANDALLDIMICHELE CARMEN
    • ROBB HAROLD KMORROW JAMES WCARMAN DAVID WOSGOOD PAUL RANDALLDIMICHELE CARMEN
    • H04L9/00
    • G07F17/3241G07F17/32G07F17/3223
    • The gaming network described herein includes network security features, host security features, audit protocols, and design architecture approaches to reduce the possibility of network attacks. The gaming network provides for traffic confidentiality, encryption, message authentication, secure authentication mechanisms, anti-replay protection of traffic, key management mechanisms, robust network availability, misrouting and redirection protection and prevention, rejection of external traffic, and a high entry-barrier to device addition to the network. The system provides the capability of identifying the presence and location of network devices. During start-up, a device sends its MAC address out on the network A local switch collects MAC and IP addresses for the devices connected to it. Periodically, the switch transmits raw Ethernet frames, USB packets, or TCP packets containing tables of devices and associated MACIIP addresses.
    • 本文描述的游戏网络包括网络安全特征,主机安全特征,审计协议和用于减少网络攻击可能性的设计架构方法。 游戏网络提供流量机密性,加密,消息认证,安全认证机制,流量的反重放保护,密钥管理机制,强大的网络可用性,错误路由和重定向保护和预防,拒绝外部流量,以及高入口 到设备添加到网络。 该系统提供识别网络设备的存在和位置的能力。 在启动过程中,设备在网络上发送其MAC地址本地交换机收集与其相连的设备的MAC地址和IP地址。 定期地,交换机发送包含设备表和相关联的MACIIP地址的原始以太网帧,USB分组或TCP分组。