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1. 发明专利

JP2006299417A Machine for coating substrate, and module 有权
标题翻译：涂料基板和模块机
公开(公告)号：JP2006299417A
公开(公告)日：2006-11-02
申请号：JP2006105241
申请日：2006-04-06
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムスゲゼルシャフトミットベシュレンクテルハフツングウントコンパニーコマンディートゲゼルシャフトApplied Films GmbH & Co. KG
发明人： BUCHBERGER HANS , GEISS ANDREAS , KREMPEL-HESSE JOERG , HAAS DIETER
IPC分类号： C23C14/34 , C23C14/00
CPC分类号： C23C14/56 , H01J37/32431 , H01J37/32458
摘要： PROBLEM TO BE SOLVED: To provide a machine for coating a substrate in which maintenance is easy and downtime can be reduced.
SOLUTION: A coating chamber is formed in a modular design and each of the modules 1 features a chamber section 2, a first support 3 that is arranged removably in or at the chamber section 2, and a second support 4 that is arranged removably at the first support 3. The first support 3 bears the cathodes, the second support 4 is formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. The supports 3 and 4 can be removed laterally from the chamber section 2 to such an extent that areas 11a, 11b accessible to persons can be formed between the module components.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于涂布维护容易和可以减少停机时间的基板的机器。解决方案：涂覆室以模块化设计形成，并且每个模块1具有室部分2，可移除地布置在室部分2中或室部分2上的第一支撑件3和布置成第一支撑件3具有阴极，第二支撑件4形成为盖子，在该盖子上布置有用于在涂覆室中产生真空的泵。支撑件3和4可以从腔室部分2横向地移除到可以在模块部件之间形成人员可接近的区域11a，11b的程度。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2006144111A Cooled backing plate for sputtering target, and sputtering target comprising a plurality of backing plates 审中-公开
标题翻译：用于喷射目标的冷却背板和包含多个背板的飞溅目标
公开(公告)号：JP2006144111A
公开(公告)日：2006-06-08
申请号：JP2004371863
申请日：2004-12-22
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムスゲゼルシャフトミットベシュレンクテルハフツングウントコンパニーコマンディートゲゼルシャフトApplied Films GmbH & Co. KG
发明人： KREMPEL-HESSE JOERG , SCHUSSLER UWE , JISCHKE ANDREAS , HANS WOLF
IPC分类号： C23C14/34
CPC分类号： C23C14/3407
摘要： PROBLEM TO BE SOLVED: To provide a cooled backing plate which is as thin as possible but which also has sufficient rigidity.
SOLUTION: In the backing plates 2, 3, 4, at least one groove 5 open to the back side of the backing plates runs between a coolant inlet and a coolant outlet, and the groove 5 is enclosed by an outer frame 6 of the backing plates 2, 3, 4, and within the frame 6 at least one web 7, which runs at a distance from the frame 6, separates two grooved sections from one another, and the open side of the groove 5 is closed off by a closed sheet bar 9. The closed sheet bar 9 is welded to the frame 6 and the web 7.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供尽可能薄但具有足够刚性的冷却背板。解决方案：在背板2,3,4中，通向背板的背侧的至少一个凹槽5在冷却剂入口和冷却剂出口之间延伸，并且凹槽5被外框架6包围的背板2,3,4，并且在框架6内，至少一个从框架6一定距离延伸的腹板7将两个凹槽部分彼此分开，并且凹槽5的开口侧被封闭封闭的片材棒9被焊接到框架6和网7上。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2006131989A Cathode apparatus for spattering onto rotatable target pipe 有权
标题翻译：用于在可旋转的目标管上进行散热的阴极装置
公开(公告)号：JP2006131989A
公开(公告)日：2006-05-25
申请号：JP2005164772
申请日：2005-06-03
申请人： Applied Films Corp , Applied Films Gmbh & Co Kg , アプライドフィルムスゲゼルシャフトミットベシュレンクテルハフツングウントコンパニーコマンディートゲゼルシャフトApplied Films GmbH & Co. KG , アプライドフィルムスコーポレイション
发明人： NEWCOMB RICHARD , TRUBE SCOTT , RISO TOM , KAWAKAMI KEN , MARQUARDT DIETMAR , SAUER ANDREAS
IPC分类号： C23C14/35
CPC分类号： F03H1/00 , H01J37/3405
摘要： PROBLEM TO BE SOLVED: To provide the apparatus which can simultaneously achieve concentricity of supporting spindle and target pipe enabling high accuracy and high loading, highly reliable seal to water and vacuum, and the junction and separation portions of the supporting spindle and target pipe in which operation can be easily, frequently and repeatedly carried out and of which abrasion is little without needing widely free space and a long time for essential operation.
SOLUTION: At least between the supporting spindle 6 and target pipe 12 which can be driven, coaxial spacer parts 15, 67 for above components and two separable portions 32/53;60/61 are arranged, and the junction portion, wherein relative revolution on the one side, between the supporting spindle 6 and the spacer parts 15, 67 and on the other side, between the spacer parts 15, 67 and the target 12 is impossible and also of which mechanism is rigid in profile, can be disassembled and reassembled by arranging such separable portions 32/53;60/61.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够同时实现支撑主轴和目标管的同心度的设备，其能够实现高精度和高负载，对水和真空的高度可靠的密封，以及支撑主轴和目标的接合和分离部分可以容易地，频繁地重复地进行操作并且磨损少的管道，而不需要广泛的自由空间和长时间的基本操作。解决方案：至少在支撑主轴6和可被驱动的目标管12之间，布置有用于上述部件的同轴间隔件15,67和两个可分离部分32/53; 60/61，并且接合部分，其中在支撑主轴6和间隔部分15,67之间以及另一侧之间在间隔部分15,67和目标12之间的相对转动是不可能的，并且其机构的轮廓是刚性的，可以是通过布置这种可分离部分32/53; 60/61来拆卸和重新组装。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2006041478A Ir heating elements and substrate heater type vacuum chamber especially for vacuum coating facilities 审中-公开
标题翻译：红外加热元件和底板加热器类型真空室特别适用于真空涂料设备
公开(公告)号：JP2006041478A
公开(公告)日：2006-02-09
申请号：JP2005131831
申请日：2005-04-28
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムズゲーエムベーハーウントツェーオー.カーゲー
发明人： HAAS DIETER
IPC分类号： H01L21/26 , H05B3/10 , H05B3/44
CPC分类号： H05B3/44 , H05B3/0038
摘要： PROBLEM TO BE SOLVED: To provide an IR heating element (2) which effectively transfers heat and a substrate heater type vacuum chamber for vacuum coating facilities which effectively heats the board.
SOLUTION: The IR heating element (2) comprises a heat source (4) surrounded with a protective means designed as a tubular metal shell (5) at least partly coated with an IR radiation layer (6). The vacuum chamber comprises a substrate (1) and at least one heating element designed as the IR heating element (2), and the substrate (1) is thermally isolated from the IR heating element (2) so that only the heat radiation brings out heating.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种有效地传递热量的IR加热元件（2）和用于真空涂覆设备的基板加热器型真空室，其有效地加热板。 IR加热元件（2）包括被设计成至少部分地涂覆有IR辐射层（6）的管状金属壳（5）的保护装置包围的热源（4）。真空室包括基板（1）和设计为IR加热元件（2）的至少一个加热元件，并且基板（1）与IR加热元件（2）热隔离，使得只有热辐射带出加热。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2006027898A Device for replacing winding drum 审中-公开
标题翻译：用于更换卷筒的装置
公开(公告)号：JP2006027898A
公开(公告)日：2006-02-02
申请号：JP2004327288
申请日：2004-11-11
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムズゲーエムベーハーアンドコンパニーカーゲー
发明人： SKUK PETER , WENK KARL-HEINRICH , KLAUS RICHARD
IPC分类号： B65H19/30
CPC分类号： B65H19/126 , Y10T156/17
摘要： PROBLEM TO BE SOLVED: To provide a device for replacing a web winding drum within a winding chamber or a delivery chamber of a coating device for a material of a web form. SOLUTION: These devices are installed on both sides of a coating chamber. The one device works as a winding drum, and the other device works as a delivery drum. The device is provided with two tracks for storing end bearings of the winding drum. The tracks are provided with two parts, each one of which is fixed and the other can be pivotally rotated. The device is located within a housing with a door. When the winding drum has to be replaced, the door is opened, and the pivotable parts of the tracks are folded outward such that they project from the housing. At a point of this time, the winding drum can be placed on the projecting track parts. As a result, the winding drum is slid inward to be fixed. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于更换用于网状材料的涂布装置的卷绕室或输送室内的卷取卷筒的装置。
解决方案：这些设备安装在涂料室的两侧。一个装置用作卷绕鼓，另一个装置用作输送鼓。该装置设有两个轨道，用于存放卷筒的端轴承。轨道设置有两个部分，每个部分是固定的，另一个可以枢转地旋转。该设备位于具有门的壳体内。当需要更换卷筒时，门打开，轨道的可枢转部分向外折叠，使得它们从壳体伸出。在此时刻，卷筒可以放置在突出轨道部分上。结果，卷绕滚筒向内滑动以固定。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2005281851A Device for reaction sputtering 审中-公开
标题翻译：反应溅射装置
公开(公告)号：JP2005281851A
公开(公告)日：2005-10-13
申请号：JP2004253970
申请日：2004-09-01
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムズゲーエムベーハーアンドコンパニーカーゲー
发明人： FRITZ THOMAS , KEMMERER GUENTER
IPC分类号： C23C14/34 , C23C14/00 , C23C14/54 , C23C14/56
CPC分类号： C23C14/0042
摘要： PROBLEM TO BE SOLVED: To provide a device for reaction sputtering where discharge voltage for plasma is fed to a cathode, and a working gas and a reaction gas are introduced into a sputter chamber. SOLUTION: The flow rate of the whole gas in the sputter chamber is controlled with a valve, and on the other hand, the ratio of the partial pressure in both the gases is certainly held. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种反应溅射装置，其中等离子体的放电电压被供给到阴极，并且工作气体和反应气体被引入溅射室。解决方案：溅射室中的整个气体的流量由阀控制，另一方面，两种气体中的分压比肯定地保持不变。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005263485A Device for coating hollow body, especially plastic bottle, by means of high vacuum range and lock 审中-公开
标题翻译：通过高真空范围和锁定方式涂装中空身体，特别是塑料瓶的装置
公开(公告)号：JP2005263485A
公开(公告)日：2005-09-29
申请号：JP2004148230
申请日：2004-05-18
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムスゲゼルシャフトミットベシュレンクテルハフツングウントコンパニーコマンディートゲゼルシャフト
发明人： MICHAEL KLAUS , HENRICH JUERGEN , GEBELE THOMAS , GRIMM HELMUT
IPC分类号： B65G49/00 , B01J3/02 , B65G1/00 , B65G47/84 , C23C14/56
CPC分类号： C23C14/566
摘要： PROBLEM TO BE SOLVED: To provide a lock system capable of continuously actuating without maintenance, in which seals are subject to only little abrasion.
SOLUTION: The lock system comprises a first lock 23 and a second lock 25. It is also provided with an intermediate vacuum chamber 22. In the intermediate vacuum chamber 22, pressure between atmospheric pressure and pressure of a high vacuum chamber 20 is formed. The first lock 23 connects the atmospheric air to the intermediate vacuum chamber 22, and the second lock 25 connects the intermediate vacuum chamber 22 to the high vacuum chamber 20.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在没有维护的情况下连续致动的锁定系统，其中密封件仅受到很小的磨损。解决方案：锁系统包括第一锁23和第二锁25.它还设置有中间真空室22.在中间真空室22中，高真空室20的大气压力和压力之间的压力为形成。第一锁23将大气连接到中间真空室22，第二锁25将中间真空室22连接到高真空室20.版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005220434A Strip coating installation with vacuum chamber and coating cylinder 有权
标题翻译：带真空室和涂层缸的涂层安装
公开(公告)号：JP2005220434A
公开(公告)日：2005-08-18
申请号：JP2004099840
申请日：2004-03-30
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムスゲゼルシャフトミットベシュレンクテルハフツングウントコンパニーコマンディートゲゼルシャフト
发明人： HEIN STEFAN , SKUK PETER
IPC分类号： B05C15/00 , C23C14/56 , C23C16/54
CPC分类号： C23C14/562
摘要： PROBLEM TO BE SOLVED: To reduce structural height and width and to achieve an easily viewable and controllable web path while avoiding particle formation in the reach of the coating cylinder. SOLUTION: A web coating apparatus with a vacuum chamber 1 has, between a rear wall 18 and at least one removable closing plate 22, housing member 20 with a planar cover 10, and at least one guide roll 12, 13, 14, 15 and a coating cylinder 9 and at least one coating source 39 a, 39 b, 39 c are arranged in the vacuum chamber 1. The ends of the at least one guide roll and of the coating cylinder on the side toward the closing plate are affixed by supporting elements 16, 17 and 19 with bearings provided to the supporting elements to the cover, and the cavity in the vacuum chamber under the coating cylinder is kept free of supporting elements. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了减少结构高度和宽度，并实现易于观察和可控的幅材路径，同时避免在涂层滚筒到达的颗粒形成。解决方案：具有真空室1的卷筒纸涂布装置在后壁18和至少一个可拆卸的封闭板22之间具有带有平面盖10的壳体构件20和至少一个引导辊12,13,14 ，15和涂覆滚筒9以及至少一个涂覆源39a，39b，39c布置在真空室1中。至少一个引导辊和涂覆滚筒的朝向封闭板一侧的端部通过支撑元件16,17和19固定有支撑元件到盖的轴承，并且涂覆滚筒下方的真空室中的空腔保持没有支撑元件。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2006117501A Glass coating 审中-公开
标题翻译：玻璃涂料
公开(公告)号：JP2006117501A
公开(公告)日：2006-05-11
申请号：JP2005013604
申请日：2005-01-21
申请人： Applied Films Gmbh & Co Kg , アプライドフィルムズゲーエムベーハーアンドコンパニーカーゲー
发明人： KLEIDEITER GERD , ZMELTY ANTON , GEISLER MICHAEL
IPC分类号： C03C17/36 , C23C14/06 , C23C14/58 , E06B9/24
CPC分类号： C03C17/36 , C03C17/3423 , C03C17/366 , C03C23/0055
摘要： PROBLEM TO BE SOLVED: To improve the thermal insulation of a substrate coating with high transmission of visible light without increasing the thickness of a layer reflecting heat radiation.
SOLUTION: The invention relates to a glass coating and a method for the production of this glass coating. The glass coating comprises a first layer of ZnO and a second layer of Ag disposed thereon. Before the Ag layer is applied onto the ZnO layer, the latter is irradiated with ions.
COPYRIGHT: (C)2006,JPO&NCIPI

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