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1. 发明申请

WO2003078859A3 REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT 审中-公开
公开(公告)号：WO2003078859A3
公开(公告)日：2003-09-25
申请号：PCT/US2003/007389
申请日：2003-03-10
申请人： LAM RESEARCH CORPORATION
发明人： LIN, Jibing , HYMES, Diane, J.
IPC分类号： B65G15/34
摘要： A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.

2. 发明申请

WO2006023488A2 HIGH SECURITY MEDIA ENCRYPTION 审中-公开
标题翻译：高安全媒体加密
公开(公告)号：WO2006023488A2
公开(公告)日：2006-03-02
申请号：PCT/US2005/029098
申请日：2005-08-15
申请人： SONIC SOLUTIONS, INC. , FRY, Gregory, P.
发明人： FRY, Gregory, P.
IPC分类号： H04L9/06
CPC分类号： H04L9/0618 , H04L2209/08 , H04L2209/60
摘要： A method for encrypting a block-based removable media includes identifying a file system for the media, and receiving a selection of data to be written to the media. The identified file system designates specific logical block addresses for file system structures and files which enable the media to mount and enable the locating of recorded data on the media. When recording the block-based removable media, logical block addresses for blocks containing both file system structures and files as well as blocks containing the selection of data are randomized throughout the block based removable media. A decryption key is required to first locate the file system and enable the media to mount, and ultimately to locate and access the selection of data recorded thereon.
摘要翻译：用于加密基于块的可移动介质的方法包括识别用于媒体的文件系统，以及接收要写入到媒体的数据的选择。所识别的文件系统指定用于文件系统结构和文件的特定逻辑块地址，这些地址使得媒体能够安装并使能在媒体上定位记录的数据。当记录基于块的可移动介质时，包含文件系统结构和文件的块的逻辑块地址以及包含数据选择的块在整个基于块的可移动介质中随机化。需要解密密钥来首先定位文件系统并使媒体能够安装，并且最终定位和访问在其上记录的数据的选择。

3. 发明申请

WO2003078859A2 REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT 审中-公开
标题翻译：增强化学机械平面化皮带
公开(公告)号：WO2003078859A2
公开(公告)日：2003-09-25
申请号：PCT/US2003/007389
申请日：2003-03-10
申请人： LAM RESEARCH CORPORATION
发明人： LIN, Jibing , HYMES, Diane, J.
IPC分类号： F16G
CPC分类号： B24B37/013 , B24B37/205 , B24D11/02 , B29D29/00 , B32B2305/08 , B32B2413/00
摘要： A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.
摘要翻译：提供了用于化学机械平面化（CMP）的处理带（150,160,170）。加工带用网带（154）和机织织物（164）中的一个加强。处理带包括包围网带以限定处理带的聚合材料（152）。加工带被制造成使得网带在聚合物材料内形成连续的环，并且网带被构造为相交构件（174）的网格。相交构件在固定接头（176）处连接以形成用于处理带的刚性支撑结构。

4. 发明申请

WO2007008344A1 INTEGRATED CIRCUIT EMBODYING A NON-VOLATILE MEMORY CELL 审中-公开
标题翻译：集成电路构造非易失性存储器单元
公开(公告)号：WO2007008344A1
公开(公告)日：2007-01-18
申请号：PCT/US2006/023705
申请日：2006-06-19
申请人： SANDISK 3D LLC , BANDYOPADHYAY, Abhijit , PETTI, Christopher J. , KUMAR, Tanmay
发明人： BANDYOPADHYAY, Abhijit , PETTI, Christopher J. , KUMAR, Tanmay
IPC分类号： H01L27/115 , H01L21/8247 , H01L29/788
CPC分类号： H01L29/7883 , G11C16/0416 , G11C2216/10 , H01L27/115 , H01L27/11521 , H01L27/11558
摘要： An integrated circuit is provided including at least one memory cell. Such memory cell, in turn, includes a transistor and a capacitor. The transistor includes a source, a drain, and a gate. Further, the capacitor includes a well and a gate. The gate of the transistor remains in communication with the gate of the capacitor. In various other embodiments, the memory cell includes a transistor and a capacitor including wells of differing types (e.g. P-type, N-type). In such embodiments, the well of the transistor abuts the well of the capacitor. In still further embodiments, for a more compact design, a diffusion region of the transistor is situated less than 2.5µm from a diffusion region of the capacitor.
摘要翻译：提供了包括至少一个存储单元的集成电路。这样的存储单元又包括晶体管和电容器。晶体管包括源极，漏极和栅极。此外，电容器包括阱和栅极。晶体管的栅极保持与电容器的栅极通信。在各种其他实施例中，存储单元包括晶体管和包括不同类型的阱（例如，P型，N型）的电容器。在这样的实施例中，晶体管的阱邻接电容器的阱。在另外的实施例中，为了更紧凑的设计，晶体管的扩散区域距离电容器的扩散区域小于2.5μm。

5. 发明申请

WO2007005273A1 MEMORY CELL WITH HIGH-K ANTIFUSE FOR REVERSE BIAS PROGRAMMING 审中-公开
标题翻译：具有用于反向偏移编程的高K抗体的存储器单元
公开(公告)号：WO2007005273A1
公开(公告)日：2007-01-11
申请号：PCT/US2006/023936
申请日：2006-06-19
申请人： SANDISK 3D LLC , CLEEVES, James, M.
发明人： CLEEVES, James, M.
IPC分类号： G11C17/16 , G11C17/14
CPC分类号： G11C17/16 , G11C11/5692 , G11C13/0069 , G11C17/165 , G11C2013/0073 , G11C2013/009 , G11C2213/71 , G11C2213/72
摘要： An integrated circuit and associated method of programming are provided. Such integrated circuit includes a memory cell with a diode and an antifuse in communication with the diode. The antifuse is constructed to include a high-K dielectric material with a K greater than 3.9. Further, the memory cell is programmed utilizing a programming pulse that reverse biases the diode thereof.
摘要翻译：提供了集成电路和相关的编程方法。这种集成电路包括具有二极管的存储单元和与二极管连通的反熔丝。反熔丝被构造成包括K大于3.9的高K电介质材料。此外，使用反向偏置其二极管的编程脉冲对存储单元进行编程。

6. 发明申请

WO2002095809A2 APPARATUS AND METHOD FOR SUBSTRATE PREPARATION IMPLEMENTING A SURFACE TENSION REDUCING PROCESS 审中-公开
标题翻译：用于实现表面张力减小过程的基板制备的装置和方法
公开(公告)号：WO2002095809A2
公开(公告)日：2002-11-28
申请号：PCT/US2002/015997
申请日：2002-05-17
申请人： LAM RESEARCH CORPORATION , WELSH, Christopher, M. , MATSUMOTO, Jack, T.
发明人： WELSH, Christopher, M. , MATSUMOTO, Jack, T.
IPC分类号： H01L21/00
CPC分类号： H01L21/67051 , H01L21/67034 , Y10S134/902
摘要： Methods and systems for preparing a substrate implementing a surface tension reducing process are provided. In one example, a substrate preparation system includes a chuck which fingers for edge gripping the substrate. The chuck is hollow to provide simultaneous access to both active and backside surfaces of the substrate, and is configured to rotate the substrate. The system includes dispense arms positioned over the substrate surfaces. The dispense arms are capable of moving between a center region and periphery of the substrate surfaces, and each dispense arm includes a pair of supply lines for delivering fluids over the substrate surfaces. A connection couples the upper dispense arm with the lower dispense arm so that the dispense arms synchronously move between the center region and the periphery of the substrate, and remain aligned on opposite surfaces of the substrate.
摘要翻译：提供了制备实现表面张力降低过程的衬底的方法和系统。在一个示例中，衬底制备系统包括卡盘，用于边缘夹持衬底的指状物。卡盘是中空的，以提供同时进入基板的有源和背面的两个表面，并且被配置为旋转基板。该系统包括位于基板表面上的分配臂。分配臂能够在基板表面的中心区域和周边之间移动，并且每个分配臂包括用于在基板表面上输送流体的一对供应管线。连接将上部分配臂与下部分配臂连接，使得分配臂在基板的中心区域和周边之间同步移动，并保持对准在基板的相对表面上。

7. 发明申请

WO2007002054A1 FLOATING BODY VOLATILE MEMORY CELL TWO-PASS WRITING METHOD 审中-公开
标题翻译：浮动体挥发性记忆体双向写入方法
公开(公告)号：WO2007002054A1
公开(公告)日：2007-01-04
申请号：PCT/US2006/023931
申请日：2006-06-19
申请人： SANDISK 3D LLC , SCHEUERLEIN, Roy, E.
发明人： SCHEUERLEIN, Roy, E.
IPC分类号： G11C11/404
CPC分类号： G11C11/404 , G11C11/4076 , G11C2207/063
摘要： A method is set forth for writing volatile memory cells embodied on an integrated circuit and taking the form of an array of volatile memory cells including a plurality of word lines and a plurality of bit lines. In use, a first write operation is performed on at least one memory cell at a first time. Further, at a second time, a second write operation is performed on at least one memory cell. During use, various voltage relationships may be employed for enhanced programming. Just by way of example, a voltage at a corresponding word line associated with the at least one memory cell during the first write operation is different than that during the second write operation.
摘要翻译：提出了一种用于写入集成电路中实现的易失性存储单元并采取包括多个字线和多个位线的易失性存储单元阵列的形式的方法。在使用中，在第一次对至少一个存储单元执行第一写入操作。此外，在第二时间，对至少一个存储单元执行第二写入操作。在使用期间，可以采用各种电压关系来增强编程。仅作为示例，在第一写入操作期间与至少一个存储器单元相关联的对应字线处的电压与在第二写入操作期间的电压不同。

8. 发明申请

WO2005064648A1 EDGE WHEEL DRY MANIFOLD 审中-公开
标题翻译：边缘轮干燥歧管
公开(公告)号：WO2005064648A1
公开(公告)日：2005-07-14
申请号：PCT/US2004/042871
申请日：2004-12-20
申请人： LAM RESEARCH CORPORATION , DAVIS, Glenn, W. , WOODS, Carl , PARKS, John , REDEKER, Fred, C. , RAVKIN, Mike , ORBOCK, Michael, L.
发明人： DAVIS, Glenn, W. , WOODS, Carl , PARKS, John , REDEKER, Fred, C. , RAVKIN, Mike , ORBOCK, Michael, L.
IPC分类号： H01L21/00
CPC分类号： H01L21/67023 , H01L21/67028 , H01L21/67034 , H01L21/6704 , H01L21/68707
摘要： A apparatus for drying a substrate (10) includes a vacuum manifold (120) positioned adjacent to an edge wheel (102). The edge wheel includes an edge wheel groove (104) for receiving a peripheral edge of a substrate, and the edge wheel is capable of rotating the substrate at a desired set velocity. The vacuum manifold includes a proximity end (126) having one or more vacuum ports (128) defined therein. The proximity end is positioned at least partially within the edge wheel groove, and using supplied vacuum removes fluids that accumulate in the edge wheel groove and prevents re-deposit of trapped fluids around the peripheral edge of the substrate.
摘要翻译：用于干燥基底（10）的装置包括邻近边缘轮（102）定位的真空歧管（120）。边缘轮包括用于接收基板的周缘的边缘轮槽（104），并且边缘轮能够以期望的设定速度旋转基板。真空歧管包括具有限定在其中的一个或多个真空端口（128）的邻近端（126）。邻近端部至少部分地定位在边缘轮槽内，并且使用提供的真空去除积聚在边缘轮槽中的流体并且防止捕获的流体围绕衬底的周边边缘重新沉积。

9. 发明申请

WO2003058691A1 METHODS AND APPARATUS FOR CONDITIONING AND TEMPERATURE CONTROL OF A PROCESSING SURFACE 审中-公开
标题翻译：处理表面的调节和温度控制的方法和装置
公开(公告)号：WO2003058691A1
公开(公告)日：2003-07-17
申请号：PCT/US2002/041394
申请日：2002-12-26
申请人： LAM RESEARCH CORPORATION
发明人： KNEER, Emil, A.
IPC分类号： H01L21/00
CPC分类号： B24B53/017 , B24B21/04 , B24B49/14 , B24B53/047 , H01L21/30625
摘要： Methods and apparatus for controlling the temperature of a process surface and for conditioning of a process surface are provided. In one example, a temperature controller is described within a CMP system (140). The CMP system has a first roller (142a) and a second roller (142b) and a linear belt (12) circulating around the first and second rollers. The linear belt has a width that spans between a first edge and a second edge. The temperature controller includes an array of thermal elements (78). Each of the thermal elements of the array is independently controlled. The array of thermal elements is positioned between the first roller and the second roller and configured to contact a back surface of the linear belt. The array of thermal elements extends between the first edge and the second edge of the linear belt width.
摘要翻译：提供了用于控制工艺表面的温度和调节工艺表面的方法和设备。在一个示例中，在CMP系统140内描述温度控制器.PCM系统具有围绕第一和第二辊循环的第一辊142a和第二辊142b以及线性带12。线性带具有跨越第一边缘和第二边缘之间的宽度。温度控制器包括热元件阵列78.阵列的每个热元件都是独立控制的。热元件阵列位于第一辊和第二辊之间并且被配置成接触线性带的后表面。热元件阵列在线性带宽度的第一边缘和第二边缘之间延伸。

10. 发明申请

WO2003003403A1 CONFIGURABLE PLASMA VOLUME ETCH CHAMBER 审中-公开
标题翻译：可配置等离子体积的洗碗机
公开(公告)号：WO2003003403A1
公开(公告)日：2003-01-09
申请号：PCT/US2002/019695
申请日：2002-06-21
申请人： LAM RESEARCH CORPORATION , YEN, Bi-Ming , NI, Tuqiang , LI, Lumin , HEMKER, David
发明人： YEN, Bi-Ming , NI, Tuqiang , LI, Lumin , HEMKER, David
IPC分类号： H01J37/32
CPC分类号： H01J37/32623 , H01J37/32568
摘要： A plasma processing chamber (200) is provided. The plasma processing chamber includes a bottom electrode (144) configured to support a substrate (146) and a top electrode (142) located over the bottom electrode. The plasma processing chamber further includes a plasma confinement assembly (173) designed to transition between a closed orientation and an open orientation. In the closed orientation, the plasma confinement assembly defines a first volume (145) for plasma during processing, and in the open orientation, the plasma confinement assembly defines a second volume during processing which is larger than the first volume.
摘要翻译：提供等离子体处理室（200）。等离子体处理室包括被配置为支撑位于底部电极上方的衬底（146）和顶部电极（142）的底部电极（144）。等离子体处理室还包括设计成在闭合取向和开放取向之间转变的等离子体限制组件（173）。在封闭取向中，等离子体限制组件在处理期间限定用于等离子体的第一容积（145），并且在开放取向中，等离子体限制组件在处理期间限定比第一容积大的第二容积。

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