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    • 7. 发明申请
    • PASSIVATION OF LASER FACETS AND SYSTEMS FOR PERFORMING THE SAME
    • 钝化激光器面板和系统以执行相同操作
    • WO2017184569A2
    • 2017-10-26
    • PCT/US2017/028072
    • 2017-04-18
    • TRUMPF PHOTONICS, INC.
    • ZHANG, QiangAN, HaiyanTREUSCH, Hans Georg
    • H01S5/028
    • Methods of passivating at least one facet of a multilayer waveguide structure can include: cleaning, in a first chamber of a multi-chamber ultra-high vacuum (UHV) system, a first facet of the multilayer waveguide structure; transferring the cleaned multilayer waveguide structure from the first chamber to a second chamber of the multi- chamber UHV system; forming, in the second chamber, a first single crystalline passivation layer on the first facet; transferring the multilayer waveguide structure from the second chamber to a third chamber of the multi-chamber UHV system; and forming, in the third chamber, a first dielectric coating on the first single crystalline passivation layer, in which the methods are performed in an UHV environment of the multi-chamber UHV system without removing the multilayer waveguide structure from the UHV environment.
    • 钝化多层波导结构的至少一个面的方法可以包括:在多室超高真空(UHV)系统的第一室中清洁多层波导的第一小面 结构体; 将清洁后的多层波导结构从第一腔室传送到多腔室特高压系统的第二腔室; 在第二腔室中在第一面上形成第一单晶钝化层; 将多层波导结构从第二室传送到多室特高压系统的第三室; 以及在第三腔室中在第一单晶体钝化层上形成第一介电涂层,其中在多腔UHV系统的UHV环境中执行所述方法而不从UHV环境移除多层波导结构。 p>
    • 10. 发明申请
    • DOUBLE PASS INTERFEROMETRIC ENCODER SYSTEM
    • 双通道干涉编码器系统
    • WO2013070871A1
    • 2013-05-16
    • PCT/US2012/064086
    • 2012-11-08
    • ZYGO CORPORATION
    • DE GROOT, PeterLIESENER, Jan
    • G01D5/38G01B11/00
    • G01D5/266G01D5/38G03F7/70775
    • An encoder head includes one or more components arranged to: i) direct a first incident beam to the diffractive encoder scale at a first incident angle with respect to the encoder scale; ii) receive a first return beam from the encoder scale at a first return angle, the first return angle being different from the first incident angle; iii) redirect the first return beam to the encoder scale as a second incident beam at a second incident angle; and iv) receive a second return beam back from the encoder scale at a second return angle, the second return angle being different from the second incident angle, in which a difference between the first incident angle and second incident angle is less than a difference between the first incident angle and the first return angle and less than a difference between the second incident angle and the second return angle.
    • 编码器头包括一个或多个组件,其被布置成:i)以相对于编码器刻度尺的第一入射角将第一入射光束引导到衍射编码器刻度; ii)以第一返回角度从编码器标尺接收第一返回光束,第一返回角度与第一入射角不同; iii)将第一返回光束作为第二入射光束以第二入射角重定向到编码器刻度; 以及iv)以第二返回角度从编码器标尺接收第二返回光束,第二返回角度与第二入射角不同,其中第一入射角和第二入射角之间的差小于 所述第一入射角和所述第一返回角小于所述第二入射角与所述第二返回角之间的差。