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1. 发明申请

WO2009060294A2 LITHOGRAPHIC APPARATUS AND METHOD 审中-公开
标题翻译：光刻设备和方法
公开(公告)号：WO2009060294A2
公开(公告)日：2009-05-14
申请号：PCT/IB2008/002977
申请日：2008-11-03
申请人： ASML NETHERLANDS B.V. , TNO , DE LAAT, Wilhelmus, Johannes, Maria , GUI, Cheng-Qun , GIESEN, Peter, Theodorus, Maria , VAN DER HEIJDEN, Marcus, Theodoor, Wilhelmus , MEINDERS, Erwin, Rinaldo , PETER, Maria
发明人： DE LAAT, Wilhelmus, Johannes, Maria , GUI, Cheng-Qun , GIESEN, Peter, Theodorus, Maria , VAN DER HEIJDEN, Marcus, Theodoor, Wilhelmus , MEINDERS, Erwin, Rinaldo , PETER, Maria
IPC分类号： G01B11/30
CPC分类号： G01B11/306 , G01N2021/95676 , G03F7/703 , G03F7/70783 , G03F7/7085
摘要： A method of obtaining information indicative of the topography of a surface of a flexible substrate, the method including: directing a beam of radiation at the surface of the flexible substrate; and detecting changes in the intensity distribution of the beam of radiation after the beam of radiation has been reflected from the surface of the substrate to obtain information indicative of the topography of the surface of the flexible substrate.
摘要翻译：一种获得指示柔性基板的表面的形貌的信息的方法，所述方法包括：在所述柔性基板的表面处引导辐射束; 并且在辐射束已经从基底表面反射之后检测辐射束的强度分布的变化，以获得指示柔性基底表面的形貌的信息。

2. 发明申请

WO2009019492A1 OPTICAL MIRROR SYSTEM 审中-公开
标题翻译：光学镜像系统
公开(公告)号：WO2009019492A1
公开(公告)日：2009-02-12
申请号：PCT/GB2008/002721
申请日：2008-08-08
申请人： THE SCIENCE AND TECHNOLOGY FACILITIES COUNCIL , EDESON, Ruben, Laurence , WALTHAM, Nicholas, Richard , MORRIS, Nigel , TOSH, Ian, Allan, James
发明人： EDESON, Ruben, Laurence , WALTHAM, Nicholas, Richard , MORRIS, Nigel , TOSH, Ian, Allan, James
IPC分类号： G02B7/18 , G02B23/16
CPC分类号： G02B23/16 , G02B7/181 , G02B17/061
摘要： An optical apparatus comprising a first mirror (12), a second mirror (14), and at least one support (30) for holding the second mirror in substantially a predetermined position relative to said first mirror (12), wherein said at least one support (30) comprises at least one actuator (32) arranged to adjust the position of the second mirror (14), and said optical apparatus further comprises at least one light source (40a-40-c) rigidly fixed to the first mirror (12) in a predetermined orientation for providing a beam of light (42a-42c) directed at said second mirror (14), at least one corresponding alignment sensor (46a-46c) for detecting the beam of light (44a-44c) reflected from said second mirror (14), and arranged to provide an output signal indicative of the position of the incident reflected beam, and a controller (50) arranged to receive said output signal, and to thereby control said actuator (32) to adjust the position of the second mirror (14).
摘要翻译：一种光学装置，包括第一反射镜（12），第二反射镜（14）和至少一个用于将第二反射镜相对于所述第一反射镜（12）保持在基本上预定位置的支撑件（30），其中所述至少一个支撑件（30）包括布置成调节第二反射镜（14）的位置的至少一个致动器（32），并且所述光学设备还包括刚性地固定到第一反射镜（...）的至少一个光源（40a-40-c）用于提供指向所述第二反射镜（14）的光束（42a-42c）的至少一个对应对准传感器（46a-46c），用于检测从所述第二反射镜（14）反射的光束（44a-44c）所述第二反射镜（14），并且被布置成提供指示入射的反射光束的位置的输出信号;以及控制器（50），其布置成接收所述输出信号，从而控制所述致动器（32）的第二反射镜（14）。

3. 发明申请

WO2008151848A1 LITHOGRAPHIC APPARATUS AND METHOD 审中-公开
标题翻译：平面设备和方法
公开(公告)号：WO2008151848A1
公开(公告)日：2008-12-18
申请号：PCT/EP2008/005086
申请日：2008-06-13
申请人： ASML NETHERLANDS B.V. , BASELMANS, Johannes, Jacobus, Matheus , BLEEKER, Arno, Jan
发明人： BASELMANS, Johannes, Jacobus, Matheus , BLEEKER, Arno, Jan
IPC分类号： G03F7/20
CPC分类号： G03F7/70291 , G03F7/706
摘要： Systems and methods are provided for measuring aberration in a lithographic apparatus. A radiation beam is modulated using an array of individually controllable elements (PD), and the modulated beam is projected using a projection system (PS). A pattern is provided on the array of individually controllable elements (PD) to modulate the radiation beam, and the pattern comprises a repeating structure that is formed from a plurality of features that are dimensioned such that first order diffraction of the radiation beam substantially fills the pupil of the projection system. A sensor (S) detects the projected radiation and measures interference in the radiation projected by the projection system (PS). Aberration in the detected radiation beam is then measured.
摘要翻译：提供了用于测量光刻设备中的像差的系统和方法。使用独立可控元件（PD）的阵列来调制辐射束，并且使用投影系统（PS）投影调制的光束。在单独可控元件（PD）的阵列上提供图案以调制辐射束，并且图案包括由多个特征形成的重复结构，其尺寸使得辐射束的一阶衍射基本上填满投影系统的瞳孔。传感器（S）检测投射的辐射并测量由投影系统（PS）投影的辐射的干扰。然后测量检测到的辐射束中的畸变。

4. 发明申请

WO2008129233A1 FLUORESCENCE MEASUREMENT 审中-公开
标题翻译：荧光测量
公开(公告)号：WO2008129233A1
公开(公告)日：2008-10-30
申请号：PCT/GB2008/001221
申请日：2008-04-09
申请人： THE SCIENCE & TECHNOLOGY FACILITIES COUNCIL , WEBB, Stephen, Edwin, Dominic , MARTIN-FERNANDEZ, Marisa
发明人： WEBB, Stephen, Edwin, Dominic , MARTIN-FERNANDEZ, Marisa
IPC分类号： G01N21/64
CPC分类号： G01N21/6458 , G01N21/6445 , G01N2021/6439
摘要： Methods and apparatus for measuring fluorescence, are described. The method includes measuring at least one profile of at least a portion of a surface of a sample, the surface extending substantially transverse an axis, and illuminating the portion of the sample surface with radiation for stimulating fluorescence. The intensity of the radiation varies with position along the axis. Values indicative of the spatial intensity distribution of fluorescence emitted from said portion of the sample surface are measured. The measured values of fluorescence are modified to take account of the spatial variation in intensity of radiation incident upon the surface by utilising the measured profile.
摘要翻译：描述了用于测量荧光的方法和装置。该方法包括测量样品表面的至少一部分的至少一个轮廓，所述表面基本上横向于轴线延伸，并且用用于刺激荧光的辐射照射样品表面的该部分。辐射的强度随轴的位置而变化。测量表示从样品表面的所述部分发射的荧光的空间强度分布的值。荧光的测量值被修改以考虑通过利用测量的轮廓而入射在表面上的辐射的强度的空间变化。

5. 发明申请

WO2003073088A3 APPARATUS AND METHOD FOR THE DETECTION OF LOCALISED FLUCTUACTIONS OF IONIC CHARGE BY ION SENSITIVE FIELD EFFECT TRANSISTORS DURING A CHEMICAL REACTION 审中-公开
公开(公告)号：WO2003073088A3
公开(公告)日：2003-09-04
申请号：PCT/GB2002/000965
申请日：2002-03-11
申请人： TOUMAZOU, Christofer , PURUSHOTHAMAN, Sunil
发明人： TOUMAZOU, Christofer , PURUSHOTHAMAN, Sunil
IPC分类号： G01N27/414
摘要： Sensor and method to detect localised fluctuations of ionic charge indicating events occuring during a chemical reaction, the sensing apparatus comprising an ion sensitive field effect transistor arranged to generate an electrical output signal in response to localised fluctuations of ionic charge at or adjacent the surface of the transistor, and means for detecting the electrical output signal from the field effect transistor is provided with a polymerase linked layer and the chemical reaction is DNA synthesis, and the localised fluctuations of ionic charge indicate the insertion of di-deoxynucleotide triphosphates and deoxynucleotide triphosphates by detecting a change of hydronium ions with a sensitive Si 3 N 4 layer of the field effect transistor.

6. 发明申请

WO2002097720A1 OBJECT IDENTIFICATION 审中-公开
标题翻译：对象识别
公开(公告)号：WO2002097720A1
公开(公告)日：2002-12-05
申请号：PCT/GB2002/002228
申请日：2002-05-24
申请人： THE VICTORIA UNIVERSITY OF MANCHESTER , COOTES, Timothy, Francis , TAYLOR, Christopher, John
发明人： COOTES, Timothy, Francis , TAYLOR, Christopher, John
IPC分类号： G06K9/64
CPC分类号： G06K9/621 , G06K9/00275 , G06K9/6232
摘要： A method of object identification comprising, for an image in which an object is to be identified, determining for each of a set of locations in the image the direction in which the gradient of intensity change to an adjacent location is greatest together with the magnitude of that gradient, modifying the gradient magnitude using a nonlinear function, the modified gradient and the associated direction for the set of location providing a vector representative of the image, and comparing the vector with a previously generated statistical model which provides identification of the object.
摘要翻译：一种物体识别方法，其特征在于，对于要识别对象的图像，确定图像中的一组位置中的各个位置，强度相对于相邻位置的变化梯度最大的方向与该梯度使用非线性函数修改梯度大小，修改的梯度和提供表示图像的矢量的位置集合的相关方向，以及将向量与提供对象的识别的先前生成的统计模型进行比较。

7. 发明申请

WO2002065506A1 MASS SPECTROMETER 审中-公开
标题翻译：质谱仪
公开(公告)号：WO2002065506A1
公开(公告)日：2002-08-22
申请号：PCT/GB2002/000569
申请日：2002-02-11
申请人： THE VICTORIA UNIVERSITY OF MANCHESTER , LYON, Ian, Christopher
发明人： LYON, Ian, Christopher
IPC分类号： H01J49/02
CPC分类号： H01J49/486 , H01J49/164
摘要： A mass spectrometer comprising means for directing a stream of analyte species from a sample to an energy resolving detector, the analyte species travelling at a known speed, wherein the energy resolving detector is arranged to measure the kinetic energy of the species, thereby allowing the masses of the species to be determined.
摘要翻译：一种质谱仪，其包括用于将来自样品的分析物流流引导到能量分辨检测器的装置，所述分析物质以已知速度行进，其中所述能量分辨检测器被布置成测量所述物种的动能，由此允许所述物质的物种要确定。

8. 发明申请

WO2009081123A1 VACUUM VESSEL 审中-公开
标题翻译：真空船
公开(公告)号：WO2009081123A1
公开(公告)日：2009-07-02
申请号：PCT/GB2008/004202
申请日：2008-12-18
申请人： THE SCIENCE AND TECHNOLOGY FACILITIES COUNCIL , ANDREWS, Darren , MALYSHEV, Oleg
发明人： ANDREWS, Darren , MALYSHEV, Oleg
IPC分类号： H05H7/14
CPC分类号： H05H7/14
摘要： A vacuum vessel comprising a vessel wall defining a space in which a vacuum may be formed, and further comprising an electrical heating element, wherein the electrical heating element is provided as an integral portion of the vessel wall.
摘要翻译：一种真空容器，包括限定可形成真空的空间的容器壁，并且还包括电加热元件，其中所述电加热元件设置为所述容器壁的一体部分。

9. 发明申请

WO2009007708A2 LASER CUTTING 审中-公开
标题翻译：激光切割
公开(公告)号：WO2009007708A2
公开(公告)日：2009-01-15
申请号：PCT/GB2008/002338
申请日：2008-07-08
申请人： THE UNIVERSITY OF MANCHESTER , SOBIH, Mohamed , LI, Lin , CROUSE, Philippus
发明人： SOBIH, Mohamed , LI, Lin , CROUSE, Philippus
IPC分类号： B23K26/08 , B23K26/14 , B23K26/38
CPC分类号： B23K26/0648 , B23K26/064 , B23K26/0665 , B23K26/082 , B23K26/123 , B23K26/1436 , B23K26/38 , B23K2201/18 , B23K2203/04 , B23K2203/05 , B23K2203/14
摘要： A method of laser cutting, the method comprising generating a laser beam and directing the laser beam and assist gas at a workpiece, relative movement between the laser beam and the workpiece taking place such that the laser beam scans over a surface of the workpiece, wherein parameters including the power of the laser beam, the spot size of the laser beam in the workpiece, the pressure of the assist gas, and the cutting speed are selected such that the workpiece is cut without causing striations to be formed on surfaces of the cut.
摘要翻译：激光切割方法包括产生激光束并将激光束和辅助气体引导到工件上，激光束和工件之间发生相对运动，使得激光束扫描在工件的表面上方，其中选择包括激光束的功率，工件中的激光束的光斑尺寸，辅助气体的压力以及切割速度的参数，使得切割工件而不引起条纹在切割面上形成。

10. 发明申请

WO2008006477A1 CONNECTION CABLE 审中-公开
标题翻译：连接电缆
公开(公告)号：WO2008006477A1
公开(公告)日：2008-01-17
申请号：PCT/EP2007/005825
申请日：2007-07-02
申请人： MSS INDUSTRIAL BATTERY ACCESSORIES LIMITED , WHELEHAN, Laurence , CALVIN, Roy
发明人： WHELEHAN, Laurence , CALVIN, Roy
IPC分类号： H01R4/18
CPC分类号： H01R11/288 , H01R4/187 , H01R43/0484
摘要： A connection cable comprising a length of metal cable (4), the metal cable at one end of the length being compressed and fused together to form a fused metal region, the fused metal region including additional metal (10) which provides the fused metal region with an increased thickness compared with that which would be provided by fused metal cable alone, the fused metal region having a hole (16) in it, thereby forming a connector for receiving a battery terminal or other conducting member.
摘要翻译：一种连接电缆，包括一段长度的金属电缆（4），金属电缆的长度一端被压缩并熔合在一起以形成熔融金属区域，熔融金属区域包括附加金属（10），其提供熔融金属区域与熔融金属电缆单独提供的厚度相比，熔融金属区域在其中具有孔（16），从而形成用于接收电池端子或其它导电构件的连接器。

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