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    • 1. 发明申请
    • ALGAN/GAN HEMTS HAVING A GATE CONTACT ON A GAN BASED CAP SEGMENT AND METHODS OF FABRICATING SAME
    • WO2003007383A3
    • 2003-01-23
    • PCT/US2002/009398
    • 2002-03-26
    • CREE, INC.
    • SMITH, Richard, Peter
    • H01L29/778
    • High electron mobility transistors (HEMTs) and methods of fabricating HEMTs are provided Devices according to embodiments of the present invention include a gallium nitride (GaN) channel layer and an aluminum gallium nitride (AlGaN) barrier layer on the channel layer. A first ohmic contact is provided on the barrier layer (16) to provide a source electrode (18) and a second ohmic contact is also provided on the barrier layer (16) and is spaced apart from the source electrode (18) to provide a drain electrode (20). A GaN-based cap segment (30) is provided on the barrier layer (16) between the source electrode (18) and the drain electrode (20). The GaN-based cap segment (30) has a first sidewall (31) adjacent and spaced apart from the source electrode (18) and may have a second sidewall (32) adjacent and spaced apart from the drain electrode (20). A non-ohmic contact is provided on the GaN-based cap segment (30) to provide a gate contact (22). The gate contact (22) has a first sidewall (27) which is substantially aligned with the first sidewall (31) of the GaN-based cap segment (30). The gate contact (22) extends only a portion of a distance between the first sidewall (31) and the second sidewall (32) of the GaN-based cap segment (30).
    • 3. 发明申请
    • NITROGEN PASSIVATION OF INTERFACE STATES IN SIO2/SIC STRUCTURES
    • SIO2 / SIC结构中氮界面钝化的界面态
    • WO2004025719A2
    • 2004-03-25
    • PCT/US2003/026605
    • 2003-08-25
    • CREE, INC.SAXLER, Adam, WilliamDAS, Mrinal, Kanti
    • SAXLER, Adam, WilliamDAS, Mrinal, Kanti
    • H01L21/314
    • H01L21/049H01L21/3143H01L21/3145
    • A nitrided oxide layer on a silicon carbide layer is processed by annealing the nitrided oxide layer in a substantially oxygen-free nitrogen containing ambient. The anneal may be carried out at a temperature of greater than about 900 °C, for example, a temperature of about 1100 °C, a temperature of about 1200 °C or a temperature of about 1300 °C. Annealing the nitrided oxide layer may be carried out at a pressure of less than about 1 atmosphere, for example, at a pressure of from about 0.01 to about 1 atm or, in particular, at a pressure of about 0.2 atm. The nitrided oxide layer may be an oxide layer that is grown in a N 2 O and/or NO containing ambient, that is annealed in a N 2 O and/or NO containing ambient or that is grown and annealed in a N 2 O and/or NO containing ambient.
    • 通过在基本上无氧的含氮环境中退火氮化氧化物层来处理碳化硅层上的氮化氧化物层。 退火可以在大于约900℃的温度下进行,例如约1100℃的温度,约1200℃的温度或约1300℃的温度。 退火氮化氧化物层可以在小于约1个大气压的压力下进行,例如在约0.01至约1atm的压力下,或者特别是在约0.2atm的压力下进行。 氮化氧化物层可以是在N 2 O和/或含NO的环境中生长的氧化物层,其在N 2 O和/或NO中退火 含氮的环境中,或者在N 2 O和/或含NO的环境中生长并退火。