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    • 8. 发明申请
    • MICROELECTROMECHANICAL RF SWITCH
    • 微电子机电RF开关
    • WO2004059679A1
    • 2004-07-15
    • PCT/US2003/040013
    • 2003-12-17
    • NORTHROP GRUMMAN CORPORATION
    • BLUZER, Nathan
    • H01H59/00
    • H01H59/0009H01H2001/0089H01H2059/0018H01H2059/0036H01H2059/0072
    • A MEMS switch with a bridge having three symmetric arms each having one end connected to a support arrangement and another end integral with a common central bridge portion. First and second conductors are deposited on a substrate, with the first conductor having an end with an open area which encompasses a pull down electrode which is also on the substrate, and of a height less than that of the conductor. A control voltage applied to the pull down electrode causes downward movement of the bridge, to present a relatively low impedance, thereby allowing a signal to propagate between the first and second conductors, without the bridge touching the pull down electrode. Each of the arms is slotted to reduce curl-induced stiffness.
    • 具有三个对称臂的桥的MEMS开关,每个臂具有连接到支撑装置的一端和与公共中心桥接部分成一体的另一端。 第一和第二导体沉积在衬底上,其中第一导体具有开口区域的端部,该开口区域也包围也在衬底上的下拉电极,并且具有比导体的高度的高度。 施加到下拉电极的控制电压引起桥的向下移动,以呈现相对低的阻抗,从而允许信号在第一和第二导体之间传播,而桥不接触下拉电极。 每个臂都开槽以减少卷曲引起的刚度。