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1. 发明申请

WO2006124707A2 APPARATUS AND METHOD FOR IN SITU AND EX SITU MEASUREMENTS OF OPTICAL SYSTEM FLARE 审中-公开
标题翻译：用于光系统的现场和现场测量的装置和方法
公开(公告)号：WO2006124707A2
公开(公告)日：2006-11-23
申请号：PCT/US2006/018606
申请日：2006-05-15
申请人： ZETETIC INSTITUTE , HILL, Henry, A.
发明人： HILL, Henry, A.
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G03F7/706 , G01J2009/0223 , G03F7/70591 , G03F7/7085 , G03F7/70941
摘要： Apparatus and methods for in situ and ex situ measurements of spatial profiles of the modulus of the complex amplitude and intensity of flare generated by an optical system. The in situ and ex situ measurements comprise interferometric and non-interferometric measurements that use an array of diffraction sites simultaneously located in an object plane of the optical system to increase signals related to measured properties of flare in a conjugate image plane. The diffraction sites generate diffracted beams with randomized relative phases. In general, the interferometric profile measurements employ phase-shifting point-diffraction interferometry to generate a topographical interference signal and the non-interferometric measurements are based on flare related signals other than topographic interference signals. The topographical interference signal and flare related signals are generated by a detector either as an electrical interference signal or electrical flare related signals or as corresponding exposure induced changes in a recording medium.
摘要翻译：用于原位和非原位测量由光学系统产生的光斑的复振幅和强度的模量的空间分布的装置和方法。原位和非原位测量包括使用同时位于光学系统的物平面中的衍射位置阵列的干涉测量和非干涉测量，以增加与共轭图像平面中的测光特性相关的信号。衍射点产生具有随机相对相位的衍射光束。通常，干涉测量轮廓测量采用相移点衍射干涉测量法来产生地形干涉信号，并且非干涉测量基于与地形干扰信号不同的闪光相关信号。地形干扰信号和火炬相关信号由检测器产生，作为电干扰信号或电眩光相关信号，或作为记录介质中相应的曝光引起的变化。

2. 发明申请

WO2004090466A2 APPARATUS AND METHOD FOR MEASUREMENT OF FIELDS OF BACKSCATTERED AND FORWARD SCATTERED/REFLECTED BEAMS BY AN OBJECT IN INTERFEROMETRY 审中-公开
标题翻译：用于测量干涉仪中的对象的反向扫描和前向散射/反射的区域的装置和方法
公开(公告)号：WO2004090466A2
公开(公告)日：2004-10-21
申请号：PCT/US2004/009984
申请日：2004-04-01
申请人： ZETETIC INSTITUTE , HILL, Henry, Allen
发明人： HILL, Henry, Allen
IPC分类号： G01B
CPC分类号： G02B21/0056 , G01B9/02007 , G01B9/02019 , G01B9/02029 , G01B9/0203 , G01B9/02042 , G01B9/02069 , G01B9/02079 , G01J1/58 , G01N21/211 , G02B17/0808 , G03F7/70625
摘要： An interferometry system for making interferometric measurements of an object, the system including a source assembly that generates an input beam; a detector assembly that includes a detector element; and an interferometer that includes a source imaging system that images the input beam onto a spot on or in the object and an object imaging system that images the spot onto the detector element as an interference beam, the object imaging system combining light coming from the spot with a reference beam to produce the interference beam, wherein the source imaging system is characterized by a first aperture stop that defines a first aperture and includes a first phase shifter that introduces a first phase shift in light passing through a first region of the first aperture relative to light passing through a second regino of the first aperture, and wherein the object imaging system is characterized by a second aperture stop that defines a second aperture and includes a second phase shifter that introduces a second phase shift in light passing through a first region of the second aperture relative to light passing through a second region of the second aperture.
摘要翻译：一种用于对物体进行干涉测量的干涉测量系统，所述系统包括产生输入光束的光源组件; 检测器组件，其包括检测器元件; 以及干涉仪，其包括将输入光束成像到物体上或物体上的点上的源成像系统和将斑点作为干涉光束成像到检测器元件上的物体成像系统，该物体成像系统将来自该点的光具有参考光束以产生所述干涉光束，其中所述源成像系统的特征在于限定第一孔径的第一孔径光阑，并且包括第一移相器，所述第一移相器在通过所述第一孔径的第一区域的光中引入第一相移相对于穿过第一孔的第二区域的光，并且其中所述物体成像系统的特征在于限定第二孔的第二孔径光阑，并且包括第二移相器，所述第二移相器在通过第一区域的光中引入第二相移的第二孔相对于穿过第二孔的第二区域的光。

3. 发明专利

TW200728685A 減少相干製品效應的裝置與方法以及干涉儀中振動與環境變化的效果的補償 APPARATUS AND METHOD FOR REDUCING EFFECTS OF COHERENT ARTIFACTS AND COMPENSATION OF EFFECTS OF VIBRATIONS AND ENVIRONMENTAL CHANGES IN INTERFEROMETRY 审中-公开
简体标题：减少相干制品效应的设备与方法以及干涉仪中振动与环境变化的效果的补偿 APPARATUS AND METHOD FOR REDUCING EFFECTS OF COHERENT ARTIFACTS AND COMPENSATION OF EFFECTS OF VIBRATIONS AND ENVIRONMENTAL CHANGES IN INTERFEROMETRY
公开(公告)号：TW200728685A
公开(公告)日：2007-08-01
申请号：TW095142240
申请日：2006-11-15
申请人：捷特提克協會 ZETETIC INSTITUTE
发明人：伊爾亨利A. HILL, HENRY A.
IPC分类号： G01B
CPC分类号： G01B9/02057 , G01B9/02004 , G01B9/02007 , G01B9/02059 , G01B9/02076 , G01B9/02081 , G01B9/02083 , G01B2290/25 , G01B2290/45 , G01B2290/65 , G01N21/45
摘要：一種干涉方法包括:產生可變頻率源光束;自源光束產生準直光束,其以相對光軸之角��傳播;將準直光束引入包括參考物件以及量測物件的干涉計中,其中準直光束之至少一部分與參考物件相互作用以產生參考光束,準直光束之至少一部分與量測物件相互作用以產生返回量測光束,且參考光束與返回量測光束相結合以產生結合光束;使角��具有第一値以及在稍後之時間具有不同於第一値的第二値;以及使可變頻率F具有對應於角��之第一値的第一値且在稍後之時間具有對應於角��之第一値的第二値。
简体摘要：一种干涉方法包括:产生可变频率源光束;自源光束产生准直光束,其以相对光轴之角��传播;将准直光束引入包括参考对象以及量测对象的干涉计中,其中准直光束之至少一部分与参考对象相互作用以产生参考光束,准直光束之至少一部分与量测对象相互作用以产生返回量测光束,且参考光束与返回量测光束相结合以产生结合光束;使角��具有第一値以及在稍后之时间具有不同于第一値的第二値;以及使可变频率F具有对应于角��之第一値的第一値且在稍后之时间具有对应于角��之第一値的第二値。

4. 发明申请

WO2007008265A2 APPARATUS AND METHOD FOR IN SITU AND EX SITU MEASUREMENT OF SPATIAL IMPULSE RESPONSE OF AN OPTICAL SYSTEM USING PHASE-SHIFTING POINT-DIFFRACTION INTERFEROMETRY 审中-公开
标题翻译：用于移相点衍射干涉的光学系统的空间脉冲响应的实地和现场测量的装置和方法
公开(公告)号：WO2007008265A2
公开(公告)日：2007-01-18
申请号：PCT/US2006/013330
申请日：2006-04-10
申请人： ZETETIC INSTITUTE , HILL, Henry, A.
发明人： HILL, Henry, A.
IPC分类号： G01B9/02
CPC分类号： G01J9/02 , G01B9/02022 , G01B9/02024 , G01B9/02056 , G01B9/02057 , G01J2009/0223 , G03F7/706
摘要： A point diffraction interferometer for measuring properties of a spatial impulse response function, the interferometer including: a source for generating a source beam; an optical system; an optical element including a test object located in an object plane of the optical system, the test object including a diffraction point for generating from the source beam a measurement beam that passes through the optical system, wherein the optical element also generates from the source beam a reference beam that is combined with the measurement beam to generate an interference pattern in an image plane of the optical system, the interference pattern representing the spatial impulse response function of the optical system.
摘要翻译： 1.一种用于测量空间脉冲响应函数的特性的点衍射干涉仪，所述干涉仪包括：用于产生源光束的光源; 光学系统; 包括位于所述光学系统的物平面中的测试对象的光学元件，所述测试对象包括用于从所述源光束产生穿过所述光学系统的测量光束的衍射点，其中所述光学元件还从所述源光束与测量光束组合以在光学系统的图像平面中产生干涉图案的参考光束，干涉图案表示光学系统的空间脉冲响应函数。

5. 发明申请

WO2006023406A2 APPARATUS AND METHOD FOR JOINT AND TIME DELAYED MEASUREMENTS OF COMPONENTS OF CONJUGATED QUADRATURES OF FIELDS OF REFLECTED/SCATTERED AND TRANSMITTED/SCATTERED BEAMS BY AN OBJECT IN INTERFEROMETRY 审中-公开
标题翻译：装置和方法用于在干涉测量中通过物体测量反射/散射和透射/散射光束的共轭焦面组分的时间和延迟测量
公开(公告)号：WO2006023406A2
公开(公告)日：2006-03-02
申请号：PCT/US2005/028852
申请日：2005-08-16
申请人： ZETETIC INSTITUTE , HILL, Henry, A.
发明人： HILL, Henry, A.
IPC分类号： G01B9/02
CPC分类号： G01B9/02022 , G01B9/02014 , G01B9/02068 , G01B9/02079 , G01B2290/70
摘要： A method of interferometrically obtaining measurements for properties associated with a spot on or in an object, the method involving: receiving a sequence of M optical pulses separated in time; from each pulse in the sequence of M optical pulses, generating an n-tuplet of measurement pulses, and an n-tuplet of reference pulses, wherein each measurement pulse has a corresponding reference pulse aligned with it in time; from each pulse of each n-tuplet of reference pulses for the sequence of M optical pulses, generating a reference beam; from each pulse of each n-tuplet of measurement pulses for the sequence of M optical pulses, (a) generating a measurement beam; (b) directing the measurement beam onto the spot to thereby produce a return measurement beam from the spot; and (c) combining the return measurement beam with the corresponding reference beam that was derived from the reference pulse corresponding to that measurement pulse to generate an interference beam, wherein the sequence of M n-tuplets of measurement pulses forms n interleaved sequences of M measurement pulses, and wherein the method further involves, for each of the n interleaved sequences of M measurement pulses, introducing a combination of phase shifts between the measurement beams and corresponding reference beams.
摘要翻译：一种干涉测量获得与物体上或物体中的斑点相关联的性质的测量值的方法，所述方法包括：接收在时间上分离的M个光脉冲的序列; 从M个光脉冲序列中的每个脉冲中产生n元组测量脉冲和一个n元组参考脉冲，其中每个测量脉冲具有与其对准的对应参考脉冲; 从用于M个光脉冲序列的参考脉冲的每个n元组的每个脉冲中，生成参考光束; 从用于M个光脉冲序列的测量脉冲的每个n元组的每个脉冲中，（a）产生测量光束; （b）将测量光束引导到该点上，从而从该点产生返回测量光束; （c）将返回测量光束与从对应于该测量脉冲的参考脉冲导出的对应参考光束组合以生成干涉光束，其中测量脉冲的M个n连接组的序列形成n个交织的M测量序列脉冲，并且其中该方法还包括对于M个测量脉冲的n个交错序列中的每一个，引入测量光束和对应参考光束之间的相移组合。

6. 发明申请

WO2004074881A2 METHOD AND APPARATUS FOR DARK FIELD INTERFEROMETRIC CONFOCAL MICROSCOPY 审中-公开
标题翻译：用于暗场干涉微结构显微镜的方法和装置
公开(公告)号：WO2004074881A2
公开(公告)日：2004-09-02
申请号：PCT/US2004/004946
申请日：2004-02-19
申请人： ZETETIC INSTITUTE , HILL, Henry, Allen
发明人： HILL, Henry, Allen
IPC分类号： G02B
CPC分类号： G01B9/04 , G02B21/0024 , G02B21/0056 , G02B27/108 , G02B27/143 , G02B27/144 , G02B27/145
摘要： A differential interferometric confocal microscope for measuring an object, the microscope including: a source-side pinhole array; a detector-side pinhole array; and an interferometer that images the array of pinholes of the source-side pinhole array onto a first array of spots located in front of an object plane located near where the object is positioned and onto a second array of spots behind the object plane, wherein the first and second arrays of spots are displaced relative to each other in a direction that is normal to the object plane, the interferometer also (1) imaging the first arrays of spots onto a first image plane tha tis behind the detector-side phinhole array, (2) imaging the first array of spots onto a plane defined by the detector-side pihole array, (3) imaging the second array of spots onto a second image plane that is in front of the detector-side pinhole array, and (4) imaging the second array of spots onto the plane defined by the detector-side pinhole array, wherein each spot of the imaged first array of spots in the first image plane is aligned with a corresponding different spot of the imaged second array of spots in the second image plane and a corresponding different pinhole of the detector-side pinhole array, and wherein each spot of the image first array of spots in the plane defined by the detector-side array coincides with a corresponding different spot of the imaged second array of spots in the plane defined by the detector-side array and coincides with a corresponding different pinhole of the detector-side pinhole array.
摘要翻译：用于测量物体的差分干涉式共聚焦显微镜，所述显微镜包括：源极针孔阵列; 检测器侧针孔阵列; 以及干涉仪，其将源侧针孔阵列的针孔阵列成像到位于物体平面附近的物体平面前方的位于第一阵列的位置上，并且位于物平面后面的第二阵列上，其中，第一和第二阵列阵列在垂直于物平面的方向上相对于彼此移位，干涉仪还（1）将第一阵列阵列成像到检测器侧孔阵列后面的第一图像平面上，（2）将第一阵列的斑点成像到由检测器侧针孔阵列限定的平面上，（3）将第二阵列阵列成像到位于检测器侧针孔阵列前面的第二图像平面上，和（4 ）将第二阵列的斑点成像到由检测器侧针孔阵列限定的平面上，其中第一图像平面中成像的第一阵列阵列的每个点与成像的第二阵列的相对应的不同点对齐他的第二图像平面和检测器侧针孔阵列的相应不同的针孔，并且其中由检测器侧阵列限定的平面中的图像的第一阵列点的每个点与被成像的第二阵列的相应的不同点重合由检测器侧阵列限定的平面中的点并且与检测器侧针孔阵列的相应不同的针孔重合。

7. 发明申请

WO2004072695A2 TRANSVERSE DIFFERENTIAL INTERFEROMETRIC CONFOCAL MICROSCOPY 审中-公开
标题翻译：横向差分干涉微结构显微镜
公开(公告)号：WO2004072695A2
公开(公告)日：2004-08-26
申请号：PCT/US2004/004275
申请日：2004-02-13
申请人： ZETETIC INSTITUTE , HILL, Henry, Allen
发明人： HILL, Henry, Allen
IPC分类号： G02B
CPC分类号： G02B21/0056 , G01B9/04 , G02B21/0024 , G02B21/04
摘要： An array of conjugated quadratures of fields is measured interferometrically by a confocal interferometer and detector system wherein each conjugated quadratures comprises a difference of conjugated quadratures of fields of beams scattered/reflected or transmitted by a pair of spots in or on a substrate. The array of conjugated quadratures is measured jointly, i.e ., simultaneously, and the components of each conjugated quadratures may be measured jointly. Each pair of spots generally has a relative displacement on the order of the three or more times the size of the spots in a direction nominally tangent to the surface of the substrate. The relative phases of the beams subsequently scattered/reflected or transmitted by the pair of spots on/in a substrate may be adjusted as a set by control of a single system parameter so that the conjugated quadratures of the array of conjugated quadratures are nominally zero, i.e ., information may be obtained about the substrate with the interferometer and detector system operating in a dark field mode. Operation in a dark field mode leads to both reduced systematic and statistical errors in the information and increased throughput. The information may include the transverse derivative of a profile of one or more surfaces of a substrate; onedimensional, two-dimensional, and three-dimensional transverse differential images of a substrate; critical dimensions of features or artifacts on or in a substrate, and the size and location of sub-wavelength defects in or on a substrate.
摘要翻译：场共轭正交阵列通过共焦干涉仪和检测器系统进行干涉测量，其中每个共轭正交包括由衬底中或衬底上的一对斑点散射/反射或透射的光束的场的共轭正交的差。共轭正交阵列共同测量，即同时测量，并且可以共同测量每个共轭正交的分量。每对点通常在与基板表面正切的方向上的点的尺寸的三次或更多次的量级上具有相对位移。随后通过单个系统参数的控制将随后由衬底上的一对点散射/反射或透射的光束的相对相位调整为一组，使得共轭正交阵列的共轭正交值标称为零，即，可以利用干涉仪和检测器系统在暗场模式下操作来获得关于衬底的信息。在暗场模式下的操作可以减少信息中的系统和统计误差，提高吞吐量。信息可以包括衬底的一个或多个表面的轮廓的横向导数; 衬底的二维，二维和三维横向差分图像; 衬底上或衬底上的特征或伪影的关键尺寸，以及衬底中或衬底上的亚波长缺陷的尺寸和位置。

8. 发明申请

WO2007059249A2 APPARATUS AND METHOD FOR REDUCING EFFECTS OF COHERENT ARTIFACTS AND COMPENSATION OF EFFECTS OF VIBRATIONS AND ENVIRONMENTAL CHANGES IN INTERFEROMETRY 审中-公开
标题翻译：降低相关作物效果的手段和方法以及振动和环境变化对干扰物影响的补偿
公开(公告)号：WO2007059249A2
公开(公告)日：2007-05-24
申请号：PCT/US2006/044416
申请日：2006-11-15
申请人： ZETETIC INSTITUTE , HILL, Henry, A.
发明人： HILL, Henry, A.
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B9/02057 , G01B9/02004 , G01B9/02007 , G01B9/02059 , G01B9/02076 , G01B9/02081 , G01B9/02083 , G01B2290/25 , G01B2290/45 , G01B2290/65 , G01N21/45
摘要： An interferometric method including: generating a variable frequency source beam; from the source beam, generating a collimated beam propagating at an angle Ω relative to an optical axis; introducing the collimated beam into an interferometer that includes a reference object and a measurement object, wherein at least a portion of the collimated beam interacts with the reference object to generate a reference beam, at least a portion of the collimated beam interacts with the measurement object to generate a return measurement beam, and the reference beam and the return measurement beam are combined to generate a combined beam; causing the angle Ω to have a first value and at a later time a second value that is different from the first value; and causing the variable frequency F to have a first value that corresponds to the first value of the angle Ω and at the later time to have a second value that corresponds to the first value of the angle Ω.
摘要翻译：一种干涉测量方法，包括：产生可变频率源光束; 产生源光束，产生相对于光轴以角度O传播的准直光束; 将准直光束引入包括参考对象和测量对象的干涉仪中，其中准直光束的至少一部分与参考物体相互作用以产生参考光束，准直光束的至少一部分与测量对象相互作用以产生返回测量光束，并且参考光束和返回测量光束被组合以产生组合光束; 使得角度O具有第一值，并在稍后时间产生不同于第一值的第二值; 并且使可变频率F具有对应于角度O的第一值的第一值，并且在稍后的时间具有对应于角度O的第一值的第二值。

9. 发明申请

WO2005033747A2 METHOD AND APPARATUS FOR ENHANCED RESOLUTION OF HIGH SPATIAL FREQUENCY COMPONENTS OF IMAGES USING STANDING WAVE BEAMS IN NON-INTERFEROMETRIC AND INTERFEROMETRIC MICROSCOPY 审中-公开
标题翻译：使用非平均和非均匀微观显微镜中的标准波段的图像高空间频率分量的增强分辨率的方法和装置
公开(公告)号：WO2005033747A2
公开(公告)日：2005-04-14
申请号：PCT/US2004/032023
申请日：2004-09-30
申请人： ZETETIC INSTITUTE , HILL, Henry, Allen
发明人： HILL, Henry, Allen
IPC分类号： G02B
CPC分类号： G01B9/02022 , G01B9/02003 , G01B9/02024 , G01B2290/70 , G02B21/14
摘要： A method of measuring properties of a substrate, the method involving: illuminating a spot on the substrate with a standing wave measurement beam to generate a return measurement beam, the standing wave measurement beam characterized by a standing wave pattern; generating an electrical signal from the return measurement beam; causing the standing wave pattern to be at a succession of different positions on the surface of the substrate; and for each of the succession of different positions of the standing wave pattern, acquiring measurement data from the electrical signal.
摘要翻译：一种测量基板特性的方法，所述方法包括：用驻波测量光束照射所述基板上的点以产生返回测量光束，所述驻波测量光束以驻波图案为特征; 从返回测量光束产生电信号; 使驻波图案在基板的表面上处于不同位置的连续位置; 并且对于驻波图案的不同位置的连续中的每一个，从电信号获取测量数据。

10. 发明申请

WO2004090582A2 METHOD FOR CONSTRUCTING A CATADIOPTRIC LENS SYSTEM 审中-公开
标题翻译：用于构造阴离子透镜系统的方法
公开(公告)号：WO2004090582A2
公开(公告)日：2004-10-21
申请号：PCT/US2004/009968
申请日：2004-04-01
申请人： ZETETIC INSTITUTE , HILL, Henry, Allen
发明人： HILL, Henry, Allen
IPC分类号： G02B
CPC分类号： G02B21/0056 , G02B21/0024
摘要： A method of fabricating a catadioptric lens system, the method involving: fabricating a single catadioptric lens element having a bottom surface and an upper surface, the upper surface having a convex portion and a concave portion, both the convex and concave portions sharing a common axis of symmetry; cutting apart the catadioptric lens element to form 2n pie-shaped segments, wherein n is an integer; and reassembling the 2n pie-shaped segments to form the catadioptric lens system with n of the 2n pie-shaped segments being located above a common plane and the rest of the 2n pie-shaped elements being below the common plane.
摘要翻译：一种制造反射折射透镜系统的方法，所述方法包括：制造具有底表面和上表面的单个反射折射透镜元件，所述上表面具有凸部和凹部，所述凸部和凹部均具有公共轴线的对称性切割反射折射透镜元件以形成2n个饼形片段，其中n为整数; 并且重新组装2n个饼状部分以形成反射折射透镜系统，其中2n个饼状部分中的n个位于公共平面之上，其余的2n个饼状部分位于公共平面之下。

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