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    • 1. 发明授权
    • Device for carrying out a plasma-assisted process
    • 用于进行等离子体辅助处理的装置
    • US08101246B2
    • 2012-01-24
    • US12691408
    • 2010-01-21
    • Pierre FayetBertrand Jaccoud
    • Pierre FayetBertrand Jaccoud
    • H05H1/24
    • H01J37/32009C23C16/509H01J37/3266
    • A device for carrying out a plasma enhanced process includes, within a vacuum chamber, at least one magnetron electrode (32) constituting an unbalanced magnetron having a flat magnetron face (20) with peripheral and central magnetic poles of opposite polarities connected to a source (34) of alternating voltage. The device further includes a device for positioning a substrate (25), the substrate having a surface to be treated facing the magnetron face (20), and a gas supply device for supplying a process gas or process gas mixture to the space between the magnetron face (20) and the treated surface. The distance between the magnetron face (20) and the treated surface is adapted to the magnetic field created by the magnetron electrode (32) such that there is a visible plasma band running between darker tunnels formed by magnetic field lines extending between peripheral and central magnetic poles of the magnetron face (20) and the treated surface, the plasma band having a minimum width but having homogeneous brightness towards the treated surface.
    • 用于进行等离子体增强处理的装置包括在真空室内的构成不平衡磁控管的至少一个磁控管电极(32),所述磁控管具有平坦的磁控管面(20),其具有连接到源极的相反极性的外围和中心磁极 34)交流电压。 所述装置还包括用于定位衬底(25)的装置,所述衬底具有面对磁控管面(20)的待处理表面,以及气体供应装置,用于将处理气体或处理气体混合物供应到磁控管 面(20)和处理过的表面。 磁控管面(20)和被处理表面之间的距离适应于由磁控管电极(32)产生的磁场,使得存在可见的等离子体带,该等离子带在由周边和中心磁体之间延伸的磁场线形成的较暗的隧道之间运行 磁控管面(20)和被处理表面的极点,等离子体带具有最小宽度但具有朝向被处理表面的均匀亮度。
    • 2. 发明授权
    • Gas burner
    • 煤气灶
    • US09004913B2
    • 2015-04-14
    • US12864376
    • 2009-01-20
    • Gil RochatPierre FayetThomas RichterBernhard Zobel
    • Gil RochatPierre FayetThomas RichterBernhard Zobel
    • F23D14/62F23D14/58F23D14/10F23D99/00
    • F23D14/586C23C16/453F23D14/10F23D91/02
    • A gas burner, which is particularly suitable for flame treatment of substrates having large surfaces, e.g. for coating such surfaces in a combustion chemical vapor deposition (CCVD) process, includes a burner body with a gas supply connection and a nozzle plate, wherein the burner body and the nozzle plate constitute together a gas plenum and the nozzle plate constitutes a perforated wall section of the plenum. The nozzle plate includes a large number of nozzles extending from a plenum side to a flame side of the nozzle plate and it is made of a plurality of sheets which are arranged in a stack and extend substantially perpendicular or substantially parallel to the nozzle extension. The sheets include through openings, wherein the through openings of all sheets are at least partly aligned with each other, or they have a comb-like form.
    • 一种气体燃烧器,其特别适用于具有大表面的基底的火焰处理。 为了在燃烧化学气相沉积(CCVD)工艺中涂覆这些表面,包括具有气体供应连接和喷嘴板的燃烧器主体,其中燃烧器主体和喷嘴板一起构成气体压力室,并且喷嘴板构成穿孔壁 全会的一部分。 喷嘴板包括从喷嘴板的气室侧延伸到火焰侧的大量喷嘴,并且其由多个布置成堆叠并基本垂直或基本上平行于喷嘴延伸部延伸的片制成。 片材包括通孔,其中所有片材的通孔至少部分地彼此对准,或者它们具有梳状形式。
    • 4. 发明申请
    • Device for the Ultrasound Treatment of Workpieces
    • 工件超声处理装置
    • US20100139867A1
    • 2010-06-10
    • US12063691
    • 2006-08-07
    • Peter Josef MartinUlrich Vogler
    • Peter Josef MartinUlrich Vogler
    • B32B37/06
    • B06B3/00B29C65/08B29C66/71B29C66/73921B29C66/8122B29C66/81431B29C66/8145B29C66/849B29C66/9516B29C66/9517B29K2023/06B29K2905/08
    • The invention relates to a sonotrode (1) for ultrasonic machining workpieces. The sonotrode (1) is connected on the input side to a drive (5) with at least two ultrasonic transmitter units excited by an ultrasonic generator, is provided with a narrow and long machining surface (12) in front on the output side of the sonotrode, and is provided, at the side, with at least slot (10) situated approximately between two ultrasonic transmitter units. In order to obtain a narrow and long machining surface (12) in front on the output side of the sonotrode (1), whereby the machining surface has a length of more than twice the effective machining length so that it extends away over the crosswise dimension even of a wider workpiece, and the height of the device, which is measured from the front machining surface to behind over the drive (5), is not significantly greater than ?/2. To this end, the invention provides that; the sonotrode (1), from its machining surface (12) toward the rear in the direction of its height (H) while leaving recesses (6) for receiving the respective drive (5), is provided as a single piece up to its rear flat surface (13) that, on the input side of the sonotrode (1) opposite the output side machining surface (12), is provided approximately parallel to the machining surface (12) and is almost as long but wider than the latter, and; the outer surface of the sonotrode (1) is closed up to the at least one slot (10) and up to the openings, which are located in the rear flat surface (13) and serve for accessing the recesses (6) for the drives (5). The overall height of the sonotrode is =?/2, with ? being equal to the wavelength of the wave oscillating in the direction of its height (H).
    • 本发明涉及用于超声波加工工件的超声波发生器(1)。 超声波发生器(1)在输入侧连接到具有由超声波发生器激励的至少两个超声波发射器单元的驱动器(5)上,在该输出侧的前侧设置有窄且长的加工表面(12) 超声波发生器,并且在侧面设置有至少位于两个超声波发射器单元之间的狭槽(10)。 为了在超声波发生器(1)的输出侧的前面获得窄且长的加工表面(12),由此加工表面的长度是有效加工长度的两倍以上,使得其延伸越过横向尺寸 甚至更宽的工件,并且从驱动器(5)上的前加工表面到后面测量的装置的高度不显着大于λ/ 2。 为此,本发明提供: 超声波发生器(1)从其加工表面(12)朝向其高度(H)方向的后方,同时留下用于接收相应的驱动器(5)的凹部(6),直到其后部为单件 在与输出侧加工面(12)相对的超声焊丝(1)的输入侧的平面(13)大致平行于加工面(12)设置,并且几乎与后者相同的长度, ; 超声波发生器(1)的外表面被封闭到至少一个槽(10)并且直到位于后平坦表面(13)中的开口,并且用于访问用于驱动器的凹部(6) (5)。 超声波发生器的总体高度为=π/ 2, 等于在其高度(H)方向上振荡的波的波长。