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    • 8. 发明专利
    • Semiconductor process sensor and method of characterizing semiconductor process
    • 半导体工艺传感器和表征半导体工艺的方法
    • JP2014160831A
    • 2014-09-04
    • JP2014053816
    • 2014-03-17
    • Skyworks Solutions Incスカイワークス ソリューションズ,インコーポレイテッドSkyworks Solutions,Inc.
    • LEE JUNG HEE
    • H01L27/04G01K7/01H01L21/66H01L21/822H03K3/00
    • G01R31/2601H03F1/30H03F2200/447
    • PROBLEM TO BE SOLVED: To provide a semiconductor process sensor and a method of characterizing a semiconductor process.SOLUTION: An integrated circuit includes a process sensor, a temperature sensor, and a voltage sensor. The process sensor is configured to sense a process parameter indicating a semiconductor process by which the integrated circuit is formed and to provide a characterization of the semiconductor process to an output of the process sensor on the basis of the sensed process parameter. The temperature sensor is configured to provide an indication of a temperature of the integrated circuit to an output of the temperature sensor, and the voltage sensor is configured to provide an indication of a power supply voltage level of the integrated circuit to an output of the voltage sensor. The output of the process sensor is coupled to at least one of the temperature sensor and the voltage sensor to compensate at least one of the indication of the temperature and the indication of the power supply voltage level.
    • 要解决的问题:提供半导体工艺传感器和表征半导体工艺的方法。解决方案:集成电路包括工艺传感器,温度传感器和电压传感器。 过程传感器被配置为感测指示形成集成电路的半导体工艺的工艺参数,并且基于感测的工艺参数将半导体工艺的特性提供给工艺传感器的输出。 所述温度传感器被配置为向所述温度传感器的输出提供所述集成电路的温度的指示,并且所述电压传感器被配置为向所述电压的输出提供所述集成电路的电源电压电平的指示 传感器。 过程传感器的输出耦合到温度传感器和电压传感器中的至少一个,以补偿温度指示和电源电压电平指示中的至少一个。