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    • 9. 发明专利
    • MICROWAVE FIELD EFFECT TRANSISTOR STRUCTURE ON SILICON CARBIDE SUBSTRATE
    • AU2003231810A1
    • 2003-12-12
    • AU2003231810
    • 2003-05-21
    • SIRENZA MICRODEVICES INC
    • ANNA PABLO E DJOHNSON JOSEPH H
    • H01L21/74H01L23/552H01L29/06H01L29/08H01L29/24H01L29/417H01L29/78H01L29/00H01L29/76H01L29/80H01L31/062H01L31/112H01L31/119
    • A microwave transistor structure comprising: (a) a SiC substrate having a top surface; (b) a silicon semiconductor material of a first conductivity type overlaying the top surface of the semiconductor substrate and having a top surface; (c) a conductive gate overlying and insulated from the top surface of the silicon semiconductor material; (d) a channel region of the first conductivity type formed completely within the silicon semiconductor material including a channel dopant concentration; (e) a drain region of the second conductivity type formed in the silicon semiconductor material and contacting the channel region; (f) a body region of the first conductivity type and having a body region dopant concentration formed in the silicon semiconductor material under the conductive gate region; (g) a source region of the second conductivity type and having a source region dopant concentration formed in the silicon semiconductor material within the body region; (h) a shield plate region being adjacent and being parallel to the drain region formed on the top surface of the silicon semiconductor material over a portion of the channel region; wherein the shield plate region is adjacent and parallel to the conductive gate region; and wherein the shield plate extends above the top surface of the silicon semiconductor material to a shield plate height level, and is insulated from the top-surface of the silicon semiconductor material; and (i) a conductive plug region formed in the body region of the silicon semiconductor material to connect a lateral surface of the body region to the top surface of the substrate.