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1. 发明专利

CA2366618A1 SELF-ALIGNED ELECTRICAL INTERCONNECT FOR TWO ASSEMBLED PERPENDICULAR SEMICONDUCTOR CHIPS 未知
公开(公告)号：CA2366618A1
公开(公告)日：2002-07-04
申请号：CA2366618
申请日：2002-01-04
申请人： OPTICNET INC
发明人： YUN WEIJIE , LIM MARTIN
IPC分类号： B81B7/00 , H01L25/00 , H01L23/52 , H05K1/14
摘要： A self aligned electrical interconnect for two assembled perpendicular semiconductive chips is formed by a slot in a carrier chip having a notch wi th a metal trace. The other device chip is perpendicularly placed in the slot and has a matching metal trace. The chips are then bonded together by the traces to provide for fine perpendicular alignment of the assembled chips.

2. 发明申请

WO03035542A3 METHOD OF FABRICATING VERTICAL ACTUATION COMB DRIVES 审中-公开
标题翻译：制造垂直驱动梳齿器驱动器的方法
公开(公告)号：WO03035542A3
公开(公告)日：2003-10-16
申请号：PCT/US0234459
申请日：2002-10-26
申请人： OPTICNET INC
发明人： HOPKINS DEAN A JR , LIM MARTIN , MAO MINYAO
IPC分类号： B81B3/00
CPC分类号： B81C1/0015 , B81B2201/033 , B81B2203/0315 , B81B2203/051 , B81C2201/017 , H02N1/008
摘要： A method of fabricating a vertical actuation comb drive first etches a cavity in a semiconductive wafer; then the comb structure is etched, and the fixed part of the structure is deformed by an induced strain, by techniques such as boron doping, by adding a metal layer or a fixed oxide, or a mechanical latch or an additional plate electrode. In a manner known in the art, application of a voltage across the fingers of the comb produces a deflection either tilting or a vertical movement in the moveable portion of the comb drive.
摘要翻译：制造垂直致动梳状驱动器的方法首先蚀刻半导体晶片中的空腔; 然后蚀刻梳状结构，并且通过诸如硼掺杂的技术，通过添加金属层或固定氧化物，或者机械闩锁或附加平板电极，通过感应应变使结构的固定部分变形。以本领域已知的方式，在梳齿的指状物上施加电压在梳齿驱动器的可移动部分中产生偏转或者倾斜或者垂直运动。

3. 发明申请

WO2003035542A2 METHOD OF FABRICATING VERTICAL ACTUATION COMB DRIVES 审中-公开
标题翻译：制造垂直执行机构的方法
公开(公告)号：WO2003035542A2
公开(公告)日：2003-05-01
申请号：PCT/US2002/034459
申请日：2002-10-26
申请人： OPTICNET, INC.
发明人： HOPKINS, Dean, A., Jr. , LIM, Martin , MAO, Minyao
IPC分类号： B81B3/00
CPC分类号： B81C1/0015 , B81B2201/033 , B81B2203/0315 , B81B2203/051 , B81C2201/017 , H02N1/008
摘要： A method of fabricating a vertical actuation comb drive first etches a cavity in a semiconductive wafer; then the comb structure is etched, and the fixed part of the structure is deformed by an induced strain, by techniques such as boron doping, by adding a metal layer or a fixed oxide, or a mechanical latch or an additional plate electrode. In a manner known in the art, application of a voltage across the fingers of the comb produces a deflection either tilting or a vertical movement in the moveable portion of the comb drive.
摘要翻译：制造垂直致动梳状驱动器的方法首先蚀刻半导体晶片中的空腔; 然后对梳状结构进行蚀刻，通过添加金属层或固定氧化物的机械闩锁或附加的平板电极，通过诱导应变，硼掺杂等技术使固定部分发生变形。以本领域已知的方式，跨梳子的手指施加电压产生在梳子驱动器的可移动部分中的倾斜或垂直移动的偏转。

4. 发明申请

WO2004102240A1 BISTABLE LATCHING ACTUATOR FOR OPTICAL SWITCHING APPLICATIONS 审中-公开
标题翻译：用于光开关应用的双绞线执行器
公开(公告)号：WO2004102240A1
公开(公告)日：2004-11-25
申请号：PCT/US2004/012981
申请日：2004-04-28
申请人： OPTICNET, INC. , MAO, Minyao , LIM, Martin , OSTROM, Robert
发明人： MAO, Minyao , LIM, Martin , OSTROM, Robert
IPC分类号： G02B6/26
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/357
摘要： Bistable latching actuator for use in optical fiber switching applications having a generally planar mechanism with an arm that carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm. Movement between the two stable positions is initiated and damped with an electrostatic comb drive.
摘要翻译：用于光纤切换应用的双稳态闭锁致动器具有大致平面的机构，其具有臂，该臂具有在垂直于机构的平面的方向上运动的反射镜，以及用于将反射镜保持在相对侧的稳定位置的双稳态机械闩锁不接触手臂。启动两个稳定位置之间的运动并用静电梳驱动阻尼。

5. 发明授权

US06865313B2 Bistable latching actuator for optical switching applications 失效
标题翻译：用于光开关应用的双稳态闭锁执行器
公开(公告)号：US06865313B2
公开(公告)日：2005-03-08
申请号：US10435511
申请日：2003-05-09
申请人： Minyao Mao , Martin Lim , Robert Ostrom
发明人： Minyao Mao , Martin Lim , Robert Ostrom
IPC分类号： G02B6/35
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/357
摘要： Bistable latching actuator for use in optical fiber switching applications having a generally planar mechanism with an arm that carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm. Movement between the two stable positions is initiated and damped with an electrostatic comb drive.
摘要翻译：用于光纤切换应用的双稳态闭锁致动器具有大致平面的机构，其具有臂，该臂具有在垂直于机构的平面的方向上运动的反射镜，以及用于将反射镜保持在相对侧的稳定位置的双稳态机械闩锁不接触手臂。启动两个稳定位置之间的运动并用静电梳驱动阻尼。

6. 发明申请

US20020118084A1 Latching mechanism for mems actuator and method of fabrication 失效
标题翻译：用于MEMs致动器和制造方法的锁存机构
公开(公告)号：US20020118084A1
公开(公告)日：2002-08-29
申请号：US09793307
申请日：2001-02-26
申请人： OpticNet, Inc.
发明人： Martin Lim , Robert Fan , Long Que
IPC分类号： H01H051/22
CPC分类号： H01H1/0036 , G02B26/0866 , H01H61/0107 , H01H2001/0042 , H01H2061/006
摘要： A latching mechanism for a MEMS actuator as, for example, a mirror in an NnullN fiber optic switch, maintains a thermally actuated mirror in its actuated position even in the event of a power interruption by a pair of clamps, which clamp against an actuator arm. Such actuator arm is thermally actuated by a bent beam type of thermal actuator. To provide for effective fabrication using the MEMS technique (microelectromechanical system), on for example, a silicon substrate where the entire moveable structure is a suspended mechanism, the clamps are fabricated in a normally closed position. In this position they typically interfere with the line of motion of an enlarged portion of an actuator arm being directly in the line of motion or with a post and slot technique.
摘要翻译：用于MEMS致动器的闩锁机构，例如NxN光纤开关中的反射镜，即使在通过一对夹持器的电力中断的情况下，也将热致动反射镜保持在其致动位置，夹钳紧贴致动器臂。这种致动器臂由弯曲梁式的热致动器热致动。为了提供使用MEMS技术（微机电系统）的有效制造，例如，整个可移动结构是悬挂机构的硅衬底，夹具被制造在常闭位置。在这个位置上，它们通常干扰直接位于运动线中的致动器臂的放大部分的运动线，或者通过柱和槽技术。

7. 发明申请

US20020085796A1 Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips 审中-公开
标题翻译：用于两个组装的垂直半导体芯片的自对准电气互连
公开(公告)号：US20020085796A1
公开(公告)日：2002-07-04
申请号：US09754940
申请日：2001-01-04
申请人： OpticNet, Inc.
发明人： Martin Lim , Weijie Yun
IPC分类号： G02B006/35
CPC分类号： B81B7/0006
摘要： A self-aligned electrical interconnect for two assembled perpendicular semiconductive chips is formed by a slot in a carrier chip having a notch with a metal trace. The other device chip is perpendicularly placed in the slot and has a matching metal trace. The chips are then bonded together by the traces to provide for fine perpendicular alignment of the assembled chips.
摘要翻译：用于两个组装的垂直半导体芯片的自对准电互连由具有金属迹线的凹口的载体芯片中的槽形成。另一个器件芯片垂直放置在插槽中，并具有匹配的金属迹线。然后通过迹线将芯片结合在一起，以提供组装的芯片的精细垂直对准。

8. 发明公开

EP1221428A2 Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips 审中-公开
标题翻译： Selbstjustierte elektrische Verbindungfürzwei senkrecht zusammengesetzte Halbleiterchips
公开(公告)号：EP1221428A2
公开(公告)日：2002-07-10
申请号：EP02250033.4
申请日：2002-01-04
申请人： OpticNet, Inc.
发明人： Lim, Martin , Yun, Weijie
IPC分类号： B81B7/00 , H01L21/58
CPC分类号： B81B7/0006
摘要： A self-aligned electrical interconnect for two assembled perpendicular semiconductive chips is formed by a slot in a carrier chip having a notch with a metal trace. The other device chip is perpendicularly placed in the slot and has a matching metal trace. The chips are then bonded together by the traces to provide for fine perpendicular alignment of the assembled chips.
摘要翻译：用于两个组装的垂直半导体芯片的自对准电互连由具有金属迹线的凹口的载体芯片中的槽形成。另一个器件芯片垂直放置在插槽中，并具有匹配的金属迹线。然后通过迹线将芯片结合在一起以提供组装的芯片的精细垂直对准。

9. 发明公开

EP1221428A3 Self-aligned electrical interconnect for two assembled perpendicular semiconductor chips 审中-公开
标题翻译：对于两个相互垂直的复合半导体芯片的自对准的电连接
公开(公告)号：EP1221428A3
公开(公告)日：2004-12-08
申请号：EP02250033.4
申请日：2002-01-04
申请人： OpticNet, Inc.
发明人： Lim, Martin , Yun, Weijie
IPC分类号： B81B7/00 , H01L21/58 , G02B6/35 , G02B26/08
CPC分类号： B81B7/0006
摘要： A self-aligned electrical interconnect for two assembled perpendicular semiconductive chips is formed by a slot in a carrier chip having a notch with a metal trace. The other device chip is perpendicularly placed in the slot and has a matching metal trace. The chips are then bonded together by the traces to provide for fine perpendicular alignment of the assembled chips.

10. 发明公开

EP1146360A3 Fiber optic switch using micro-electro-mechanical systems (MEMS) 审中-公开
标题翻译：光纤开关使用微机电系统（MEMS）
公开(公告)号：EP1146360A3
公开(公告)日：2004-01-28
申请号：EP01300929.5
申请日：2001-02-01
申请人： OpticNet, Inc.
发明人： Wan, Lawrence A. , Lim, Martin
IPC分类号： G02B6/26 , G02B6/35 , G02B6/08
CPC分类号： G02B6/3582 , G02B6/32 , G02B6/3512 , G02B6/353 , G02B6/3546 , G02B6/357 , G02B6/3572 , G02B6/3584
摘要： A fiber optic switch using MEMS is scalable by the use of a matrix of cross-points located at the intersection of all possible input and output light paths. Cross-points are formed by a MEMS procedure where a digitally movable mirror intersects a light path to provide a digital switching action with the remaining cross-point mirrors being moved out of position to provide through transmission.

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