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1. 发明申请

WO2011014864A3 BUFFERED STORAGE AND TRANSPORT DEVICE FOR TOOL UTILIZATION 审中-公开
公开(公告)号：WO2011014864A3
公开(公告)日：2011-02-03
申请号：PCT/US2010/044072
申请日：2010-08-02
申请人： MURATEC AUTOMATION CO., LTD. , FATULA, JR., Joseph, John , DEYANOV, Roumen Iliev , GONZALEZ, Pablo , CARLSON, Robert , GREENE, John Brooks , TZOU, Kevin
发明人： FATULA, JR., Joseph, John , DEYANOV, Roumen Iliev , GONZALEZ, Pablo , CARLSON, Robert , GREENE, John Brooks , TZOU, Kevin
IPC分类号： H01L21/677 , B65G49/06 , B66C17/04 , B65G1/04
摘要： A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.

2. 发明申请

WO2011014864A2 BUFFERED STORAGE AND TRANSPORT DEVICE FOR TOOL UTILIZATION 审中-公开
标题翻译：缓冲存储和运输设备的工具使用
公开(公告)号：WO2011014864A2
公开(公告)日：2011-02-03
申请号：PCT/US2010044072
申请日：2010-08-02
申请人： MURATEC AUTOMATION CO LTD , FATULA JR JOSEPH JOHN , DEYANOV ROUMEN ILIEV , GONZALEZ PABLO , CARLSON ROBERT , GREENE JOHN BROOKS , TZOU KEVIN
发明人： FATULA JR JOSEPH JOHN , DEYANOV ROUMEN ILIEV , GONZALEZ PABLO , CARLSON ROBERT , GREENE JOHN BROOKS , TZOU KEVIN
IPC分类号： H01L21/677 , B65G1/04 , B65G49/06 , B66C17/04
CPC分类号： H01L21/67733 , B66C1/663 , B66C11/06 , B66C17/04 , H01L21/67736 , H01L21/67769
摘要： A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.
摘要翻译：输送机构构造成在制造设备中的缓冲器内输送工件载体，包括：构造成在两个轨道上行进的运输机，其中所述运输机包括（i）平带传动机构，其构造成提升和降低一个或多个工件承载件，和（ii）构造成捕获并释放所述一个或多个工件承载件的夹持机构。

3. 发明申请

WO2009105724A9 VAO PRODUCTIVITY SUITE 审中-公开
标题翻译： VAO生产力套件
公开(公告)号：WO2009105724A9
公开(公告)日：2010-02-25
申请号：PCT/US2009034791
申请日：2009-02-20
申请人： MURATEC AUTOMATION CO LTD , SHIEH KARL , COOKSON MICHAEL A , RILEY NORMA B , WRIGHT DONALD REX , FATULA JOSEPH JOHN
发明人： SHIEH KARL , COOKSON MICHAEL A , RILEY NORMA B , WRIGHT DONALD REX , FATULA JOSEPH JOHN
IPC分类号： G06Q50/00 , G06F17/00 , G06F17/50 , G06F19/00
CPC分类号： G05B19/41885 , G05B2219/31334 , G05B2219/31466 , G05B2219/45031 , H01L21/67276 , Y02P90/16 , Y02P90/185 , Y02P90/26 , Y02P90/86
摘要： A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.
摘要翻译：半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。数据采集模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。

4. 发明专利

SG178170A1 BUFFERED STORAGE AND TRANSPORT DEVICE FOR TOOL UTILIZATION 未知
公开(公告)号：SG178170A1
公开(公告)日：2012-03-29
申请号：SG2012006524
申请日：2010-08-02
申请人： MURATEC AUTOMATION CO LTD
发明人： FATULA JR JOSEPH JOHN , DEYANOV ROUMEN ILIEV , GONZALEZ PABLO , CARLSON ROBERT , GREENE JOHN BROOKS , TZOU KEVIN
摘要： A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.

5. 发明专利

JP2012076893A Conveyance vehicle and conveyance system 有权
标题翻译：输送车辆和输送系统
公开(公告)号：JP2012076893A
公开(公告)日：2012-04-19
申请号：JP2010224734
申请日：2010-10-04
申请人： Muratec Automation Co Ltd , ムラテックオートメーション株式会社
发明人： ATAKE HIDEKAZU
IPC分类号： B66C13/12
摘要： PROBLEM TO BE SOLVED: To suitably transmit a signal to a holding part which holds an object to be conveyed in a conveyance vehicle.SOLUTION: The conveyance vehicle includes a plurality of first drums attached to one end side of a shaft 610 of a vertically moving section, a plurality of second drums attached to the other end side thereof, first belts 241, 243 which connect between the first drums and the holding part, second belts 242, 244 which connect between the second drums and the holding part, a transmission part of a vertically moving section side, a receiving part of a holding part side, a first core wire which is provided at either of the first belts, one end side of which is insulated from a shaft and the other end side of which is conducted with the receiving part of the holding part side and a second core wire which is provided at either of the second belts, one end side of which is conducted with the shaft and the other end side of which is conducted with the receiving part of the holding part side. One of the first and second core wires functions as a signal line and the other functions as a ground wire.
摘要翻译：要解决的问题：适当地将信号发送到保持传送车辆中待传送物体的保持部分。解决方案：输送车辆包括附接到垂直移动部分的轴610的一端侧的多个第一鼓，附接到其另一端侧的多个第二鼓，第一带241,243，其连接在连接在第二鼓和保持部之间的第一鼓和保持部，第二带242,244，垂直移动部侧的传递部，保持部一侧的容纳部，设置有第一芯线在其一端与轴绝缘的另一端侧与所述保持部一侧的接收部一起被传导的第一带中的任一个和设置在所述第二带中的任一个上的第二芯线，其一端与轴一起进行，另一端侧与保持部分侧的接收部分一起进行。第一和第二芯线中的一个用作信号线，另一个用作接地线。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2012015420A Gripper device of carrying vehicle, and carrying vehicle 有权
标题翻译：携带车辆的牵引装置，并携带车辆
公开(公告)号：JP2012015420A
公开(公告)日：2012-01-19
申请号：JP2010152414
申请日：2010-07-02
申请人： Muratec Automation Co Ltd , ムラテックオートメーション株式会社
发明人： KAWABATA MASAYASU
IPC分类号： H01L21/677 , B61B3/02 , B65G1/00 , B65G49/07
摘要： PROBLEM TO BE SOLVED: To decrease the need of repairing or maintenance for preventing dropping of a carried article, in a gripper device of a carrying device.SOLUTION: The gripper device of the carrying vehicle comprises a base plate (110), a guide rail (120) provided on an upper surface of the base plate, a pair of guide blocks (130) movably engaged in a generally horizontal direction so as to come close/separate to/from each other along the guide tail, a horizontal part (141) fixed on an upper surface of the guide block and extending along the upper surface of the base plate, a vertical part (142) extending from the horizontal part to a lower part than the base plate, and a pair of gripping portions (140) provided on a lower end side of the vertical part and respectively having claw portions (143) for gripping the carried article.
摘要翻译：要解决的问题：为了减少在携带装置的夹持装置中防止携带物品掉落的修理或维护的需要。解决方案：携带车辆的夹持装置包括基板（110），设置在基板上表面上的导轨（120），一对导向块（130），可移动地接合在大致水平方向，以沿着引导尾部彼此靠近/分离;固定在引导块的上表面上并沿着基板的上表面延伸的水平部分（141），垂直部分（142）从所述水平部分延伸到比所述基板的下部;以及一对夹持部分，其设置在所述垂直部分的下端侧上，并且分别具有用于夹持所携带物品的爪部分（143）。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2012015371A Mounting table of cassette for substrate 有权
标题翻译：基板安装台
公开(公告)号：JP2012015371A
公开(公告)日：2012-01-19
申请号：JP2010151215
申请日：2010-07-01
申请人： Muratec Automation Co Ltd , ムラテックオートメーション株式会社
发明人： TERATANI SHIGERU
IPC分类号： H01L21/677 , B65G49/05
摘要： PROBLEM TO BE SOLVED: To provide a mechanism which supports a large cassette for substrate on a mounting table and reduces vibration easily in a mounting table of a cassette for substrate such as a transfer device or a load port.SOLUTION: A mounting table 2 on which a cassette for substrate is mounted has a plurality of crosspieces 18 on the bottom surface thereof. A plurality of receiving bases 20 of the crosspieces 18 having a viscoelastic body are attached to the body of the mounting table 2, and the bottom surface of a cassette is supported by the receiving bases 20.
摘要翻译：要解决的问题：提供一种在安装台上支撑用于基板的大型盒的机构，并且在诸如传送装置或负载端口的基板的安装台中容易地减少振动。
解决方案：其上安装有用于基板的盒的安装台2在其底表面上具有多个挡条18。具有粘弹性体的挡条18的多个接收基座20安装在安装台2的主体上，并且盒的底面由接收基座20支撑。（C）2012年， JPO＆INPIT

8. 发明专利

JP2011173673A Carrier system 有权
标题翻译：载体系统
公开(公告)号：JP2011173673A
公开(公告)日：2011-09-08
申请号：JP2010038082
申请日：2010-02-24
申请人： Muratec Automation Co Ltd , ムラテックオートメーション株式会社
发明人： KAWAGUCHI MASATOMI
IPC分类号： B65G1/00 , B65G49/06 , H01L21/677
摘要： PROBLEM TO BE SOLVED: To enhance carrying efficiency of an article in a carrier system. SOLUTION: This carrier system is provided for carrying the article between a plurality of processing devices 2. The carrier system includes a track, a carrier 5 and a buffer 9. The track includes a plurality of loops 11 adjacent to the plurality of processing devices 2. The carrier 5 carries the article by traveling on the plurality of loops (for example, a first loop 11, a second loop and a third loop) by one-way travel. The buffer 9 includes a first placing base 85 and a second placing base 86 arranged in close vicinity to both side parts of the loops on the inside of the loops and juxtaposed in a row in the longitudinal direction of the loops. The first placing base 85 and the second placing base 86 include respectively a first opening part 85a opening toward one side of both side parts of the loops and a second opening part 86a opening toward the opposite side of both side parts of the loops. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提高载体系统中物品的承载效率。解决方案：该载体系统用于在多个处理装置2之间承载物品。载体系统包括轨道，载体5和缓冲器9.轨道包括与多个处理装置相邻的多个环11 处理装置2.载体5通过单向旅行在多个环路（例如，第一环路11，第二环路和第三环路）上行进来携带物品。缓冲器9包括第一放置基座85和第二放置基座86，该第一放置基座86和第二放置基座86布置成在环的内侧上的环的两侧部分附近并且在环的纵向方向上并排成并列。第一放置基座85和第二放置基座86分别包括朝向环的两侧部的一侧开口的第一开口部85a和朝向环的两侧部的相对侧开放的第二开口部86a。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2011006222A Storage 有权
标题翻译：存储
公开(公告)号：JP2011006222A
公开(公告)日：2011-01-13
申请号：JP2009152695
申请日：2009-06-26
申请人： Muratec Automation Co Ltd , ムラテックオートメーション株式会社
发明人： MURATA MASANAO , YAMAJI TAKASHI
IPC分类号： B65G1/00 , B65G1/14 , H01L21/673
CPC分类号： H01L21/67766 , B65G47/5181 , H01L21/67769
摘要： PROBLEM TO BE SOLVED: To efficiently perform continuous warehousing, in a storage.SOLUTION: This storage 20 includes a casing having the inside divided into a plurality of stages in the vertical direction and provided with an entrance capable of taking in and out a cargo 3, an inlet-outlet port adjacent to the entrance on the outside of the casing and capable of placing the cargo, an inside moving means 30 capable of moving the cargo in the horizontal one direction and the vertical direction in the casing, a shelf part displacing means 40 arranged in the casing so as to expand in the horizontal one direction in a plurality of respective stages and capable of integrally displacing mutually connected first and second shelves among a plurality of shelves 21, 23a and 23b respectively constituted so that the cargo moved by the inside moving means can be placed, between a first position where the first shelf is adjacent to the entrance and a second position where the second shelf is adjacent to the entrance, and outside-inside moving means 41a and 41b capable of horizontally moving the cargo via the entrance between the first shelf displaced to the first position or the second shelf displaced to the second position and the inlet-outlet port.
摘要翻译：要解决的问题：在存储器中有效地执行连续仓储。解决方案：该存储装置20包括壳体，其内部沿垂直方向分成多级，并设置有能够进出货物3的入口，与外壳外部的入口相邻并能够放置货物的入口 - 出口端口，能够沿着水平的一个方向和外壳中的垂直方向移动货物的内侧移动装置30，装置40，其布置在壳体中，以在多个相应的台阶中沿水平方向扩展，并且能够在分别构造成使货物移动的多个搁架21,23a和23b中整体地移位相互连接的第一和第二搁架内部移动装置可以放置在第一搁板与入口相邻的第一位置和第二搁板相邻的第二位置之间入口和外侧移动装置41a和41b，能够经由位于第一位置的第一货架或移动到第二位置的第二货架和入口 - 出口之间的入口水平移动货物。

10. 发明专利

JP2010080647A Storage cabinet and conveying system 审中-公开
标题翻译：储物柜和输送系统
公开(公告)号：JP2010080647A
公开(公告)日：2010-04-08
申请号：JP2008246701
申请日：2008-09-25
申请人： Muratec Automation Co Ltd , ムラテックオートメーション株式会社
发明人： ANDO MITSUHIRO
IPC分类号： H01L21/673 , B65G1/00
摘要： PROBLEM TO BE SOLVED: To provide a storage cabinet for storing and delivering cargos such as an FOUP (Front Opening Unified Pod) for storing, for example, various substrates for manufacturing semiconductor elements with a conveying vehicle such as OHT (Overhead Hoist Transport) efficiently by a simple configuration. SOLUTION: The storage cabinet (10) includes: a body unit whose inside is vertically divided in a plurality of stages, and which has entrances capable of taking out and putting in the cargos (3) at respective stages of the plurality of stages so that they are aligned in the vertical direction; a plurality of mounting parts (21) capable of mounting the cargos at the plurality of stages in the body unit and moving the cargos horizontally between the stages; a common storing and delivering port for the plurality of stages which vertically moves along the entrances at the plurality of states; a vertically moving means (12) that can vertically move the storing and delivering port; and an outside/inside moving means (16) for horizontally moving the cargos between the one mounting part adjacent to the entrance at the plurality of stages and the storing and delivering port moved to the position opposite to the mounting part. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于存储和输送货物的存储柜，例如用于存储例如用于制造半导体元件的各种基板的货物，例如用于制造半导体元件的输送车辆，例如OHT（架空葫芦运输）通过简单的配置有效。解决方案：存储柜（10）包括：主体单元，其内部以多级垂直分割，并且具有能够在多个阶段的各个阶段取出并放入托盘（3）的入口使它们在垂直方向上对齐; 多个安装部件（21），其能够将所述货物安装在所述主体单元中的所述多个阶段，并且将所述货物水平地移动在所述台架之间; 用于在多个状态下沿着入口垂直移动的多个级的通用存储和传送端口; 垂直移动装置（12），其能够垂直地移动储存和输送口; 以及用于在与多个台阶的入口相邻的一个安装部分和移动到与安装部件相对的位置的存储和输送口之间水平移动货物的外部/内部移动装置（16）。版权所有（C）2010，JPO＆INPIT

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