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    • 5. 发明专利
    • Vibration meter combining tuning fork and scanning probe
    • 振动台组合调音台和扫描探头
    • JP2010271297A
    • 2010-12-02
    • JP2009203603
    • 2009-09-03
    • Inha-Industry Partnership Instインハ インダストリー パートナーシップ インスティテュートInha−Industry Partnership Institute
    • LEE SEUNG GOLPARK KYOUNG-DUCKKIM DAE-CHAN
    • G01Q20/00G01Q30/14G01Q60/18G01Q60/22G01Q60/32G01Q60/38G01Q70/02
    • G01Q10/045
    • PROBLEM TO BE SOLVED: To control a precise distance between a needle end of a scanning probe and a sample surface with a scanning probe microscope or reduce a measurement time by dynamically controlling vibration characteristics of a tuning fork-scanning probe combined vibration meter, thereby expanding to ultraprecision measurement of a biological sample in a liquid. SOLUTION: The tuning fork-scanning probe combined vibration meter includes a tuning fork vibrated by application of an AC voltage; the scanning probe adhered to a negative side of the tuning fork and vibrated by the tuning fork; and a contact member coming into contact with a side of the scanning probe and changing a natural frequency of the tuning fork-scanning probe combined vibration meter by adjusting a position of a contact point with the scanning probe. Accordingly, the present invention is capable of minimizing an energy loss of the tuning fork-scanning probe combined vibration meter to maximize a Q-value of the tuning fork-scanning probe combined vibration meter by bringing the natural frequency of the tuning fork-scanning probe combined vibration meter close to the natural frequency of the tuning fork per se through a dynamic vibration control system by the contact member; controlling the Q-value actively regardless of a measuring sample environment; and measuring the sample in a high-viscosity liquid as well as the air at a high resolution. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:使用扫描探针显微镜控制扫描探针的针端和样品表面之间的精确距离,或通过动态控制音叉扫描探头组合振动计的振动特性来减少测量时间 从而扩展到液体中生物样品的超精密测量。

      解决方案:音叉扫描探头组合振动计包括通过施加交流电压而振动的音叉; 扫描探针粘附到音叉的负侧并由音叉振动; 以及接触构件与扫描探针的一侧接触,并且通过调节与扫描探针的接触点的位置来改变音叉扫描探头组合振动计的固有频率。 因此,本发明能够使音叉扫描探针组合式振动计的能量损失最小化,从而通过使音叉扫描探头的固有频率达到最大化音叉扫描探头组合振动计的Q值 组合振动仪通过接触构件通过动态振动控制系统接近音叉本身的固有频率; 无论测量样品环境如何,都可以积极地控制Q值; 并以高分辨率测量高粘度液体中的样品以及空气。 版权所有(C)2011,JPO&INPIT