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1. 发明专利

JPH1140099A ION COLLECTING ELECTRODE FOR TOTAL-PRESSURE COLLECTOR 失效
公开(公告)号：JPH1140099A
公开(公告)日：1999-02-12
申请号：JP7468598
申请日：1998-03-23
申请人： LEYBOLD INFICON INC
发明人： HOLKEBOER DAVID H , FREES LOUIS C
IPC分类号： G01N27/62 , H01J49/04 , H01J49/06
摘要： PROBLEM TO BE SOLVED: To provide a total-pressure collector that blocks the adverse effects of secondary electron currents liable to deteriorate the total performance of a mass spectrometer for detecting various types of ion, by directing secondary electrons away from an ion measuring device as used for a dual ion or other ion source. SOLUTION: A mass-spectrometer gas analysis device 1 includes an ion source 16 for producing ions of sample gas in a specified capacity. The first part of the ions produced is recovered and analyzed by an ion analyzer 18, which then determines a partial pressure on selected types of gas in the sample gas. The second part of the ions is recovered by an ion collector 22 on the other side, which then determines a total pressure on the sample gas. The collecting surface of the collector 22 is oriented in relation to incident ion beams for the recovery of ionic currents, and is designed to deflect the substantial part of plural secondary electrons generated by ion collisions as a result of the usage of the collector 22 way below the ionization capacity. The partial pressure is thus determined by the analyzer 18 receiving no secondary electrons.

2. 发明专利

JPH04233445A GAS SENSOR 失效
公开(公告)号：JPH04233445A
公开(公告)日：1992-08-21
申请号：JP21261791
申请日：1991-07-30
申请人： LEYBOLD INFICON INC
发明人： TONII SHII RII , TOOMASU EI SHIYUMITSUTOKONZU
IPC分类号： G01N27/12 , G01N27/62 , G01N31/00 , G01N33/00
摘要： PURPOSE: To provide a gas sensor capable of accurately detecting halogenated gas, especially, halogenated gas of every kind containing carbon hydrofluoride (HFC's) not destructing the ozone layer with high sensitivity, prolonged in its operation life and having a strong structure. CONSTITUTION: An anode 16, a cathode 14, the detection element 11 made of a ceramic inserted and arranged between both electrodes and selectively reacting with halogenated gas at an atmospheric temp. of 800 deg.C or higher, a heater power supply 18 setting the temp. of the detection element 11 to objective temp. and the ammeter 22 connected to the electric circuit connected across both electrodes 14, 16 and connected to a detection means for detecting the reaction with the halogenated gas of the detecting element 11 are provided.

3. 发明专利

JPH03221806A CONTROL CIRCUIT FOR EVAPORATION MONITOR 失效
公开(公告)号：JPH03221806A
公开(公告)日：1991-09-30
申请号：JP33346490
申请日：1990-11-29
申请人： LEYBOLD INFICON INC
发明人： KURARENSU HAADO
IPC分类号： G01B17/02 , C23C14/54 , G01B7/06 , G01R23/07 , G01R29/22
摘要： PURPOSE: To accurately control film thickness by, while connected to a signal generating means and a phase detection means, controlling a drive signal and a response signal and providing a control means which detects at least one resonance frequency. CONSTITUTION: Based on the frequency direction from a micro controller 33, a sine wave of accurate frequency and phase is formed at a digital synthesizer 35, and is supplied to a crystal 12 through a multiplier circuit 23. A reactance from the crystal 12 is, through amplification (25), sent to a phase detector 26. At the same time, a synthesized RF wave is supplied to the detector 26 as a reference signal, through a reference amplification limit magnetism 27. At the detector 26, phase shift is accurately measured. When the synthesized signal is scanned through a crystal resonance frequency, an intermittent signal is generated. At an output driver circuit 29, the phase signal which is sent to an A/D converter 37 as a voltage is adjusted. In the controller 33, a program is provided to control the frequency and phase of the synthesizer 35, and the crystal 12 is kept in oscillation wave mode.

4. 发明专利

JPH11172453A ACOUSTIC CONSUMPTION MONITOR 失效
公开(公告)号：JPH11172453A
公开(公告)日：1999-06-29
申请号：JP21456698
申请日：1998-07-29
申请人： LEYBOLD INFICON INC
发明人： GOGOL CARL A JR , WAJID ABDUL , RUBLOFF GARY
IPC分类号： G01N33/00 , C23C16/44 , C23C16/52 , G01N1/00 , G01N25/00 , G01N29/02
摘要： PROBLEM TO BE SOLVED: To determine discharged reacted and unreacted by-products, to quantitatively derive the reaction efficiency of a chemical vapor growth reactor and to continuously determine the growth rate and thickness of thin films by measuring the gaseous compsn. in the outlet of reactor and determining the reaction part ratio of a precursor material from the gaseous compsns. in the inlet and outlet of the reactor. SOLUTION: The carrier gas from a gas cylinder 20 passes through a mass flow rate controller 24, then through the precursor material in a foam box 22, picks up the precursor material and flows from a head gap 23. The dilute stream of the gas carried to the mass flow rate controller 24 by a parallel circuit is mixed with the gaseous stream and is introduced to the reactor 10 where the thin films are grown on a substrate 30. At this time, the gaseous mixture is passed through an acoustic cell 40 near the inlet port 16 of the reactor 10 and the compsn. is calculated. As a result, the compsn. of the gaseous mixture may be controlled. Simultaneously, the compsn. of the gas to be discharged is calculated by an acoustic cell 50 near the outlet port 18 of the reactor 10 and the reaction part ratio is determined from the compsns. of both gases.

5. 发明专利

JPH1080625A COMPOSITE MEMBRANE-BASE BODY ASSEMBLY 失效
公开(公告)号：JPH1080625A
公开(公告)日：1998-03-31
申请号：JP20357097
申请日：1997-07-29
申请人： LEYBOLD INFICON INC
发明人： WAMPLER III FRANCIS M
IPC分类号： B01D63/06 , B01D63/08 , B01D69/10 , B01D71/70 , B01L3/00 , G01N1/34 , H01J49/04
摘要： PROBLEM TO BE SOLVED: To obtain a membrane-supporting body assembly which does not produce pinholes at high operating temp. by assembling a semipermeable membrane, a fiber member which supports the semipermeable membrane, and a rigid punched member to support the membrane and the fiber supporting member. SOLUTION: This membrane-supporting body assembly consists of a circular sheet-type semipermeable membrane 3, a disk-type fiber member 4 which provides the semipermeable membrane 3 with auxiliary support, and a rigid punched member 1 to support the semipermeable membrane 3 and the fiber membrane 4. As for the auxiliary supporting member 4, a polyester fiber which is especially inactive polymer fiber is preferably used. The upper face of the punched member 1 has a circular region 2 having punched holes to form a square mesh pattern all over the rigid punched part 1. The semipermeable membrane 3 consists of a silicone polycarbonate copolymer containing 10 to 90wt.% silicone part.

6. 发明专利

JPH02307043A ANALYSIS SENSOR FOR GAS WITHIN VACUUM CHAMBER 失效
公开(公告)号：JPH02307043A
公开(公告)日：1990-12-20
申请号：JP25760989
申请日：1989-10-02
申请人： LEYBOLD INFICON INC
发明人： KAARU EI GOOGORU
IPC分类号： G01N21/62 , G01L21/00 , G01N23/225 , G01Q30/02 , G01Q30/12 , G01Q30/16
摘要： PURPOSE: To supply a gas component in a wide range of pressure without requiring a pressure lowering stage by leading a gas generated in a vacuum chamber to an optical excitation and analyzing part through a connection part. CONSTITUTION: An optical excitation and analyzing part comprises a shell, in other word a housing 12, having a neck 14 connected with a sputtering or a vacuum-evaporating chamber. The neck 14 is connected with the housing 12, a photodetector case 18 holds an exciting case 16 to be place on the neck, an electron gun 20, which is an electron beam generating apparatus, has a frame 22 on which a filament 24 to be heated for electron generation is extended. Then, electron beam excites atoms and molecules of a gas and emits photon with a specified wavelength. The photon passes through a window 35 constituting a part of a container of the photodetector case 18, passes along a route 34 for observation, and after passing a filter 40 installed in the route 34, the photon is led to a photomultiplier tube 38 and thus an electric signal proportional to the partial pressure of the gas is sent out.

7. 发明专利

JPH07167050A GAS ANALYZER 失效
公开(公告)号：JPH07167050A
公开(公告)日：1995-07-04
申请号：JP22161294
申请日：1994-09-16
申请人： LEYBOLD INFICON INC
发明人： GUNTAA FUOSU , SUTEFUAN JIEI DERUKA , GUREGORII ADAMUSU
IPC分类号： G01N27/62 , F04B37/02 , G01N30/72 , G01N30/88 , H01J41/18 , H01J49/04 , H01J49/24
摘要： PURPOSE: To achieve a substantially constant intake/exhaust speed throughout the life of absorptive material by providing a sampling means for introducing a gas sample into a vacuum chamber and a suction pump or the like which is connected to the vacuum chamber and which contains getter material and a diffusion barrier. CONSTITUTION: This gas analyzing system includes a portable analysis module 11 removably attached to a service module 12 and a mass spectrometer which isolates and analyzes various kinds of sample components transported into a vacuum chamber by a hydrogen carrier gas is enclosed in the analysis module 11. A vacuum chamber 13 fitted with a sorption pump is provided. A sample is trapped at a sample inlet 16 and fed into a gas chromatograph unit 17 and the outlet of the unit 17 is connected to the vacuum chamber 13 via an interface 19. The service module 12 has a battery recharging unit 25 connectable to a battery pack 22 in the analysis module 11, and includes a high vacuum pump 28 connectable to the vacuum chamber 13 by a disconnect valve 30.

8. 发明专利

JP2008122395A Signal processing method for monitoring particle in in-situ scanning beam 审中-公开
标题翻译：用于在现场扫描光束中监测颗粒的信号处理方法
公开(公告)号：JP2008122395A
公开(公告)日：2008-05-29
申请号：JP2007315198
申请日：2007-12-05
申请人： Inficon Inc , インフィコンインコーポレイティッド
发明人： BONIN MICHEL P , STIBBICH AARON , HOLVE DONALD J
IPC分类号： G01N15/00 , G01N15/14 , G01N15/02 , G01N15/06
CPC分类号： G01N15/0211 , G01N2015/0216
摘要： PROBLEM TO BE SOLVED: To provide a method of analyzing a pulse train generated as a result of particle monitoring in a scanning beam.
SOLUTION: The signal processing method enhances a signal-to-noise ratio, and remarkably reduces an erroneous alarm rate for the particle. A noise pulse not generated by a scanner frequency is filtered because executed in a time domain. This analysis further identifies a particle-pulse envelope (PPE) by performing forward-directional and backward-directional autocorrelations (S248, S249). Gaussian fitting is applied thereafter to the identified particle-pulse envelope, to measure a particle characteristic such as a size and a speed.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种分析在扫描光束中作为粒子监测的结果产生的脉冲序列的方法。解决方案：信号处理方法提高了信噪比，显着降低了粒子误报率。由扫描仪频率不产生的噪声脉冲由于在时域中执行而被滤波。该分析还通过执行正向和反向自相关来识别粒子脉冲包络（PPE）（S248，S249）。然后将高斯拟合应用于所识别的粒子脉冲包络，以测量诸如尺寸和速度的粒子特性。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JPH1131473A METHOD OF CORRECTING PARTIAL PRESSURE MEASUREMENT IN MASS SPECTROMETER 失效
公开(公告)号：JPH1131473A
公开(公告)日：1999-02-02
申请号：JP7468698
申请日：1998-03-23
申请人： LEYBOLD INFICON INC
发明人： HOLKEBOER DAVID H , ELLEFSON ROBERT E
IPC分类号： G01N27/62 , H01J49/02 , H01J49/26 , H01J49/42
摘要： PROBLEM TO BE SOLVED: To correction flow data over a wide range of gas pressure by measuring a partial pressure ion flow after deciding measurement full pressure, and using a correction factor, which is decided on the basis of the measurement full pressure ion flow, so as to correct the measurement partial pressure. SOLUTION: A full pressure collector 11 computes the full pressure of a gas mixture as a target, and the ion generated in an ion source 2 is filled as a focus beam into a quadrupole filter 6. In this case, rods, which are arranged opposite to the quadrupole filter 6, are electrically connected to each other, and the ion is directed in a direction in parallel with the longitudinal direction of the rods in a space between the electrodes, and separated by the lateral force generated by the electric potential, which is applied to the electrodes, in response to a ratio of mass to charge. The ion flow is transmitted to an ion detecting element 8, and the measured ion flow is related to the partial pressure (a partial pressure of a specified chemical component of the gas mixture), and a correction factor, which is decided on the basis of the full pressure ion flow, is used so as to correct the measurement partial pressure.

10. 发明专利

JPH1073574A ACOUSTIC CELL, ACOUSTIC SENSOR, AND METHOD FOR DECIDING COMPOSITION OF BINARY GAS 失效
公开(公告)号：JPH1073574A
公开(公告)日：1998-03-17
申请号：JP15705697
申请日：1997-06-13
申请人： LEYBOLD INFICON INC
发明人： WAJID ABDUL , HURD CLARENCE , HETZEL MELVIN C
IPC分类号： G01N29/09 , G01N29/00 , G01N29/02 , G01N29/036 , G01N29/22 , G01N29/16
摘要： PROBLEM TO BE SOLVED: To provide an acoustic sensor which has a small size, a high Q, and an operating frequency of 5kHz for deciding the composition of a binary gas with accuracy. SOLUTION: An acoustic cell 1 contains a plurality of acoustic cavities 11, 12, and 13 which are fluidly connected to each other and at least two of which have different lengths and cross-sectional areas. The end section segments of the cell 1 are formed in the same cylindrical or conical shape and a drive converter 30 at one end and a reception converter 40 at the other end are acoustically isolated from the cell 1. In a preferable state, a pair of metallic isolating diaphragms 20a and 20b transmit acoustic signals between the converters 30 and 40. The cell 1 operates as an acoustic resonator which operates at a frequency lower than the self-resonance frequencies the diaphragms 20a and 20b or converters 30 and 40 can have. When a binary gas is made to flow in the cell 1, a processing means detects the resonance frequency of the gas and decides the composition of the gas.

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