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1. 发明申请

WO2007035050A1 SPUTTERING DEPOSITION DEVICE 审中-公开
标题翻译：溅射沉积装置
公开(公告)号：WO2007035050A1
公开(公告)日：2007-03-29
申请号：PCT/KR2006/003759
申请日：2006-09-21
申请人： DOOSAN DND CO., LTD. , HWANG, Chang-Hun , KIM, Yong-Ki , WON, You-Tae
发明人： HWANG, Chang-Hun , KIM, Yong-Ki , WON, You-Tae
IPC分类号： H01L21/203
CPC分类号： C23C14/34 , H01J37/32623 , H01J37/34 , H01J37/3435 , H01J37/3447
摘要： Disclosed is a sputtering deposition device for depositing a thin film on a substrate. The sputtering deposition device comprises a substrate fixing part configured to fix a substrate; a target mounting member configured to mount a target and form an opening part on a front surface or a part of the top thereof; and a blocking shield provided on the top of the target mounting member. The present invention can minimize ion damage and heat damage of an organic thin film by blocking particles having strong energy and scanning the substrate in a horizontal direction.
摘要翻译：公开了一种用于在基板上沉积薄膜的溅射沉积设备。溅射沉积设备包括：基板固定部分，被构造为固定基板; 目标安装构件，所述目标安装构件构造成安装靶并且在其顶部的前表面或其一部分上形成开口部分; 以及设置在靶安装构件的顶部上的阻挡屏蔽件。本发明可以通过阻挡具有强能量的粒子并沿水平方向扫描衬底来使有机薄膜的离子损伤和热损伤最小化。

2. 发明专利

JP2005273014A Organic material deposition apparatus and deposition method 有权
标题翻译：有机材料沉积装置和沉积方法
公开(公告)号：JP2005273014A
公开(公告)日：2005-10-06
申请号：JP2005057937
申请日：2005-03-02
申请人： Doosan Dnd Co Ltd , ドーサン・ディーエヌディー・カンパニー・リミテッド
发明人： HWANG CHANG-HUN , LIM GUN-MOOK , WON YOU-TAE , NOH SOK-WON , KIM KWANG-HO , KANG TAEK-SANG , KIM SEUNG-HAN
IPC分类号： H05B33/10 , B05D7/24 , C23C14/12 , C23C14/24 , C23C14/50 , C23C14/56 , H01L51/50 , H05B33/14
CPC分类号： C23C14/12 , B05D1/60 , C23C14/50 , C23C14/56
摘要： PROBLEM TO BE SOLVED: To provide an organic material deposition apparatus and a deposition method where, for preventing the sagging of the central part in a substrate by gravity in a deposition process for the substrate, tensile force is applied to one side of the substrate in a state where both the sides thereof are fixed, thus the sagging phenomenon of the substrate can be prevented. SOLUTION: The organic material deposition apparatus comprises: a chamber 110 provided with an internal space isolated from the outside, and provided with an entrance to which a substrate is carried-in or carried-out on on side; a substrate loading stand 200 provided on the upper side in the chamber 10, fixing both the ends of the carried substrate by pressurizing force, respectively, moving one end in both the fixed ends of the substrate to the outside direction, and applying tensile force to the substrate so as to reduce the amount of the substrate to be sagged; a rotary elevation part 300 joined to the upper central part of the substrate loading stand 200 and allowing the substrate loading stand 200 to rotate or elevate; and a heating part 140 and an organic material boat 42 provided at the lower part in the chamber 110 and vaporizing the organic material, so as to be evaporated to the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种有机材料沉积装置和沉积方法，其中为了防止在基板的沉积工艺中重力下的基板中的中心部分的下垂，将张力施加到基板处于固定两侧的状态，能够防止基板的下垂现象。解决方案：有机材料沉积设备包括：室110，其设置有与外部隔离的内部空间，并且设置有入口，衬底在其上被携带或执行; 设置在室10的上侧的基板装载架200，分别通过加压力固定承载基板的两端，将基板的两个固定端的一端移动到外侧方向，并向基板，以减少待下垂的基板的量; 接合到基板装载台200的上部中心部并允许基板装载架200旋转或升高的旋转升降部分300; 以及设置在室110中的下部的加热部140和有机材料舟42，并蒸发有机材料，从而蒸发到基板上。版权所有（C）2006，JPO＆NCIPI

3. 发明申请

WO2007145402A1 SUBSTRATE ALIGNMENT APPARATUS AND METHOD FOR ALIGNING SUBSTRATE USING THE SAME 审中-公开
标题翻译：基板对准装置和使用该基板对准基板的方法
公开(公告)号：WO2007145402A1
公开(公告)日：2007-12-21
申请号：PCT/KR2006/004596
申请日：2006-11-06
申请人： DOOSAN DND CO., LTD. , LEE, Dae-Soo , KIM, Chae-Woong , LEE, Kyoung-Ook , YUK, Sim-Man , KIM, Jin-Hyeong
发明人： LEE, Dae-Soo , KIM, Chae-Woong , LEE, Kyoung-Ook , YUK, Sim-Man , KIM, Jin-Hyeong
IPC分类号： H05B33/10
CPC分类号： C23C14/042
摘要： Disclosed herein is an apparatus and method for aligning a substrate. The apparatus comprises a reference plate having a step formed at an edge of a lower surface, a clamp capable of lifting and lowering through the edge of the reference plate and having a lower end bent to allow a substrate to be loaded thereon, a mask frame holder to hold a frame having a metal mask coupled thereto, an alignment plate coupled to the mask frame holder and capable of lifting and lowering, and a fine alignment mechanism to finely align the substrate and the metal mask with each other. A sagging amount of a substrate can be reduced to such a level of 1/5 or less of that of a conventional apparatus. The apparatus further comprises magnets which penetrates the reference plate, allowing the substrate and the metal mask to be brought into close contact with each other.
摘要翻译：本文公开了一种用于对准衬底的装置和方法。该装置包括具有形成在下表面的边缘处的台阶的参考板，能够通过参考板的边缘升高和降低的夹具，并且具有弯曲以允许衬底被装载在其上的下端; 保持器以保持具有耦合到其上的金属掩模的框架，连接到掩模框架保持器并能够提升和降低的对准板以及精细对准机构以使基板和金属掩模彼此精细对准。基底的下垂量可以降低到常规装置的1/5以下的水平。该装置还包括穿透参考板的磁体，使得基板和金属掩模彼此紧密接触。

4. 发明申请

WO2007073072A1 MASK APPARATUS FOR DIVIDED DEPOSITION OF SUBSTRATE AND PATTERNING METHOD USING THE SAME 审中-公开
标题翻译：用于分层沉积底材的掩模设备及其使用方法
公开(公告)号：WO2007073072A1
公开(公告)日：2007-06-28
申请号：PCT/KR2006/005536
申请日：2006-12-18
申请人： DOOSAN DND CO., LTD. , KANG, Taek-Sang , LEE, Kyoung-Ook , LEE, Dae-Soo , KIM, Seung-Han
发明人： KANG, Taek-Sang , LEE, Kyoung-Ook , LEE, Dae-Soo , KIM, Seung-Han
IPC分类号： H05B33/10 , H01L21/027
CPC分类号： H01L51/0011 , C23C14/042
摘要： The present invention relates to a mask apparatus for divided deposition of a substrate and a patterning method using the same. With a mask apparatus for forming a pattern on a substrate according to the present invention, the substrate is imaginarily divided into two or more regions and the regions are sequentially patterned. Thus, there is an advantage in that technical and economical problems in manufacturing a large-sized mask can be avoided. In addition, since welding burrs do not come into contact with the substrate when the substrate is in close contact with the mask, the present invention has advantages in that it is possible to prevent damage to the substrate and to allow the substrate to be in closer contact with the mask.
摘要翻译：本发明涉及一种用于基板分割沉积的掩模装置和使用其的图案化方法。利用根据本发明的用于在基板上形成图案的掩模装置，基板被想象地分成两个或更多个区域，并且这些区域被顺序地图案化。因此，可以避免制造大尺寸面罩的技术和经济问题。此外，由于当基板与掩模紧密接触时焊接毛刺不与基板接触，所以本发明的优点在于可以防止对基板的损坏并使基板更靠近与面具接触。

5. 发明申请

WO2006057481A1 APPARATUS AND METHOD FOR HEATING GLASS 审中-公开
标题翻译：用于加热玻璃的装置和方法
公开(公告)号：WO2006057481A1
公开(公告)日：2006-06-01
申请号：PCT/KR2005/000247
申请日：2005-01-28
申请人： DOOSAN DND CO., LTD. , HWANG, Chang-Hun , KIM, Seung-Han , KIM, Do-Gon , KIM, Beom-Jae , BACK, Ju-Hyun
发明人： HWANG, Chang-Hun , KIM, Seung-Han , KIM, Do-Gon , KIM, Beom-Jae , BACK, Ju-Hyun
IPC分类号： H05B33/10
CPC分类号： C03C23/007 , F27B5/04 , F27B5/14
摘要： Apparatus and method for heating glass to perform drying and baking processes of a patterned thin film on the glass, and more particularly apparatus and method for heating glass to perform a drying process using a heating plate prepared in a lower portion of the inside of a chamber and provided with a hot wire wound therein and perform a baking process using a sheath heater prepared in an upper portion of the inside of the chamber. The apparatus includes a chamber, in which drying and baking processes of the glass are performed, including a first through hole formed through the central portion of the lower wall thereof and a plurality of second through holes formed through the lower wall thereof such that the second through holes are spaced from each other by a designated distance; a heating plate having a platy structure installed in a lower portion of the inside of the chamber, including a plurality of first pin holes formed through designated positions thereof perpendicularly to the second through holes, and supported by power supply means inserted from the outside of the chamber thereinto through the first through hole; a sheath heater having a platy structure installed in an upper portion of the inside of the chamber, and provided with a hot wire formed thereon in a designated pattern; reflecting means prepared along the inner side surface of the chamber and a virtual horizontal plane between the inner lower wall of the chamber and the heating plate, and including a plurality of second pin holes formed through the horizontal plane perpendicularly to the second through holes; a plurality of glass support pins passing through the second through holes and the first and second pin holes and vertically moving; and support pin ascending and descending means for vertically moving the glass support pins.
摘要翻译：玻璃的加热装置和方法，用于对玻璃上的图案化薄膜进行干燥和烘烤处理，特别是玻璃加热装置和方法，使用制备在室内的下部的加热板进行干燥处理并且设置有缠绕在其中的热丝，并且使用在室的内部的上部中制备的护套加热器进行烘烤处理。该装置包括一个室，其中执行玻璃的干燥和烘烤过程，包括通过其下壁的中心部分形成的第一通孔和穿过其下壁形成的多个第二通孔，使得第二通孔通孔彼此间隔一定距离; 具有安装在所述室的内部的下部的板状结构的加热板，所述加热板包括形成为与所述第二通孔垂直的指定位置形成的多个第一销孔，并且由从所述第二通孔的外部插入的供电装置支撑通过第一通孔; 护套加热器，其具有安装在所述腔室的内部的上部中的板状结构，并且设置有以指定图案形成在其上的热丝; 沿着室的内侧表面准备的反射装置和在室的内下壁和加热板之间的虚拟水平面，并且包括通过垂直于第二通孔的水平面形成的多个第二销孔; 多个玻璃支撑销穿过第二通孔和第一和第二销孔并垂直移动; 以及用于垂直移动玻璃支撑销的支撑销上升和下降装置。

6. 发明申请

WO2007078090A1 METHOD AND APPARATUS FOR ENCAPSULATING ORGANIC LIGHT EMITTING DIODES 审中-公开
标题翻译：用于封装有机发光二极管的方法和装置
公开(公告)号：WO2007078090A1
公开(公告)日：2007-07-12
申请号：PCT/KR2006/005782
申请日：2006-12-27
申请人： DOOSAN DND CO., LTD. , CHOI, Chang-Son , YOO, Hyug-Dong , KANG, Taek-Sang , KU, Bon-Yee
发明人： CHOI, Chang-Son , YOO, Hyug-Dong , KANG, Taek-Sang , KU, Bon-Yee
IPC分类号： H05B33/04
CPC分类号： H01L51/524 , H01L51/56
摘要： The present invention relates to a method and apparatus for encapsulating an organic light emitting diode. The encapsulating method for encapsulating a glass substrate with a cover according to the present invention comprises the steps of (a) carrying the glass substrate with an organic light emitting layer formed thereon and the cover with an adhesive made of an ultraviolet curable resin applied thereto and fixing the glass substrate and the cover to upper and lower stages, respectively; (b) causing the glass substrate and the cover to be brought into close contact with and primarily compressed toward each other by means of a relative movement between the upper and lower stages; and (c) secondarily compressing the glass substrate and the cover toward each other by means of a pressure difference produced by increasing pressure in the chamber in a state where the glass substrate and the cover are brought into close contact with each other. In particular, the step (b) is executed while the chamber is in a vacuum state, and the step (c) is executed by changing the chamber from the vacuum state to an atmospheric or positive pressure state.
摘要翻译：本发明涉及一种封装有机发光二极管的方法和装置。根据本发明的用于封装具有盖的玻璃基板的封装方法包括以下步骤：（a）在其上形成有机发光层的玻璃基板和用施加于其上的紫外线固化树脂制成的粘合剂的盖子，将玻璃基板和盖分别固定在上下台上; （b）通过上下台之间的相对移动使玻璃基板和盖子彼此紧密接触并且相互主要地彼此压缩; 和（c）在玻璃基板和盖彼此紧密接触的状态下，通过在室中增加压力而产生的压力差，将玻璃基板和盖板二次压缩。特别地，在室处于真空状态的同时执行步骤（b），并且通过将室从真空状态改变为大气压或正压状态来执行步骤（c）。

7. 发明申请

WO2007069865A1 CRUCIBLE ASSEMBLY FOR DEPOSITION OF ORGANIC THIN FILM 审中-公开
标题翻译：用于沉积有机薄膜的混凝土组件
公开(公告)号：WO2007069865A1
公开(公告)日：2007-06-21
申请号：PCT/KR2006/005490
申请日：2006-12-15
申请人： DOOSAN DND CO., LTD. , HAN, Seung-Jin , MOK, Jin-Il , KIM, Byung-Jin , SONG, Ha-Jin , KIM, Hae-Won , HWANG, Chang-Hun , KONG, Jong-Hwan , NAM, Seung-Hoon
发明人： HAN, Seung-Jin , MOK, Jin-Il , KIM, Byung-Jin , SONG, Ha-Jin , KIM, Hae-Won , HWANG, Chang-Hun , KONG, Jong-Hwan , NAM, Seung-Hoon
IPC分类号： H05B33/10
CPC分类号： C23C14/12 , C23C14/243
摘要： Disclosed is a crucible assembly for deposition of an organic thin film according to the present invention. The crucible assembly comprises a body for containing organic material for deposition of a thin film; a cap fastened to the upper part of the body and having a nozzle for scattering of the organic material in a vapor phase; and said nozzle being downwardly extended from the top of the cap. Accordingly, it is prevented that the molten organic material is escaped from the connections of the body and the cap, thereby causing the heating means including a heater and the walls of the crucible assembly to be contaminated. The baffles may be easily mounted or separated. The amount of the organic material wasted may be reduced by controlling the scattering anger and pattern of the organic material vapor. It is prevented that the deposition of the organic material is locally concentrated, e.g. at the center portion of the substrate.
摘要翻译：公开了根据本发明的用于沉积有机薄膜的坩埚组件。坩埚组件包括用于容纳用于沉积薄膜的有机材料的主体; 固定在主体的上部并具有用于在气相中散射有机材料的喷嘴的盖; 并且所述喷嘴从盖的顶部向下延伸。因此，防止熔融的有机材料从主体和盖的连接部脱出，从而使包括加热器的加热装置和坩埚组件的壁被污染。挡板可以容易地安装或分离。通过控制有机材料蒸气的散射怒气和图案，可以减少浪费的有机材料的量。防止有机材料的沉积局部浓缩，例如，在基板的中心部分。

8. 发明申请

WO2007035050B1 SPUTTERING DEPOSITION DEVICE 审中-公开
标题翻译：溅射沉积装置
公开(公告)号：WO2007035050B1
公开(公告)日：2007-06-14
申请号：PCT/KR2006003759
申请日：2006-09-21
申请人： DOOSAN DND CO LTD , HWANG CHANG-HUN , KIM YONG-KI , WON YOU-TAE
发明人： HWANG CHANG-HUN , KIM YONG-KI , WON YOU-TAE
IPC分类号： H01L21/203
CPC分类号： C23C14/34 , H01J37/32623 , H01J37/34 , H01J37/3435 , H01J37/3447
摘要： Disclosed is a sputtering deposition device for depositing a thin film on a substrate. The sputtering deposition device comprises a substrate fixing part configured to fix a substrate; a target mounting member configured to mount a target and form an opening part on a front surface or a part of the top thereof; and a blocking shield provided on the top of the target mounting member. The present invention can minimize ion damage and heat damage of an organic thin film by blocking particles having strong energy and scanning the substrate in a horizontal direction.
摘要翻译：公开了一种用于在基板上沉积薄膜的溅射沉积装置。溅射沉积装置包括：基板固定部，其构造成固定基板; 目标安装构件，其构造成安装目标并在其顶部的前表面或部分上形成开口部; 以及设置在目标安装构件的顶部上的阻挡屏蔽。本发明可以通过阻挡具有强大能量的颗粒并沿水平方向扫描基底来最小化有机薄膜的离子损伤和热损伤。

9. 发明申请

WO2007001100A1 MULTIPLE FLUID SUPPLYING APPARATUS FOR CARRIER OF SEMICONDUCTOR WAFER POLISHING SYSTEM 审中-公开
标题翻译：用于半导体波浪抛光系统载体的多种流体供应装置
公开(公告)号：WO2007001100A1
公开(公告)日：2007-01-04
申请号：PCT/KR2005/002021
申请日：2005-06-28
申请人： DOOSAN DND CO., LTD. , SEO, Sung-Bum
发明人： SEO, Sung-Bum
IPC分类号： H01L21/304
CPC分类号： B24B37/04 , B24B57/02
摘要： The present invention related to a multiple fluid supplying apparatus for carrier of semiconductor wafer polishing system which comprises a rotary union at a driving side and a rotary union at a following side. The rotary union at a driving side comprises a central rotation axle; a fluid supplying tube body being disposed coaxially with the central rotation axle, being fixedly supported, and being formed with a plurality of fluid paths at an inside thereof; a sealing housing being disposed coaxially on an outer circumference of the fluid supplying tube body so as to be rotatably supported; and a sealing unit for maintaining air-tightness between the fluid supplying tube body and the sealing housing. The rotary union at a following side comprises a central rotation axle; a sealing housing being disposed coaxially along a circumference of the central rotation axle, one end thereof being fixed to an inside of the spindle so as to support the central rotation axle to be rotated stably; and a sealing unit for maintaining air-tightness between the central rotation axle and the sealing housing. According to the present invention, 1) lowering sealing performance by a rolling phenomenon occurring between both ends of a central rotation axle when it rotates is prevented, 2) operational fluid is supplied smoothly to each carrier, and 3) high sealing performance is maintained while simplifying a contact portion between a rotational body and a non-rotational body into a single-layered sealing structure.
摘要翻译：本发明涉及一种用于半导体晶片抛光系统的载体的多流体供应装置，其包括在驱动侧的旋转接头和在后侧的旋转接头。驱动侧的旋转接头包括中心旋转轴; 与中心旋转轴同轴设置的流体供应管体，被固定地支撑，并且在其内部形成有多个流体路径; 密封壳体同轴地设置在流体供给管体的外周上，以便被可旋转地支撑; 以及密封单元，用于保持流体供应管体和密封壳体之间的气密性。后侧的旋转接头包括中心旋转轴; 密封壳体沿着中心旋转轴的圆周同轴设置，其一端固定到心轴的内侧，以便支撑中心旋转轴以稳定地旋转; 以及用于保持中心旋转轴和密封壳体之间的气密性的密封单元。根据本发明，1）通过防止在中心旋转轴的两端之间发生的滚动现象来降低密封性能，2）使工作流体平滑地供给到各个载体，3）保持高的密封性能，将旋转体和非旋转体之间的接触部分简化为单层密封结构。

10. 发明申请

WO2006041240A1 LARGE-SIZE OLED MANUFACTURING APPARATUS USING INK- JET PRINTING TECHNIQUES AND LOW MOLECULE THERMAL DEPOSITION TECHNIQUES 审中-公开
标题翻译：使用喷墨打印技术和低分子热沉积技术的大尺寸OLED制造设备
公开(公告)号：WO2006041240A1
公开(公告)日：2006-04-20
申请号：PCT/KR2005/000276
申请日：2005-01-31
申请人： DOOSAN DND CO., LTD. , HWANG, Chang-Hun , KIM, Do-Gon , KIM, Seung-Han
发明人： HWANG, Chang-Hun , KIM, Do-Gon , KIM, Seung-Han
IPC分类号： H05B33/10
CPC分类号： H01L21/67173 , H01L21/67207 , H01L21/67236 , H01L51/0005 , H01L51/56
摘要： An in-line OLED manufacturing apparatus, in which chambers used to manufacture OLEDs are connected in a line so that the OLEDs are manufactured under the condition that substrates moves linearly. In the in-line OLED manufacturing apparatus, a plurality of carrier chambers and a plurality of buffer chambers are alternately disposed in a line, a loading chamber and an unloading chamber are respectively disposed at the carrier chambers of both ends of the line, and process chambers for performing steps of a process for manufacturing OLED substrates are disposed at the respective carrier chambers.
摘要翻译：一种在线OLED制造装置，其中用于制造OLED的室连接成一行，使得在基板线性移动的条件下制造OLED。在线内OLED制造装置中，多个载体室和多个缓冲室交替地设置在管线中，装载室和卸载室分别设置在管线两端的载体室处，并且处理用于执行制造OLED基板的工艺步骤的室设置在相应的载体室处。

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