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    • 10. 发明授权
    • MOS-technology power device and process of making same
    • MOS技术功率器件及其制作工艺
    • US5874338A
    • 1999-02-23
    • US493149
    • 1995-06-21
    • Giuseppe FerlaFerruccio Frisina
    • Giuseppe FerlaFerruccio Frisina
    • H01L29/78H01L21/336H01L29/10H01L29/739
    • H01L29/66712H01L29/1095
    • A MOS-technology power device including a semiconductor material layer of a first conductivity type having a body region disposed therein. The body region includes a heavily doped region of a second conductivity type, a lightly doped region of the second conductivity type and a heavily doped region of the first conductivity type and a process of making same. A method of making the semiconductor device includes forming an insulated gate layer on portions of the surface of the semiconductor material layer to leave selected portions of the semiconductor material layer exposed. Ions of the second conductivity type are implanted into the selected regions of the semiconductor material layer. The implanted ions are thermally diffused to form body regions, each body region including a heavily doped region substantially aligned with the edges of the insulated gate layer, and a lightly doped region formed by lateral diffusion of the first dopant under the insulated gate layer. Ions of the first conductivity type are then implanted into the heavily doped regions to form source regions substantially aligned with the edges of the insulated gate layer.
    • 一种MOS技术的功率器件,包括具有设置在其中的体区的第一导电类型的半导体材料层。 体区包括第二导电类型的重掺杂区域,第二导电类型的轻掺杂区域和第一导电类型的重掺杂区域及其制造方法。 制造半导体器件的方法包括在半导体材料层的表面的部分上形成绝缘栅极层,以使半导体材料层的选定部分露出。 第二导电类型的离子注入到半导体材料层的选定区域中。 注入的离子热扩散以形成体区,每个体区包括基本上与绝缘栅层的边缘对准的重掺杂区,以及通过第一掺杂剂在绝缘栅层下方的横向扩散形成的轻掺杂区。 然后将第一导电类型的离子注入到重掺杂区域中以形成与绝缘栅极层的边缘基本对准的源极区域。