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1. 发明申请

WO2007015615A1 INSPECTION EQUIPMENT FOR FINE PATTERN AND MORPHOLOGY USING MICROCOLUMN 审中-公开
标题翻译：使用微波炉的精细图案和形态检查设备
公开(公告)号：WO2007015615A1
公开(公告)日：2007-02-08
申请号：PCT/KR2006/003010
申请日：2006-07-31
申请人： CEBT CO. LTD. , KIM, Ho Seob
发明人： KIM, Ho Seob
IPC分类号： G02F1/13
CPC分类号： G09G3/006 , G02F1/1303 , G02F1/1309 , G02F2001/136254 , G02F2203/69 , G09G3/3648 , H01J37/28 , H01J2237/2817
摘要： Inspection equipment using a microcolumn is disclosed. The inspection equipment of the present invention can conduct inspection of a fine circuit, which could not be conducted using conventional optical inspection equipment. Furthermore, the present invention can rapidly inspect a display, having a relatively large area, and can have a precise inspection function and a repair function. The inspection equipment of the present invention includes a plurality of microcolumns, a shaft, to which the microcolumns are coupled, and which is disposed in a direction perpendicular to a direction in which an object is moved, and a detector for detecting electron beams radiated from the microcolumns onto the object to determine whether errors exist in a circuit of the object.
摘要翻译：公开了使用微柱的检验设备。本发明的检查设备可以进行使用常规的光学检查设备不能进行的微细电路的检查。此外，本发明可以快速检查具有相对较大面积的显示器，并且可以具有精确的检查功能和修复功能。本发明的检查设备包括多个微柱，一个轴，微柱连接到该微柱上，并沿垂直于物体移动方向的方向设置，以及检测器，用于检测从将微柱放在物体上以确定物体的电路中是否存在误差。

2. 发明申请

WO2006129940A1 MICRO-COLUMN WITH SIMPLE STRUCTURE 审中-公开
标题翻译：具有简单结构的微柱
公开(公告)号：WO2006129940A1
公开(公告)日：2006-12-07
申请号：PCT/KR2006/002041
申请日：2006-05-29
申请人： CEBT CO. LTD. , KIM, Ho Seob , KIM, Byeng Jin
发明人： KIM, Ho Seob , KIM, Byeng Jin
IPC分类号： G02B3/00
CPC分类号： H01J3/18 , H01J3/26 , H01J37/12 , H01J2237/0492 , H01J2237/1205
摘要： The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.
摘要翻译：本发明涉及包括电子发射源和透镜的电子柱，更具体地说，涉及具有能够促进电子发射源和透镜的对准和组装的结构的电子柱。具有根据本发明的电子发射源和透镜单元的电子柱的特征在于，透镜单元包括两个或更多个透镜层，并且执行源透镜功能和聚焦功能。此外，电子柱的特征在于，透镜单元包括一个或多个偏转器型透镜层，并且另外执行偏转器功能。

3. 发明申请

WO2009014406A3 ELECTRON EMITTER HAVING NANO-STRUCTURE TIP AND ELECTRON COLUMN USING THE SAME 审中-公开
公开(公告)号：WO2009014406A3
公开(公告)日：2009-01-29
申请号：PCT/KR2008/004390
申请日：2008-07-28
申请人： CEBT CO. LTD. , KIM, Ho Seob
发明人： KIM, Ho Seob
IPC分类号： H01J1/304
摘要： The present invention relates to an electron emitter having a nanostructure tip and an electron column using the same, and, more particularly, to an electron emitter which includes a nanostructure tip which can easily emit electrons, composed of carbon nanotube (CNT), zinc oxide nanotube (ZnO nanotube), zinc oxide nanorod, zinc oxide nanopillar, zinc oxide nanowire, zinc oxide nanoparticle or the like, and an electron column using the same.

4. 发明申请

WO2008032971A1 LENS ASSEMBLY FOR ELECTRON COLUMN 审中-公开
标题翻译：电子管镜头组件
公开(公告)号：WO2008032971A1
公开(公告)日：2008-03-20
申请号：PCT/KR2007/004379
申请日：2007-09-10
申请人： CEBT CO. LTD. , KIM, Ho Seob
发明人： KIM, Ho Seob
IPC分类号： H01J37/141
CPC分类号： H01J37/12 , H01J37/04 , H01J2237/0203 , H01J2237/032 , H01J2237/038 , H01J2237/1205
摘要： The present invention relates to a lens assembly for an electron column and, more particularly, to a lens assembly that can prevent voltage or current, which is applied to any one of the lens layers of the electron column, from leaking to another layer.
摘要翻译：本发明涉及一种用于电子束的透镜组件，更具体地说，涉及可以防止施加到电子柱的任何一个透镜层的电压或电流泄漏到另一层的透镜组件。

5. 发明申请

WO2007066961A1 METHOD FOR FOCUSING ELECTRON BEAM IN ELECTRON COLUMN 审中-公开
标题翻译：电子束聚焦电子束的方法
公开(公告)号：WO2007066961A1
公开(公告)日：2007-06-14
申请号：PCT/KR2006/005214
申请日：2006-12-05
申请人： CEBT CO. LTD. , KIM, Ho Seob , AHN, Seung Joon , KIM, Dae Wook , KIM, Young Chul
发明人： KIM, Ho Seob , AHN, Seung Joon , KIM, Dae Wook , KIM, Young Chul
IPC分类号： H01J37/147
CPC分类号： H01J37/12 , B82Y10/00 , B82Y40/00 , H01J37/3174
摘要： The present invention relates to a method for improving focusing in an electron column that generates an electron beam. The method for controlling the focusing of an electron beam in according to the present invention reduces the spot size of the electron beam when the electron beam reaches a specimen, so that resolution can be increased and the line width of a pattern in a semiconductor lithography process can be reduced, with the result that the performance of the electron can be improved.
摘要翻译：本发明涉及一种改善产生电子束的电子束聚焦的方法。根据本发明的用于控制电子束的聚焦的方法当电子束到达样本时减小了电子束的光斑尺寸，从而可以提高分辨率，并且半导体光刻工艺中的图案的线宽可以减少，结果可以提高电子的性能。

6. 发明申请

WO2006025706A1 MOTIONING EQUIPMENT FOR ELECTRON COLUMN 审中-公开
标题翻译：电子管运动装置
公开(公告)号：WO2006025706A1
公开(公告)日：2006-03-09
申请号：PCT/KR2005/002905
申请日：2005-09-01
申请人： CEBT Co. Ltd. , KIM, Ho Seob , KIM, Byeng Jin
发明人： KIM, Ho Seob , KIM, Byeng Jin
IPC分类号： H01J37/04
CPC分类号： H01J37/04 , G11B7/261 , H01J2237/0245 , H01J2237/04924 , H01J2237/1205 , H01J2237/1503 , H01J2237/2817 , H01J2237/3175
摘要： Provided is motioning equipment which provides relative motion between electron column emitting electron beam and a sample on which the electron beam is irradiated. The motioning equipment includes multi-microcolumn for emitting electron beams on the sample, supports for supporting the multi-microcolumns, and driving means for driving the supports to move the multi-microcolumns.
摘要翻译：提供了提供电子束发射电子束与其上照射电子束的样品之间的相对运动的运动设备。运动设备包括用于在样品上发射电子束的多微柱，用于支撑多个微柱的支撑件，以及用于驱动支撑件移动多个微柱的驱动装置。

7. 发明申请

WO2008147112A1 AN ELECTRON COLUMN USING CNT-TIP AND METHOD FOR ALIGNMENT OF CNT-TIP 审中-公开
标题翻译：使用CNT-TIP的电子柱和用于对准CNT-TIP的方法
公开(公告)号：WO2008147112A1
公开(公告)日：2008-12-04
申请号：PCT/KR2008/002997
申请日：2008-05-28
申请人： CEBT CO. LTD. , KIM, Ho Seob
发明人： KIM, Ho Seob
IPC分类号： H01J1/30
CPC分类号： H01J37/073 , H01J1/14 , H01J1/304 , H01J9/025 , H01J2201/30469 , H01J2237/06341 , H01J2237/26
摘要： The present invention relates to an electron column using an electron emission source, to which one or more carbon nanotubes (CNTs) are attached, in an electron column structure including an electron emission source and lenses. More particularly, the present invention relates to a method of easily aligning a carbon nanotube (CNT) tip, and an electron column capable of using the method.
摘要翻译：本发明涉及一种使用电子发射源的电子柱，其中一个或多个碳纳米管（CNT）被附着在包括电子发射源和透镜的电子柱结构中。更具体地说，本发明涉及容易对准碳纳米管（CNT）尖端的方法和能够使用该方法的电子柱。

8. 发明申请

WO2007136214A1 DEFLECTION FIELD EMISSION DISPLAY 审中-公开
标题翻译：偏转场发射显示
公开(公告)号：WO2007136214A1
公开(公告)日：2007-11-29
申请号：PCT/KR2007/002468
申请日：2007-05-22
申请人： CEBT CO. LTD. , KIM, Ho Seob
发明人： KIM, Ho Seob
IPC分类号： H01J1/30
CPC分类号： H01J31/127
摘要： The present invention relates to a deflection FED, in which a beam deflection plate capable of deflecting electron beams is provided in the basic structure of the FED, thus deflecting respective electron beams in a predetermined direction, and a method of deflecting beams. An FED of the present invention includes a cathode plate (110) having field emitters for emitting electron beams, and a plate coated with fluorescent substances, with a small vacuum gap provided between the cathode plate (110) and the plate by spacers at a uniform interval. The FED further includes a deflection plate (150) interposed between the cathode plate and the plate coated with the fluorescent substances, and provided with deflection holes (151), arranged to correspond to tips of respective field emitters, and one or more electrodes arranged around each deflection hole, wherein the FED corrects a path of the electron beams.
摘要翻译：本发明涉及一种偏转FED，其中在FED的基本结构中提供能够偏转电子束的光束偏转板，从而沿预定方向偏转各个电子束，以及偏转光束的方法。本发明的FED包括具有用于发射电子束的场致发射体的阴极板（110）和涂有荧光物质的板，在阴极板（110）和板之间通过间隔件以均匀的方式设置有小的真空间隙间隔。 FED进一步包括设置在阴极板和涂有荧光物质的板之间的偏转板（150），并且设置有对应于各个场致发射体的尖端的偏转孔（151）和布置在其周围的一个或多个电极每个偏转孔，其中FED校正电子束的路径。

9. 发明申请

WO2007021163A1 DETECTOR FOR ELECTRON COLUMN AND METHOD FOR DETECTING ELECTRONS FOR ELECTRON COLUMN 审中-公开
标题翻译：电子探针检测器及检测电子束电子的方法
公开(公告)号：WO2007021163A1
公开(公告)日：2007-02-22
申请号：PCT/KR2006/003265
申请日：2006-08-18
申请人： CEBT CO. LTD. , KIM, Ho Seob
发明人： KIM, Ho Seob
IPC分类号： H01J37/26
CPC分类号： H01J37/244 , H01J2237/2444
摘要： In a conventional micro-channel plate (MCP), a secondary electron (SE) detector or a semi¬ conductor detector the number of the electrons is amplified through its own structure. For such amplification a small voltage difference is applied externally or generated due to its own structure and material. The electric current of electrons undergoing the above-described procedure is amplified by an external amplification circuit. In the present invention electrons - resulting from the collision of the electron beam generated by a microcolumn - are detected by surrounding conductive wiring. The detected electrons are amplified using an amplification circuit on the outside similar to a conventional detection method.
摘要翻译：在传统的微通道板（MCP）中，二次电子（SE）检测器或半导体检测器通过其自身的结构放大电子数。对于这种放大，由于其自身的结构和材料，外部施加小的电压差或产生。经过上述步骤的电子的电流被外部放大电路放大。在本发明中，由微柱产生的电子束的碰撞产生的电子被周围的导电布线检测。使用外部的放大电路来检测检测到的电子，与常规的检测方法类似。

10. 发明申请

WO2008140273A3 MAGNETIC DEFLECTOR FOR AN ELECTRON COLUMN 审中-公开
公开(公告)号：WO2008140273A3
公开(公告)日：2008-11-20
申请号：PCT/KR2008/002713
申请日：2008-05-15
申请人： CEBT CO. LTD. , KIM, Ho Seob , KIM, Young Chul
发明人： KIM, Ho Seob , KIM, Young Chul
IPC分类号： H01J37/147
摘要： The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).

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