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    • 9. 发明申请
    • FLOW-RATE SENSOR AND METHOD FOR MANUFACTURING THEREOF
    • 流量传感器及其制造方法
    • WO2009124875A1
    • 2009-10-15
    • PCT/EP2009/053940
    • 2009-04-02
    • CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA - RECHERCHE ET DEVELOPPEMENTSCHMID, NoaKNAPP, HelmutFRETZ, MarkAUERSWALD, Janko
    • SCHMID, NoaKNAPP, HelmutFRETZ, MarkAUERSWALD, Janko
    • G01F1/38G01F15/10
    • G01F1/383G01F15/10
    • The present invention discloses a flow-rate sensor adapted to measure the differential pressure between an inlet and an outlet of a main channel. In embodiments, the flow-rate sensor comprises a sensor channel, wherein the sensor channel comprises an upstream channel, a downstream channel and a sensor die employing a pressure-sensitive membrane having an upstream side and downstream face communicating with the upstream channel and the downstream channel of said sensor channel. In embodiments, thes main channel comprises an inlet channel, a flow-restriction channel and an outlet channel which are operatively connected to each other in series. The sensor channel is operatively connected in parallel to the main channel at an upstream junction and downstream junction such that the pressure-sensitive membrane is subjected to differential pressure between an upstream location and a downstream location with respect to the flow-restriction channel. Additional and alternative embodiments are disclosed and claimed.
    • 本发明公开了一种适于测量主通道的入口和出口之间的差压的流量传感器。 在实施例中,流量传感器包括传感器通道,其中传感器通道包括上游通道,下游通道和使用具有与上游通道和下游通道连通的上游侧和下游面的压敏膜的传感器管芯 所述传感器通道的通道。 在实施例中,主通道包括彼此可操作地串联连接的入口通道,流动限制通道和出口通道。 传感器通道在上游接头和下游接头处与主通道并行操作连接,使得压敏膜相对于流动限制通道在上游位置和下游位置之间经受差压。 公开和要求保护附加和替代实施例。