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1. 发明专利

JP2014060145A Electron microscope imaging system and method 审中-公开
标题翻译：电子显微镜成像系统及方法
公开(公告)号：JP2014060145A
公开(公告)日：2014-04-03
申请号：JP2013161759
申请日：2013-08-02
申请人： B-Nano Ltd , ビー−ナノリミテッド
发明人： DOV SHACHAL , RAFI DE PICCIOTTO
IPC分类号： H01J37/20 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a system in which electron microscope image is facilitated in a helium environment.SOLUTION: In an electron microscope 100, a volume part 116 capable of high helium concentration is provided in the vicinity of an optical axis 106 in the outside of a vacuum chamber 104, to which a helium supply assembly 110 selectably supplies helium during imaging. A sample 122 is supported by a stage 124 on the outside of the vacuum chamber 104 and can be carried into and carried out from the volume part 116 capable of high helium concentration by a translational moving assembly 124 during imaging.
摘要翻译：要解决的问题：提供一种在氦环境中电子显微镜图像有助于的系统。解决方案：在电子显微镜100中，在光轴106附近提供能够高氦浓度的体积部分116 在真空室104的外部，氦气供应组件110在成像期间可选择地供应氦。样品122由真空室104的外部的台124支撑，并且可以在成像期间由平移运动组件124承载并且能够由能够由平移运动组件124进行高氦浓度的容积部分116进行运送。

2. 发明专利

JP2010509709A Interface, how to observe the object in a non-vacuum environment, and scanning electron microscope 审中-公开
公开(公告)号：JP2010509709A
公开(公告)日：2010-03-25
申请号：JP2009534051
申请日：2007-10-23
申请人：ビー・ナノ・リミテッドB−NANO Ltd.
发明人：シャチャル，ドブ
IPC分类号： H01J37/18 , H01J37/252 , H01J37/28
CPC分类号： H01J37/285 , H01J37/06 , H01J37/20 , H01J37/28 , H01J37/301 , H01J2237/006 , H01J2237/0458 , H01J2237/15 , H01J2237/164 , H01J2237/182 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/28 , H01J2237/2801 , H01J2237/2806 , H01J2237/2807
摘要：インターフェース、走査型電子顕微鏡、および非真空環境内に配置される物体を観察する方法が提供される。本方法は、真空環境内で発生される少なくとも１つの電子ビームに、アパーチャ・アレイの中から少なくとも１つのアパーチャ、および少なくとも１つのアパーチャを密閉する少なくとも１つの超薄膜を通過させる段階であって、少なくとも１つの電子ビームが物体の方に向けられ、少なくとも１つの超薄膜が真空環境と非真空環境との間の圧力差に耐える段階と、少なくとも１つの電子ビームと物体との間の相互作用に応答して発生した粒子を検出する段階と、を含む。

3. 发明申请

WO2014128699A1 SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：WO2014128699A1
公开(公告)日：2014-08-28
申请号：PCT/IL2014/050175
申请日：2014-02-18
申请人： B-NANO LTD.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/04
CPC分类号： H01J37/18 , H01J37/244 , H01J37/28 , H01J2237/164 , H01J2237/188 , H01J2237/2002 , H01J2237/24445 , H01J2237/2605
摘要： A scanning electron microscope suitable for imaging samples in a non- vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.
摘要翻译：一种适用于在非真空环境中成像样品的扫描电子显微镜，扫描电子显微镜包括位于保持在真空下的外壳内的电子源，设置在外壳开口处的电子透过膜，分隔外壳内的环境，维持在真空和外壳外部的环境，其不被保持在真空下，电渗透膜不被电接地，并且至少一个非接地电极用作电子检测器。

4. 发明申请

WO2013183057A1 A SYSTEM AND METHOD FOR PERFORMING ANALYSIS OF MATERIALS IN A NON-VACUUM ENVIRONMENT USING AN ELECTRON MICROSCOPE 审中-公开
标题翻译：使用电子显微镜对非真空环境中的材料进行分析的系统和方法
公开(公告)号：WO2013183057A1
公开(公告)日：2013-12-12
申请号：PCT/IL2013/050489
申请日：2013-06-05
申请人： B-NANO LTD.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N21/47
CPC分类号： G01N23/2252 , G01N2223/309
摘要： A method for performing analysis of materials when present in a non- vacuum environment using an electron microscope, the method including generating first and second characteristic spectrum for a material by directing an electron beam from the electron microscope onto the material in respective first and second non-vacuum environments, in which respective first and second amounts of scattering of the electron beam takes place, collecting respective first and second X-rays emitted from the material and performing spectral analysis on the first and second X-rays, comparing the first and second characteristic spectra and noting peaks whose intensity increases with increased scattering, generating a scattering-compensated characteristic spectrum for the material from at least one of the first and second characteristic spectra by eliminating at least one peak whose intensity increases with increased scattering.
摘要翻译：一种当使用电子显微镜存在于非真空环境中时进行材料分析的方法，该方法包括通过将电子束从电子显微镜引导到相应的第一和第二非离子表面上的材料上来产生材料的第一和第二特征谱真空环境，其中发生电子束的相应的第一和第二量的散射，收集从材料发射的相应的第一和第二X射线，并对第一和第二X射线进行光谱分析，比较第一和第二X射线特征光谱和注意峰，其强度随着散射的增加而增加，通过消除其强度随着增加的散射而增加的至少一个峰，从而从第一和第二特征光谱中的至少一个产生材料的散射补偿特性光谱。

5. 发明申请

WO2010035265A1 A VACUUMED DEVICE AND A SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：真空设备和扫描电子显微镜
公开(公告)号：WO2010035265A1
公开(公告)日：2010-04-01
申请号：PCT/IL2009/000926
申请日：2009-09-24
申请人： B-NANO LTD. , SHACHAL, Dov , DE PICCIOTTO, Rafi
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J37/16 , H01J37/18 , H01J2237/0245 , H01J2237/164 , Y10T29/4973
摘要： A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.
摘要翻译：一种真空装置，包括：密封壳体，电子束源，电子光学部件，薄膜和检测器。薄膜密封密封外壳的孔。密封的壳体限定了真空保持的真空空间。电子束源被配置为产生在真空空间内传播的电子束，与电子光学部件相互作用并通过薄膜。密封壳体的第一部分被成形为适合保持在非真空环境中的非真空扫描电子显微镜部件限定的空间。

6. 发明申请

WO2008050321A3 AN INTERFACE, A METHOF FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE 审中-公开
公开(公告)号：WO2008050321A3
公开(公告)日：2008-05-02
申请号：PCT/IL2007/001265
申请日：2007-10-23
申请人： B-NANO Ltd. , SHACHAL, Dov
发明人： SHACHAL, Dov
IPC分类号： G01N23/00 , G21K7/00
摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

7. 发明专利

TW201411682A 電子顯微鏡成像系統及方法审中-公开
简体标题：电子显微镜成像系统及方法
公开(公告)号：TW201411682A
公开(公告)日：2014-03-16
申请号：TW102129794
申请日：2013-08-20
申请人： B 納諾有限公司 , B-NANO LTD.
发明人：沙哈爾道夫 , SHACHAL, DOV , 德皮喬托芮菲 , DE PICCIOTTO, RAFI
IPC分类号： H01J37/26 , H01L21/67
摘要：一種電子顯微鏡成像系統，包含一電子顯微鏡，具有一電子柱及一真空室，並具有一光軸；一氦氣供應組件，用於將氦氣選擇性地供應至該真空室外之光軸附近的一富含氦容積區；一樣品支撐平台，設置在該真空室外以支撐一樣品，該樣品利用該真空室外的電子顯微鏡進行成像，該樣品支撐平台包含一平移組件，操作該平移組件用以提供該樣品進出該富含氦容積區的相對平移。
简体摘要：一种电子显微镜成像系统，包含一电子显微镜，具有一电子柱及一真空室，并具有一光轴；一氦气供应组件，用于将氦气选择性地供应至该真空室外之光轴附近的一富含氦容积区；一样品支撑平台，设置在该真空室外以支撑一样品，该样品利用该真空室外的电子显微镜进行成像，该样品支撑平台包含一平移组件，操作该平移组件用以提供该样品进出该富含氦容积区的相对平移。

8. 发明公开

EP2959287A1 SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：EP2959287A1
公开(公告)日：2015-12-30
申请号：EP14754707.9
申请日：2014-02-18
申请人： B-Nano Ltd.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/04
CPC分类号： H01J37/18 , H01J37/244 , H01J37/28 , H01J2237/164 , H01J2237/188 , H01J2237/2002 , H01J2237/24445 , H01J2237/2605
摘要： A scanning electron microscope suitable for imaging samples in a non- vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

9. 发明公开

EP2329252A1 A VACUUMED DEVICE AND A SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：和真空设备以及电子显微镜
公开(公告)号：EP2329252A1
公开(公告)日：2011-06-08
申请号：EP09815770.4
申请日：2009-09-24
申请人： B-Nano Ltd.
发明人： SHACHAL, Dov , DE PICCIOTTO, Rafi
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J37/16 , H01J37/18 , H01J2237/0245 , H01J2237/164 , Y10T29/4973
摘要： A vacuumed device that includes: a sealed housing, an electron beam source, an electron optic component, a thin membrane, and a detector. The thin membrane seals an aperture of the sealed housing. The sealed housing defines a vacuumed space in which vacuum is maintained. The electron beam source is configured to generate an electron beam that propagates within the vacuumed space, interacts with the electron optic component and passes through the thin membrane. A first portion of the sealed housing is shaped to fit a space defined by non-vacuumed scanning electron microscope components that are maintained in a non-vacuum environment.

10. 发明授权

EP2080014B1 AN INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE 有权
标题翻译：表面上，一种用于监控一个目的是在非真空环境扫描电子显微镜
公开(公告)号：EP2080014B1
公开(公告)日：2016-08-31
申请号：EP07827239.0
申请日：2007-10-23
申请人： B-Nano Ltd.
发明人： SHACHAL, Dov
IPC分类号： H01J37/20 , H01J37/28 , H01J37/301
CPC分类号： H01J37/285 , H01J37/06 , H01J37/20 , H01J37/28 , H01J37/301 , H01J2237/006 , H01J2237/0458 , H01J2237/15 , H01J2237/164 , H01J2237/182 , H01J2237/2002 , H01J2237/2006 , H01J2237/2605 , H01J2237/28 , H01J2237/2801 , H01J2237/2806 , H01J2237/2807

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