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81. 发明专利

DE69031765T2 未知
公开(公告)号：DE69031765T2
公开(公告)日：1998-07-02
申请号：DE69031765
申请日：1990-01-12
申请人： HITACHI LTD
发明人： OSAKABE NOBUYUKI , TONOMURA AKIRA
IPC分类号： H01J37/22 , G01Q30/04 , H01J37/28 , H01J37/29
摘要： An apparatus forming a reflection electron hologram, wherein a fraction of an electron wave from an electron source (1) illuminate a specimen (5) and caused to be reflected thereat, the remaining electron wave does not illuminate the specimen, but passes aside, the specimen, and the electron wave reflected from the specimen and the electron wave not illuminating, but passes aside, the specimen, are superimposed one upon the other.

82. 发明专利

DE69031765D1 未知
公开(公告)号：DE69031765D1
公开(公告)日：1998-01-15
申请号：DE69031765
申请日：1990-01-12
申请人： HITACHI LTD
发明人： OSAKABE NOBUYUKI , TONOMURA AKIRA
IPC分类号： H01J37/22 , G01Q30/04 , H01J37/28 , H01J37/29
摘要： An apparatus forming a reflection electron hologram, wherein a fraction of an electron wave from an electron source (1) illuminate a specimen (5) and caused to be reflected thereat, the remaining electron wave does not illuminate the specimen, but passes aside, the specimen, and the electron wave reflected from the specimen and the electron wave not illuminating, but passes aside, the specimen, are superimposed one upon the other.

83. 发明专利

DE19647975A1 Reflection electron microscope 未知
公开(公告)号：DE19647975A1
公开(公告)日：1997-05-28
申请号：DE19647975
申请日：1996-11-20
申请人： FOCUS GMBH
发明人： GRZELAKOWSKI KRZYSTOPH DR
IPC分类号： H01J37/04 , H01J37/244 , H01J37/29
摘要： The microscope (1) has an electron source (14), an imaging system with at least one objective lens (4) and a projection lens (6,7) and a light screen (9) and/or an electron multiplier (8). An electron reflector (15) is positioned in the rear image plane (10) of the objective lens (4), or in the conjugal plane (12), for deflecting the primary beam (20) provided by the electron source onto the microscope sample (3). Pref. the electron deflector has a reflection point inserted in the beam path of the imaging system and provided by a single crystal or a polycrystalline material.

84. 发明专利

DE69211378D1 未知
公开(公告)号：DE69211378D1
公开(公告)日：1996-07-18
申请号：DE69211378
申请日：1992-02-17
申请人： SHIMADZU CORP
发明人： MARUI TAKAO
IPC分类号： H01J37/28 , G01Q30/02 , G01Q30/04 , H01J31/48 , H01J37/22 , H01J37/29 , H01J37/295 , H01J31/26
摘要： A scanning reflection electron diffraction microscope causes a primary electron beam (4) from its electron gun (2) to be reflectively diffracted from a sample (7) and a diffraction pattern to be formed on fluorescent screen (9). An optical lens (10) reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface (11), thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil (12) and a condenser coil (13), the image-carrying electron beam is detected by an electron-multiplier (15) such that a diffraction pattern is displayed on a cathode ray tube (19).

85. 发明专利

GB2230643B Electron microscope for investigation of surfaces of solid bodies 未知
公开(公告)号：GB2230643B
公开(公告)日：1993-10-27
申请号：GB9003080
申请日：1990-02-12
申请人： MAX PLANCK GESELLSCHAFT
发明人： LIEBL HELMUT , SENFTINGER BERTOLD
IPC分类号： H01J37/147 , H01J37/153 , H01J37/28 , H01J37/29 , H01J37/05 , H01J37/26
摘要： Electron microscope for investigation of surfaces of solid bodies with a primary beam path along which are arranged sequentially an electron beam source, an electron lens, an energy-selective electrostatic deflecting field, a magnetic deflecting field, a cathode lens, in whose object plane lies the test surface to be investigated, further with a secondary beam path, which passes in sequence through the cathode lens, the magnetic deflecting field, an energy filter, which includes a decelerating lens, a contrast stop, an electrical sector field, an energy stop and an accelerating lens, and two projection lenses, to a detector, such as a luminescent screen. The first-mentioned electrostatic deflecting field compensates for the energy dispersion of the magnetic deflecting field in the entrance side focal plane of the cathode lens. The energy filter limits the energy range of the electrons in the secondary beam path.

86. 发明专利

DE2235903C2 未知
公开(公告)号：DE2235903C2
公开(公告)日：1986-04-17
申请号：DE2235903
申请日：1972-07-21
申请人： NANOMETRICS INC., SUNNYVALE, CALIF., US
发明人： COATES, VINCENT JOHN, LOS ALTOS, CALIF., US , WELTER, LEONARD MELVIN, SARATOGA, CALIF., US
IPC分类号： G01Q70/06 , H01J37/073 , H01J37/09 , H01J37/18 , H01J37/248 , H01J37/29 , H01J37/28
摘要： A Field Emission Scanning Electron Microscope having a field emission tip for generating charged particles and being axially aligned with an electrode and with an intermediate electrode interposed there between. The electrode and the intermediate electrode forming a field lens for focusing the charged particles from the field emission tip. Appropriate voltages are applied for providing extraction, acceleration and focus fields. The electrode potential being lower than the intermediate electrode potential with respect to the charged particles and selected to provide a real focus of the charged particles at a position outside the lens field and distal of the field emission tip thereby producing an intense beam of low energy particles.

87. 发明专利

GB1558828A ION SCATTERING SPECTROMETER WITH TWO ANALYSERS IN TANDEM 未知
公开(公告)号：GB1558828A
公开(公告)日：1980-01-09
申请号：GB2659676
申请日：1976-06-25
申请人： MINNESOTA MINING & MFG
IPC分类号： G01N23/227 , G01N23/203 , G01Q30/02 , H01J49/00 , H01J49/44 , H01J37/29
摘要： Improved apparatus and method for measuring ions scattered from a surface, to thereby determine the mass of atoms at the surface. The apparatus includes two analyzers, preferably an energy analyzer and mass analyzer positioned in tandem. The mass analyzer may be tuned to pass only ions having the same mass as ions in an incident ion beam, and to reject sputtered ions, some of which may have the requisite energy to pass through the energy analyzer under a given set of conditions.

88. 发明专利

NL161297B 未知
公开(公告)号：NL161297B
公开(公告)日：1979-08-15
申请号：NL7108096
申请日：1971-06-14
申请人： AMERICAN OPTICAL CORP
IPC分类号： G01Q70/06 , H01J37/073 , H01J37/09 , H01J37/18 , H01J37/248 , H01J37/29 , H01J37/06 , H01J7/24 , H01J7/18
摘要： A Field Emission Scanning Electron Microscope having a field emission tip for generating charged particles and being axially aligned with an electrode and with an intermediate electrode interposed there between. The electrode and the intermediate electrode forming a field lens for focusing the charged particles from the field emission tip. Appropriate voltages are applied for providing extraction, acceleration and focus fields. The electrode potential being lower than the intermediate electrode potential with respect to the charged particles and selected to provide a real focus of the charged particles at a position outside the lens field and distal of the field emission tip thereby producing an intense beam of low energy particles.

89. 发明专利

DE1810665B2 未知
公开(公告)号：DE1810665B2
公开(公告)日：1978-03-23
申请号：DE1810665
申请日：1968-11-23
申请人： N.V. PHILIPS' GLOEILAMPENFABRIEKEN, EINDHOVEN (NIEDERLANDE)
发明人： POOLE, JAN BART LE, DELFT (NIEDERLANDE)
IPC分类号： H01J29/76 , H01J37/14 , H01J37/147 , H01J37/153 , H01J37/252 , H01J37/29
摘要： 1,246,152. Electron beam magnetic deflecting apparatus. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. 4 Dec., 1968 [7 Dec., 1967], No. 57568/68. Heading H1D. A magnetic mirror for an electron microscope or like apparatus comprises a pair of polepieces with generally conical faces adapted to produce a region of increased field strength gradient. Fig. 2 shows part of one polepiece which is in the form of a figure of revolution about the Z axis; the face of the polepiece generally follows the line 8 inclined at 6 degrees to the X axis, and is provided with a protuberance 10 which provides the increased gradient. An electron beam is injected parallel to the X axis in the X-Y plane (normal to the plane of Fig. 2) and is reflected at the region of the protuberance 10 as a diverging beam so that the arrangement acts as a diverging lens. In another arrangement, Fig. 5 (not shown), the protuberance is of stepped form instead of being rounded. In a further arrangement, Fig. 6 (not shown), each polepiece comprises three concentric members separated by non-magnetic gaps and each carrying its own coil winding, the middle coil being oppositely energized from the other two. The mirror may be used in an electron microscope (Fig. 7, not shown) comprising a electron gun (75) a condenser lens (76) an object lens (77) in which the object can be arranged, a projector lens (79), and the mirror (82) described above which reflects the beam to a luminescent screen (83) or to a photographic plate (84) arranged on either side of the projector lens, in accordance with the sense of the current through the mirror coils and of an auxiliary deflection means (81) arranged in front of the mirror. The targets (83, 84) may be arranged obliquely to the beam to correct distortion. In an application to an X- ray analyser (Fig. 8, not shown) a beam from an electron gun (90) is reflected by the mirror (93) to a concave electrostatic mirror (94) which focuses the beam on to a target (100) adjacent the magnetic mirror (93) to produce X-rays which are examined by a spectrograph.

90. 发明专利

DE1917065B2 未知
公开(公告)号：DE1917065B2
公开(公告)日：1978-02-09
申请号：DE1917065
申请日：1969-04-02
IPC分类号： H01J37/28 , H01J37/29
摘要： In scanning electron beam apparatus such as a scanning electron microscope or micro-analyser the scanning is done in at least three successive stages so that the angle of incidence of the beam on the specimen surface is constant during the scanning cycle. It can be varied at will and by rapid switching between two alternative angles and corresponding switching of the image-forming means, stereoscopic effects are obtainable.

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