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81. 发明专利

JPH0955184A FOURIER TRANSFORM MASS SPECTROGRAPH 失效
公开(公告)号：JPH0955184A
公开(公告)日：1997-02-25
申请号：JP20706195
申请日：1995-08-14
申请人： NIKKISO CO LTD
发明人： HONDA YOSHIHISA , TAKAKUWA YASUSHI , AOKI YOSHIAKI
IPC分类号： G01N27/62 , H01J49/08
摘要： PROBLEM TO BE SOLVED: To improve the availability factor of a Fourier transform mass spectrograph by providing a controller controlling the current flowing in an electron emitting filament on the mass spectrograph. SOLUTION: A sample gas is guided into an analyzer cell 2 from a feed pipe 44, and it is ionized by a filament 2b and the electron beam emitted toward a collector Q. Cyclotron resonance occurs on the ionized sample gas on the plane perpendicular to the magnetic field. An output signal is sent from a receiving electrode R in the analyzer cell 2 to an electronic circuit outside a vacuum chamber 11 by the cyclotron resonance. An electric signal is sent from a vacuum detector 33 in the vacuum chamber 11 to an external vacuum gauge 36, and the degree of vacuum is determined by the vacuum gauge 36. A degree of vacuum signal is sent from the vacuum gauge 36 to a comparator 38. The comparator 38 compares the degree of vacuum with the set value of the degree of vacuum stored in the comparator 38, turns a relay on when the degree of vacuum is the set value or below, and turns the relay off when the degree of vacuum is the set value or above. When the degree of vacuum becomes the set value or below, the relay in a controller cuts off the current of a filament 43.

82. 发明专利

JPH04112445A ELECTRONIC SPECTRAL ANALYZING DEVICE 失效
公开(公告)号：JPH04112445A
公开(公告)日：1992-04-14
申请号：JP23113490
申请日：1990-08-31
申请人： SHIMADZU CORP
发明人： SOEJIMA HIROYOSHI
IPC分类号： G01N23/225 , H01J49/08 , H01J49/44
摘要： PURPOSE:To observe, together with a photo-electron image of a specimen surface, a secondary electron or reflex electron image which represents the state of the specimen surface in the identical conditions with a higher resolution, by performing a scan with an electron beam in synchronization with scanning of photo-electron image on the specimen surface. CONSTITUTION:The output voltage from a voltage source of an energy analyzer 1 is set to an appropriate voltage which enables sensing of secondary electrons emitted by a specimen surface, and this surface is scanned with an electron beam (e), and now a secondary electron image of the specimen surface is obtained on a CRT 10. The specimen S is moved while watching this image for searching the place to be analyzed, and the place is brought to the center of view field of the CRT 10, and the surface is irradiated with X-rays. When irradiation with electron beam is stopped and the output voltage from the voltage source 14 of the energy analyzer is set to a voltage which provides sensibility for the photo-electrons of the element whose distribution is to be examined, an image to show distribution of the object element is given on the CRT 10. According to this constitution it is practicable to observe a photo-electron image and a secondary electron image, which are changed over at any desired time.

83. 发明专利

JPH0492399A HIGH FREQUENCY ELECTRON GUN 失效
公开(公告)号：JPH0492399A
公开(公告)日：1992-03-25
申请号：JP20730290
申请日：1990-08-04
申请人： MITSUBISHI ELECTRIC CORP
发明人： NISHIHARA SUSUMU
IPC分类号： H05H9/00 , H01J3/02 , H01J23/06 , H01J37/06 , H01J49/08
摘要： PURPOSE:To simplify a device as well as to make operations simpler with the effect of activities enhanced by controlling both electrons pulled out by a positive electric field and microwaves in phase so as to be put in the phase of a negative electric field, and thereby activating a cathode. CONSTITUTION:A high frequency electron gun 1 allows a microwave generating device 8 to generate microwaves within a high frequency cavity 6 by means of signals from a reference signal generator 10. In a phase shifting device 11, laser beams which are locked in mode by a laser beam generating device 9, are generated to the timing where these microwaves shall be in an accelerating phase for photo electrons to be generated later on. These laser beams are hit against a cathode 2 so that photo electrons are thereby generated, and these photo electrons are loaded on the accelerating phase of microwaves generated within the high frequency cavity 6 by the device 8 so as to be accelerated. When the cathode 2 is activated, generated electrons are pulled out by a positive electric field so as to be accelerated. These electrons go into the phase of a negative electric field because of change with time, they are decelerated, they are suspended, and they are finally accelerated to the reverse direction, so that electrons imparted with kinetic energy are hit against atoms in the cathode 2 so that the cathode 2 is thereby activated.

84. 发明专利

JPH03176957A SECONDARY ION ANALYZER 失效
公开(公告)号：JPH03176957A
公开(公告)日：1991-07-31
申请号：JP31595089
申请日：1989-12-05
申请人： JEOL LTD
发明人： KUDOU MASATO
IPC分类号： G01N23/225 , H01J49/08
摘要： PURPOSE:To obtain a sufficient neutralizing effect without providing an electron beam generating means in an analyzing means by radiating an electron beam to a sample holder or a secondary electron emitting member to generate secondary electrons during the ion radiation of a sample, and neutralizing the static electricity of the insulating sample. CONSTITUTION:An electron beam E and a secondary ion beam I pass passing holes 11, 12 of an electrode 10 respectively, the secondary ions generated from a sample 3 by the radiation of the beam I pass the electrode 10 and are analyzed by a secondary ion analyzing means. The electron beam E is deflected by a deflecting system incorporated in an electron beam generating means 7 to radiate a secondary electron emitting member 6, a large quantity of secondary electrons are generated by the member 6 and used to neutralize the charged sample 3. For Auger analysis, the electrode 10 is separated from the sample 3, the sample 3 is inclined clockwise, the angle between the normal line on the sample surface and the electron beam E is set to about 75 deg., for example, thus the quantity of secondary electrons is made equal to the quantity of the incident electron beam, and the static electricity on the sample 3 is prevented.

85. 实用新型

JPH0323652Y2 失效
公开(公告)号：JPH0323652Y2
公开(公告)日：1991-05-23
申请号：JP11409086
申请日：1986-07-25
IPC分类号： G01N1/28 , G01N23/22 , H01J37/20 , H01J49/08

86. 发明专利

JPH0381943A SECONDARY ION MASS SPECTROMETER 失效
公开(公告)号：JPH0381943A
公开(公告)日：1991-04-08
申请号：JP21734089
申请日：1989-08-25
申请人： HITACHI LTD
发明人： DOI HIROSHI , MAMADA MICHIRO
IPC分类号： H01J49/08 , H01J49/26 , H01L21/66
摘要： PURPOSE:To make identification and sensing of impurities in minute amount and measurement of compound and chemical bond condition while the surface of a specimen remains out of change, by irradiating the specimen with a primary electron beam and a primary ion beam emitted from respective charged particle sources either simultaneously or selectively, and preforming condition analysis of the secondary particles and mass spectrometry of the secondary ions. CONSTITUTION:Primary ion beam and/or a primary electron beam 2a, 2b emitted from a charged particle source 1a, 1b is turned into monochrome by a primary ion mass-spectrometer or a primary electron energy analyzer 3, respectively, and a specimen 6 is irradiated with this primary ion beam and/or primary electron beam 4. At this time, different secondary particles are emitted from the surface of the specimen 6. The secondary ions are subjected to mass separation by a mass spectral system M, and the elements constituting the surface of specimen can be identified. About the secondary electrons, an energy analyzing system N makes at the same time the identification of the elements and the energy condition of them can be known, which gives knowledge about the bond condition of element with other elements.

87. 实用新型

JPH0189453U 失效
公开(公告)号：JPH0189453U
公开(公告)日：1989-06-13
申请号：JP18529887
申请日：1987-12-04
IPC分类号： F16B43/00 , G01N27/00 , H01J37/04 , H01J49/08 , H01J49/10

88. 实用新型

JPS5945557U JPS5945557U - 失效
公开(公告)号：JPS5945557U
公开(公告)日：1984-03-26
申请号：JP14152382
申请日：1982-09-18
IPC分类号： G01N23/22 , G01N23/227 , H01J49/08 , H01J49/44

89. 发明专利

JPS5665433A INDIRECTLY HEATED CATHODE DEVICE 失效
公开(公告)号：JPS5665433A
公开(公告)日：1981-06-03
申请号：JP14067679
申请日：1979-10-31
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： KAGEYAMA KATSUO
IPC分类号： H01J49/08 , H01J1/20 , H01J49/10 , H05H1/22
摘要： PURPOSE:To heat a cathode by a desired power source voltage, by arranging close to the cathode a conductive winding which is electrically insulated from said cathode, suppying an alternating current to the winding to apply an AC magnetic field to the cathode, and heating the cathode by a current induced by the magnetic field. CONSTITUTION:A cathode heating portion 14 is constituted with an airtight container 21, a winding container 22, a conductive winding 23, an epoxy resin 24, a shielding plate 25 and a mounting member 26. The winding container 22, which is made of a ring-shoped paramagnetic stainless steel, has a rectangular cross-section, and in it, the conductive winding 23, which is subjected to a treatment for insulating its wound lines from each other and from the winding container 22, is contained. Then, each end of lead wires of the conductive winding 23 is led out respectively to the other end side of pipe arrangements 12a, 12b of the cooling water through current leading portion materials 16a, 16b, and an AC magnetic field is impressed on a cathode 13 by charging the conductive winding 23 with AC, thereby, the cathode 13 is heated by an induced current.

90. 发明专利

JP2019204721A 質量分析計における電子線源审中-公开
公开(公告)号：JP2019204721A
公开(公告)日：2019-11-28
申请号：JP2018100057
申请日：2018-05-24
申请人：岳石電気株式会社 , 株式会社リフトフォース
发明人：嶽石康昭 , 森幸一 , デンプシー,エドワード
IPC分类号： H01J49/10 , H01J49/08
摘要：【課題】腐食性ガス等による劣化を軽減させると共に、分析途中で発生するかもしれないフィラメントの断線等の不安要素を解消し、加えて熱電子の放出点を一定に保つことが可能な、質量分析の性能向上に寄与する質量分析計における電子線源を提供すること。【解決手段】電子線放射材料は焼結金属中に仕事関数の低い材料を含浸させるか又は金属に仕事関数の低い物質を含有させて焼結したチップ状電子線放射材料(40)の外表面の対向する部分に一対の支持兼導電部材(41,42)の一端を固着すると共に、該一対の支持兼導電部材の他端を一対の電極(31a,31b)に固着し、電極から支持兼導電部材を通ってチップ状電子線放射材料に通電して電子線放射材料を加熱する。【選択図】図3

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