专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

81. 发明申请

US20030110844A1 Force scanning probe microscope 失效
标题翻译：强力扫描探针显微镜
公开(公告)号：US20030110844A1
公开(公告)日：2003-06-19
申请号：US10006085
申请日：2001-12-06
申请人： Veeco Instruments Inc.
发明人： Jens Struckmeier , Doug Gotthard , Ben Ohler
IPC分类号： H02N002/04 , G01B007/34
CPC分类号： G01Q10/065 , G01Q60/42 , Y10S977/837 , Y10S977/85 , Y10S977/863 , Y10S977/869 , Y10S977/872 , Y10S977/881
摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.
摘要翻译：强力扫描探针显微镜（FSPM）和对样品进行力测量的相关方法包括具有支撑样品以使样品沿三个正交方向移动的表面的压电扫描器。 FSPM还包括位移传感器，其测量样品在与表面正交的方向上的运动，并产生相应的位置信号，以便提供闭环位置反馈。此外，相对于压电扫描器固定探针，而使用偏转检测装置来感测探针的偏转。 FSPM还包括基于位置信号产生扫描器驱动信号的控制器，并且适于根据在数据采集期间可以改变力曲线测量参数的用户定义的输入进行操作。

82. 发明申请

US20030089162A1 Dual stage instrument for scanning a specimen 审中-公开
标题翻译：用于扫描样品的双级仪器
公开(公告)号：US20030089162A1
公开(公告)日：2003-05-15
申请号：US10133510
申请日：2002-04-25
发明人： Amin Samsavar , William R. Wheeler , Steven G. Eaton
IPC分类号： G01B005/28
CPC分类号： G01Q10/04 , G01B3/008 , G01B7/34 , G01Q10/02 , G01Q30/02 , G01Q70/06 , Y10S977/834 , Y10S977/849 , Y10S977/852 , Y10S977/867 , Y10S977/868 , Y10S977/872 , Y10S977/874
摘要： A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The sensor is used to sense the parameter when both stages cause relative motion between the sensor assembly and the sample. The sensor may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing along scan at a coarser resolution and short scans a high resolution using the same probe tip or two probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.
摘要翻译：双级扫描仪器包括用于感测样品参数的传感器和用于引起传感器和样品之间的相对运动的粗细级和细级级的传感器。粗糙度分辨率约为1微米，细微分辨率为1纳米或更好。当传感器组件和样品之间产生相对运动时，传感器用于检测参数。传感器可用于在检测到高度变化的同时检测样品表面的高度变化以及热变化，静电，磁性，光反射率或光传输参数。通过以更粗糙的分辨率执行扫描，并且在固定的相对位置使用相同的探针尖端或两个探针尖端短扫描高分辨率，可以精确地相关联从长扫描和短扫描得到的数据。

83. 发明申请

US20030041669A1 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument 有权
标题翻译：用于基于探针的仪器的悬臂的超声致动的方法和装置
公开(公告)号：US20030041669A1
公开(公告)日：2003-03-06
申请号：US10096367
申请日：2002-03-12
发明人： F. Levent Degertekin , Abidin Guclu Onaran , Babur B. Hadimioglu
IPC分类号： G01B005/28 , G01D021/00
CPC分类号： G01Q30/14 , G01N29/0681 , G01N29/2456 , G01N29/346 , G01N2291/02827 , G01N2291/0427 , G01Q60/32 , G01S17/08 , Y10S977/872
摘要： The cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range.
摘要翻译：基于探针的计量仪器（例如AFM）的悬臂通过在悬臂处引导超声能量束来对悬臂施加超声产生的声辐射压力而被偏转。能量由诸如由诸如RF信号发生器的电源驱动的ZnO换能器的超声波致动器产生。透射光束优选地通过聚焦，准直等成形，使得其至少主要照射在诸如自由端的悬臂的感兴趣区域上。超声波致动器在悬臂上产生比通过使用传统的压电致动器可以实现的更好的控制力，并因此产生没有杂散效应的响应（至少当悬臂在液体中操作时）。它还具有MHz范围内的频率带宽。

84. 发明授权

US06509670B2 Single stage microactuator for multidimensional actuation with multi-folded spring 有权
公开(公告)号：US06509670B2
公开(公告)日：2003-01-21
申请号：US09904510
申请日：2001-07-16
申请人： Hee-moon Jeong , Jong Up Jeon
发明人： Hee-moon Jeong , Jong Up Jeon
IPC分类号： H02N100
CPC分类号： H02N1/008 , B82Y10/00 , G11B9/1418 , Y10S977/872
摘要： A single stage microactuator for multidimensional actuation is provided. The single stage microactuator includes a substrate, a fixed plate electrode, a rectangular stage, a plurality of drive frame parts each having a plurality of drive frames, first spring parts each having a plurality of spring members and a plurality of spring holding members, a plurality of fixed frame parts, drive comb electrodes, fixed comb electrodes, and second spring parts. The microactuator enables multidirectional actuation with only one electrode and can be manufactured by a simple process without a need for an insulation process and coupling of motions in different directions does not occur due to multi-folded spring structure.

85. 发明授权

US06470738B2 Rotating probe microscope 有权
标题翻译：旋转探针显微镜
公开(公告)号：US06470738B2
公开(公告)日：2002-10-29
申请号：US09573636
申请日：2000-05-17
申请人： Yoshihito Narita , Hideho Hisada , Tatsuya Miyajima , Osamu Saito , Shinichiro Watanabe , Shinya Saito , Koji Akutsu , Susumu Teruyama , Motoichi Ohtsu
发明人： Yoshihito Narita , Hideho Hisada , Tatsuya Miyajima , Osamu Saito , Shinichiro Watanabe , Shinya Saito , Koji Akutsu , Susumu Teruyama , Motoichi Ohtsu
IPC分类号： G02B2100
CPC分类号： G01Q70/12 , G01Q10/02 , G01Q10/06 , G01Q20/02 , G01Q20/04 , G01Q30/06 , G01Q60/22 , G01Q60/34 , G01Q60/38 , G01Q70/02 , Y10S977/851 , Y10S977/872
摘要： In a probe microscope 120 for causing a sample 112 and a tip portion 118a of a probe 118 on the sample side to approach each other, detecting an interaction between the sample 112 and the sample-side probe tip portion 118a, and obtaining surface information of the sample 112 from the interaction, the probe 118 being a flexible needle-like probe; the probe microscope 120 comprises vibrating means 122 capable of rotating the probe 118 while flexing the sample-side tip portion 118a thereof so as to draw a circle having a size corresponding to an increase and decrease in the interaction between the sample surface 112 and the tip portion 118a, and detecting means 124 for detecting the increase and decrease in the size of the circle drawn by the sample-side probe tip portion 118a due to the interaction and obtaining, from the increase and decrease in the size of the circle, information about the distance between the sample 112 and the sample-side probe tip portion 118a.
摘要翻译：在用于使试样一侧的探针118的试样112和前端部118a彼此靠近的探针显微镜120中，检测试样112与试样侧探针末端部118a的相互作用，得到表面信息来自相互作用的样品112，探针118是柔性针状探针; 探针显微镜120包括振动装置122，该振动装置122能够在使试样侧末端部分118a弯曲的同时使探针118旋转，以便画出具有与样品表面112和尖端之间的相互作用增加和减小的尺寸的圆部分118a和检测装置124，用于检测由于相互作用而由样本侧探针尖端部分118a画出的圆的尺寸的增加和减小，并且从圆形的尺寸的增加和减小中获得关于样品112和样品侧探针末端部分118a之间的距离。

86. 发明申请

US20020047493A1 Single stage microactuator for multidimensional actuation with multi-folded spring 有权
标题翻译：单级微型致动器，用于多折动弹簧的多维驱动
公开(公告)号：US20020047493A1
公开(公告)日：2002-04-25
申请号：US09904510
申请日：2001-07-16
发明人： Hee-moon Jeong , Jong Up Jeon
IPC分类号： H02N001/00
CPC分类号： H02N1/008 , B82Y10/00 , G11B9/1418 , Y10S977/872
摘要： A single stage microactuator for multidimensional actuation is provided. The single stage microactuator includes a substrate, a fixed plate electrode, a rectangular stage, a plurality of drive frame parts each having a plurality of drive frames, first spring parts each having a plurality of spring members and a plurality of spring holding members, a plurality of fixed frame parts, drive comb electrodes, fixed comb electrodes, and second spring parts. The microactuator enables multidirectional actuation with only one electrode and can be manufactured by a simple process without a need for an insulation process and coupling of motions in different directions does not occur due to multi-folded spring structure.
摘要翻译：提供了用于多维驱动的单级微型致动器。单级微型致动器包括基板，固定板电极，矩形台，具有多个驱动框架的多个驱动框架部件，每个具有多个弹簧部件的多个弹簧部件和多个弹簧保持部件，多个固定框架部件，驱动梳电极，固定梳电极和第二弹簧部件。该微致动器能够仅使用一个电极进行多向致动，并且可以通过简单的工艺制造而不需要绝缘工艺，并且由于多折叠的弹簧结构不会发生不同方向的运动的联接。

87. 发明授权

US06310342B1 Optical microscope stage for scanning probe microscope 失效
标题翻译：扫描探针显微镜的光学显微镜镜
公开(公告)号：US06310342B1
公开(公告)日：2001-10-30
申请号：US09128885
申请日：1998-08-04
申请人： David Braunstein , Michael Kirk , Quoc Ly , Thai Nguyen
发明人： David Braunstein , Michael Kirk , Quoc Ly , Thai Nguyen
IPC分类号： H01J3720
CPC分类号： G01Q10/04 , G01Q30/025 , Y10S977/849 , Y10S977/86 , Y10S977/868 , Y10S977/869 , Y10S977/87 , Y10S977/872 , Y10S977/873
摘要： Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.
摘要翻译：提供扫描探针显微镜和扫描探头，具有改进的光学可视化和样品操作能力。 SPM和SPM头包括用于在x，y和/或z方向扫描的至少一个弯曲台。在优选实施例中，SPM或SPM头包括用于在x，y和z方向扫描的挠曲台。 z扫描台优选地定位在x-y弯曲台的横向覆盖区的外侧，使得从z扫描台延伸的探针位于仪器的横向覆盖区之外。 SPM和SPM头被配置为提供样品和/或探针的自顶向下和从底部的光学视图，并且能够执行样品的同时扫描探针显微镜和光学成像。 SPM和SPM头设计为可以与现有的各种主要制造商现有的直立和倒置光学显微镜组合。

88. 发明授权

US06257053B1 Scanning probe microscope having piezoelectric member for controlling movement of probe 有权
标题翻译：具有用于控制探针运动的压电元件的扫描探针显微镜
公开(公告)号：US06257053B1
公开(公告)日：2001-07-10
申请号：US09337613
申请日：1999-06-21
申请人： Eisuke Tomita , Masato Iyoki , Masao Hasegawa
发明人： Eisuke Tomita , Masato Iyoki , Masao Hasegawa
IPC分类号： G01B528
CPC分类号： G01Q10/04 , G01Q70/02 , Y10S977/872
摘要： A scanning probe microscope comprises an elastic probe having a longitudinal axis and a probe tip. A vibration device has a piezoelectric vibrating member and an AC voltage generator for vibrating the probe tip relative to a surface of a sample. A vibration detecting device has a piezoelectric detecting member and a current/voltage amplifier circuit for detecting vibration of the probe tip. A probe holder supports the probe such that the probe is biased into pressure contact with the piezoelectric detecting member at an oblique angle relative to the longitudinal axis of the probe while the probe tip extends in a Z direction generally perpendicular to sample surface during vibration of the probe tip relative to the sample surface. A coarse movement mechanism effects coarse displacement of the probe tip in the Z direction to bring the probe tip close to the surface of the sample. A sample-to-probe distance control device has a fine displacement element and a servo circuit for effecting fine displacement of the probe tip in the Z direction. A two-dimensional scanning device has a fine displacement element and a scanning circuit for scanning the probe tip in X and Y directions to generate a measurement signal. A data processing device converts the measurement signal into a three-dimensional image.
摘要翻译：扫描探针显微镜包括具有纵轴和探针尖的弹性探针。振动装置具有压电振动部件和交流电压发生器，用于相对于样品的表面使探头尖端振动。振动检测装置具有用于检测探针尖端的振动的压电检测部件和电流/电压放大电路。探针支架支撑探针，使得探针与压电检测构件相对于探针的纵向轴线以倾斜的角度被偏置成压力接触，而探针尖端在Z方向大体垂直于样品表面的Z方向延伸，针头相对于样品表面。粗移动机构使探头尖端在Z方向上的粗移位使探头尖端靠近样品表面。采样探头距离控制装置具有精细位移元件和用于在Z方向上实现探针尖端精细位移的伺服电路。二维扫描装置具有精细位移元件和用于在X和Y方向扫描探针尖端的扫描电路以产生测量信号。数据处理装置将测量信号转换为三维图像。

89. 发明授权

US06201227B1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US06201227B1
公开(公告)日：2001-03-13
申请号：US09057349
申请日：1998-04-08
申请人： Eisuke Tomita
发明人： Eisuke Tomita
IPC分类号： G02B2740
CPC分类号： G01Q70/02 , G01Q30/10 , G01Q30/14 , G01Q60/22 , Y10S977/872
摘要： A scanning probe microscope comprises a probe extending in a Z direction, a piezoelectric vibrating body for vibrating the probe relative to a surface of a sample, and a vibration detecting device having a quartz oscillator for detecting the probe vibration. A biasing member biases the probe into pressure contact with the quartz oscillator of the vibration detecting device to integrally connect the probe to the quartz oscillator. A coarse displacement device effects coarse displacement of the probe in the Z direction. A fine displacement device effects fine displacement of the probe in the Z direction. A scanning device scans the probe in X and Y directions relative to the surface of the sample to generate a measurement signal. A data processing device converts the measurement signal into a three-dimensional image.
摘要翻译：扫描探针显微镜包括沿Z方向延伸的探针，用于使探针相对于样品表面振动的压电振动体，以及具有用于检测探针振动的石英振荡器的振动检测装置。偏置构件将探头偏置成与振动检测装置的石英振荡器压力接触，以将探针一体地连接到石英振荡器。粗位移装置在Z方向上实现探头的粗移位。精细位移装置可以在Z方向上实现探针的精细位移。扫描装置相对于样品的表面沿X和Y方向扫描探针以产生测量信号。数据处理装置将测量信号转换为三维图像。

90. 发明授权

US06185991B1 Method and apparatus for measuring mechanical and electrical characteristics of a surface using electrostatic force modulation microscopy which operates in contact mode 失效
标题翻译：使用在接触模式下操作的静电力调制显微镜来测量表面的机械和电学特性的方法和装置
公开(公告)号：US06185991B1
公开(公告)日：2001-02-13
申请号：US09024829
申请日：1998-02-17
申请人： Jaewan Hong , Sang-il Park , Zheong-Gu Khim
发明人： Jaewan Hong , Sang-il Park , Zheong-Gu Khim
IPC分类号： G01B734
CPC分类号： G01Q60/30 , Y10S977/849 , Y10S977/85 , Y10S977/851 , Y10S977/852 , Y10S977/863 , Y10S977/864 , Y10S977/872
摘要： A microscope uses electrostatic force modulation microscopy to measure mechanical and electrical characteristics of a sample. A tip contacts the sample while a voltage (which may have dc and ac components) is applied between the tip and sample. The tip oscillates even though the tip is contacting the sample due to strong electrostatic force interaction between the tip and sample. Different characteristics of the sample such as hardness, surface potential, capacitance, surface charge, and so forth, are measured by manipulating the oscillation of the tip relative to the sample and monitoring the position of the tip.
摘要翻译：显微镜使用静电力调制显微镜来测量样品的机械和电学特性。尖端接触样品，同时在尖端和样品之间施加电压（可能有直流和交流分量）。即使尖端与样品接触，尖端振动，因为尖端和样品之间的强静电力相互作用。通过操纵尖端相对于样品的振荡并监测尖端的位置来测量样品的不同特性，例如硬度，表面电位，电容，表面电荷等。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式