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    • 82. 发明申请
    • RESISTS
    • 抵抗
    • WO1991003770A1
    • 1991-03-21
    • PCT/GB1990001401
    • 1990-09-11
    • COATES BROTHERS PLCIVORY, Nicholas, Eric
    • COATES BROTHERS PLC
    • G03F07/16
    • G03F7/164H05K3/0079H05K2203/1105H05K2203/1355
    • In a process for the production of a patterned resist layer upon a substrate by the steps of: (i) forming a layer of radiation-sensitive material upon the substrate; (ii) imagewise exposing the layer of radiation-sensitive material to radiation to thereby cure portions of the layer exposed to the radiation; and (iii) removing uncured (unexposed) portions of the layer to form a patterned layer of cured material upon the substrate; the layer of radiation-sensitive material is formed upon the substrate by applying a layer of a powdered solid radiation-sensitive material to the substrate, heating the powdered material to cause it to melt or soften to form a continuous layer of radiation-sensitive material upon the substrate, and allowing the continuous layer to solidify.
    • 在通过以下步骤在衬底上生产图案化抗蚀剂层的方法中:(i)在衬底上形成辐射敏感材料层; (ii)将辐射敏感材料层成像曝光于辐射,从而固化暴露于辐射的层的部分; 和(iii)去除所述层的未固化(未曝光)部分以在所述基材上形成图案化的固化材料层; 通过将一层粉状固体辐射敏感材料施加到基底上,将辐射敏感材料层形成在基底上,加热粉末材料使其熔化或软化以形成连续的辐射敏感材料层 底物,并允许连续层固化。
    • 86. 发明申请
    • STACKED STRUCTURE AND METHOD OF MANUFACTURING THE SAME
    • 堆叠结构及其制造方法
    • US20120085573A1
    • 2012-04-12
    • US13377882
    • 2010-05-07
    • Hitoshi NoguchiNaoki TanakaTatsuya Nakamura
    • Hitoshi NoguchiNaoki TanakaTatsuya Nakamura
    • H05K1/16H05K3/10
    • H05K1/162H01G4/1209H01G4/30H01G4/33H05K2201/0195H05K2203/1355
    • A problem to be solved is to suppress deterioration of insulating properties in a stacked structure with a dielectric film formed by powder spraying coating process, and in a method of manufacturing the stacked structure. In a stacked structure according to the present invention, a dielectric layer 3 is provided between a first conductive layer 1 and a second conductive layer 2. The dielectric layer 3 includes an underlying layer 31 formed by applying a dispersion solution containing dielectric particles onto the first conductive layer 1, and a dielectric film 32 formed on the underlying layer 31 by powder spraying coating process. A method of manufacturing the stacked structure according to the present invention includes a dielectric layer forming step of forming the dielectric layer 3 on the first conductive layer 1, and a conductive layer forming step of forming the second conductive layer 2 on the dielectric layer 3. The dielectric layer forming step includes an underlying layer forming step of forming the underlying layer 31 by applying a dispersion solution containing dielectric particles onto the first conductive layer 1, and a dielectric film forming step of forming the dielectric film 32 on the underlying layer 31 by powder spraying coating process.
    • 要解决的问题是通过用粉末喷涂法形成的电介质膜来抑制层叠结构中的绝缘性的劣化,以及制造层叠结构的方法。 在根据本发明的堆叠结构中,电介质层3设置在第一导电层1和第二导电层2之间。电介质层3包括通过将包含电介质颗粒的分散溶液施加到第一导电层1上而形成的下层31 导电层1和通过粉末喷涂法在下层31上形成的电介质膜32。 根据本发明的制造叠层结构的方法包括在第一导电层1上形成电介质层3的介电层形成步骤和在电介质层3上形成第二导电层2的导电层形成步骤。 电介质层形成步骤包括通过将含有电介质颗粒的分散溶液施加到第一导电层1上形成下层31的下层形成步骤,以及电介质膜形成步骤,通过在第一导电层1上形成介电膜32在下层31上 粉末喷涂工艺。