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    • 83. 发明专利
    • Method for appointing orientation flat, apparatus for detecting orientation flat, and program for appointing orientation flat
    • 方位平面的方法,检测方向平面的装置,以及指定方向平面的程序
    • JP2010239060A
    • 2010-10-21
    • JP2009087695
    • 2009-03-31
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • ARAI KAORI
    • H01L21/68
    • H01L21/67265G01D5/342
    • PROBLEM TO BE SOLVED: To provide a method for appointing orientation flat surely appointing one of orientation flats of the same length as a reference orientation flat regardless of mixed presence of a plurality of orientation flats of the same length. SOLUTION: In the method for appointing orientation flat, a semiconductor wafer W is rotated to respectively detect three orientation flats 1, 2, 3, the length of each of three arcs 1, 2, 3 between three orientation flats 1, 2, 3 is obtained, and then the orientation flat on the right side of the arc 2 which is the longest in three arcs 1, 2, 3 is appointed as the reference orientation flat. Therefore, the reference orientation flat is surely appointed regardless of mixed presence of the arcs of the same length. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种用于指定定向平面的方法,无论多个相同长度的定向平面的混合存在,确定地指定与参考取向平面相同长度的取向平面中的一个。 解决方案:在用于指定取向平面的方法中,半导体晶片W旋转以分别检测三个取向平面1,2,3,三个取向平面1,2之间的三个圆弧1,2,3中的每一个的长度 ,3,然后将在三个圆弧1,2,3中最长的圆弧2的右侧的平面定向为基准取向平面。 因此,不管相同长度的弧的混合存在,可以确定地指定参考取向平面。 版权所有(C)2011,JPO&INPIT
    • 85. 发明专利
    • Method for monitoring moving linear textile formation and device for carrying out the method
    • 用于监测移动线性纺织品形成的方法和用于实施该方法的装置
    • JP2003073935A
    • 2003-03-12
    • JP2002162980
    • 2002-06-04
    • Rieter Cz Asリーター ツェーゼット アー.エス.
    • STUSAK MIROSLAV
    • B65H63/00D01H13/16D01H13/22D06H3/08G01B11/04G01B11/10G01D5/34
    • G01B11/043G01B11/105G01D5/342G01N21/8915
    • PROBLEM TO BE SOLVED: To provide a method for monitoring a moving linear textile formation highly accurately and always constantly during operation, and to provide a device for carrying out the method. SOLUTION: The monitoring of the moving linear textile formation (4) by an optical sensor (1) is carried out with a radiation intensity at which the radiation-sensitive measuring elements (10) of the optical sensor (1) are irradiated at least at the level of their saturation, thus permitting for the evaluation of the function of the optical sensor (1) a more exact division of the radiation- sensitive measuring elements (10) into those completely shadowed, those partly shadowed and partly irradiated, and those completely irradiated, with the ensuring more exact definition of the position of the delimitation lines of the moving linear textile formation (4) projected on the optical sensor (1), these delimitation lines being in more exact coincidence with the real state of the moving linear textile formation (4).
    • 要解决的问题:提供一种用于在操作期间高精度地并且始终不断地监测移动线性织物形成的方法,并且提供一种用于实施该方法的装置。 解决方案:通过光学传感器(1)对运动的线性纺织物形成(4)的监测是用辐射强度进行的,在该辐射强度下,光学传感器(1)的辐射敏感测量元件(10)至少照射 它们的饱和度水平,从而允许光学传感器(1)的功能的评估更准确地将辐射敏感的测量元件(10)划分成完全遮蔽的部分,部分被遮蔽和部分照射的那些,以及完全 照射,确保对投影在光学传感器(1)上的移动线性纺织品层(4)的划线的位置的更准确的定义,这些划线与运动的线性纺织品的实际状态更精确地一致 形成(4)。
    • 89. 发明申请
    • DETECTOR FOR DETERMINING A POSITION OF AT LEAST ONE OBJECT
    • 用于确定最少一个对象的位置的检测器
    • WO2015193804A3
    • 2016-05-12
    • PCT/IB2015054536
    • 2015-06-16
    • BASF SEBASF CHINA CO LTD
    • SEND ROBERTBRUDER INGMARIRLE STEPHANTHIEL ERWIN
    • G01C3/06
    • G06F3/0421G01D5/342G01N21/4795G06F3/0416G06F3/042G06F2203/04101
    • A detector (110) for determining a position of at least one object (112) with regard to at least one optical sensor (120) is proposed, wherein the optical sensor (120) has an image plane (122). The detector (110) comprises: at least one illumination source (134), wherein the illumination source (134) emits at least one light beam (136), wherein the light beam (136) comprises a component which is parallel to the image plane (122) of the optical sensor (120); the optical sensor (120), wherein the optical sensor (120) has a sensor region (126) in the image plane (122), wherein the optical sensor (120) is adapted to determine a transversal component of the position of the object (112) in an event where the object (112) approaches the optical sensor (120) in a manner that light is scattered from the component of the light beam (136) conducted parallel to the image plane (122) of the optical sensor (120), the transversal component of the position being a position in the image plane (122) of the optical sensor (120), the optical sensor (120) being adapted to generate at least one transversal sensor signal from the light scattered from the component of the light beam (136) conducted parallel to the image plane (122) of the optical sensor (120) in the sensor region (126), wherein the optical sensor (120) is further designed to generate at least one longitudinal sensor signal in a manner dependent on an illumination of the sensor region (126) by light which is scattered from the component of the light beam (136) conducted parallel to the image plane (122) of the optical sensor (120), wherein the longitudinal sensor signal is dependent on a variation of an intensity of the light is scattered from the component of the light beam (136) conducted parallel to the image plane (122) of the optical sensor (120) in the sensor region (126); and an evaluation device (132), wherein the evaluation device (132) is designed to generate at least one item of information on a transversal component of a position of the object (112) by evaluating the transversal sensor signal and wherein the evaluation device (132) is further designed to generate at least one item of information on a longitudinal component of a position of the object (112) by evaluating the longitudinal sensor signal.
    • 提出了一种用于确定关于至少一个光学传感器(120)的至少一个物体(112)的位置的检测器(110),其中所述光学传感器(120)具有图像平面(122)。 检测器(110)包括:至少一个照明源(134),其中照明源(134)发射至少一个光束(136),其中光束(136)包括平行于图像平面的部件 (122); 所述光学传感器(120),其中所述光学传感器(120)在所述图像平面(122)中具有传感器区域(126),其中所述光学传感器(120)适于确定所述物体的位置的横向分量( 在物体(112)以与光学传感器(120)的平面(122)平行的方式导引的光从光束(136)的分量散射的方式接近光学传感器(120)的情况下, ),所述位置的横向分量是所述光学传感器(120)的图像平面(122)中的位置,所述光学传感器(120)适于从从所述光学传感器(120)的分量散射的光中产生至少一个横向传感器信号 所述光束(136)平行于所述传感器区域(126)中的所述光学传感器(120)的图像平面(122)传导,其中所述光学传感器(120)进一步被设计成产生至少一个纵向传感器信号 取决于传感器区域(126)照明的方式 ght,其从与光学传感器(120)的图像平面(122)平行的光束(136)的分量散射,其中纵向传感器信号取决于光的强度的变化从 所述光束(136)的分量与所述传感器区域(126)中的所述光学传感器(120)的像面(122)平行地传导; 以及评估装置(132),其中所述评估装置(132)被设计成通过评估所述横向传感器信号来产生对象(112)的位置的横向分量的至少一项信息,并且其中所述评估装置 132)进一步设计成通过评估纵向传感器信号来产生关于物体(112)的位置的纵向分量的至少一个信息项。