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81. 发明授权

US11898601B2 Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method 有权
公开(公告)号：US11898601B2
公开(公告)日：2024-02-13
申请号：US17407778
申请日：2021-08-20
申请人： ASML NETHERLANDS B.V.
发明人： Siegfried Alexander Tromp , Antonie Hendrik Verweij , Abraham Alexander Soethoudt , Jan Pieter Van De Poel , Mark Constant Johannes Baggen
IPC分类号： F16C32/06 , H01L21/683 , F16C29/02 , G03F7/00 , G03F7/20
CPC分类号： F16C32/0611 , F16C29/025 , F16C32/0607 , G03F7/20 , G03F7/707 , G03F7/708 , H01L21/6831 , H01L21/6833
摘要： A support table for a lithographic apparatus, a method of loading a substrate, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localised build-up of pressure within the recess. The localized build-up of pressure provides a localised gas cushioning effect during the lowering of the substrate.

82. 发明授权

US11686346B2 Circumferential seal assembly with multi-axis stepped grooves 有权
公开(公告)号：US11686346B2
公开(公告)日：2023-06-27
申请号：US17712233
申请日：2022-04-04
申请人： Stein Seal Company
发明人： Glenn M. Garrison
IPC分类号： F16J15/40 , F16C32/06 , F01D11/04 , F01D25/22 , F16J15/44
CPC分类号： F16C32/0662 , F01D11/04 , F01D25/22 , F16C32/0607 , F16C32/0625 , F16J15/40 , F16J15/441 , F16J15/442 , F05D2250/75 , F16C2360/23
摘要： A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes side shoulders which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.

83. 发明申请

US20190078613A1 FOIL BEARING 审中-公开
公开(公告)号：US20190078613A1
公开(公告)日：2019-03-14
申请号：US15767671
申请日：2016-10-12
申请人： NTN CORPORATION
发明人： Masato YOSHINO
IPC分类号： F16C17/02 , F16C27/02
CPC分类号： F16C17/024 , F01D25/166 , F02C7/06 , F04D29/057 , F05D2240/54 , F16C27/02 , F16C32/0607 , F16C32/0633 , F16C33/1095 , F16C43/02 , F16C2240/60 , F16C2300/22 , F16C2300/54 , F16C2360/23 , F16C2360/24
摘要： Particles (23) are supplied to a bearing gap of a foil bearing. A step (24) is formed in a top foil portion (12a1), to thereby generate an air flow from both end portions (121 and 122) in a direction (N) along a surface of the top foil portion (12a1) and orthogonal to a rotation direction (R) of a shaft (6) toward a region between the both end portions.

84. 发明授权

US09970482B2 Circumferential back-to-back seal assembly with bifurcated flow 有权
公开(公告)号：US09970482B2
公开(公告)日：2018-05-15
申请号：US14845947
申请日：2015-09-04
申请人： Stein Seal Company
发明人： Glenn M. Garrison
IPC分类号： F16J15/40 , F16C32/06 , F16J15/44 , F01D11/04 , F01D25/22
CPC分类号： F16C32/0662 , F01D11/04 , F01D25/22 , F05D2250/75 , F16C32/0607 , F16C32/0625 , F16C2360/23 , F16J15/40 , F16J15/441 , F16J15/442
摘要： A circumferential seal assembly capable of separating a gas into two separate flow paths before communication between a rotatable runner and a pair of seal rings is presented. The seal assembly includes an annular seal housing, a pair of annular seal rings, a rotatable runner, and a plurality of groove structures. The seal housing is interposed between a pair of compartments. The seal rings are separately disposed within the seal housing and separately disposed around the rotatable runner. The groove structures are disposed along an outer annular surface of the rotatable runner. A gas is communicable onto the groove structures. Each groove structure includes at least two hydrodynamic grooves that separate and communicate the gas onto the seal rings. Each groove includes steps whereby the depth of at least one adjoining step decreases in the direction opposite to rotation with or without the depth of another adjoining steps increasing in the direction opposite to rotation.

85. 发明授权

US09933108B2 Table device and conveyance device 有权
公开(公告)号：US09933108B2
公开(公告)日：2018-04-03
申请号：US14902369
申请日：2013-12-18
申请人： NSK LTD.
发明人： Toshinori Satou
IPC分类号： F16C29/06 , F16M11/18 , F16C32/06 , H01L21/677 , G03F7/20 , F16M11/04
CPC分类号： F16M11/18 , F16C29/06 , F16C32/06 , F16C32/0607 , F16C2322/39 , F16M11/046 , F16M2200/047 , G03F7/70716 , G03F7/70816 , H01L21/67796
摘要： A table device including: a first member; a second member; a first guide device guiding the second member; a table supported by the second member; a first movable member connected to the table; a second movable member connected to the table; a first bearing member movably supporting the first movable member; a second bearing member movably supporting the second movable member; an actuator; and a gravity compensation device that includes a first supply portion supplying a gas to a first space facing the first movable member, a first adjustment portion adjusting an amount of the gas from the first supply portion, a second supply portion supplying a gas to a second space facing the second movable member, and a second adjustment portion adjusting an amount of the gas from the second supply portion, and can adjust a pressure in each of the first and second spaces.

86. 发明申请

US20180087573A1 Pressurized Gas Bearings for Rotating Machinery 审中-公开
公开(公告)号：US20180087573A1
公开(公告)日：2018-03-29
申请号：US15711442
申请日：2017-09-21
申请人： Radiant Physics Inc.
发明人： Victor Iannello , Christopher Sortore
IPC分类号： F16C32/06
CPC分类号： F16C32/0614 , F01D25/16 , F01D25/22 , F04D29/056 , F05D2240/51 , F05D2240/53 , F05D2240/54 , F16C32/0607 , F16C32/0681
摘要： Certain exemplary embodiments can provide a system, machine, device, manufacture, circuit, composition of matter, and/or user interface adapted for and/or resulting from, and/or a method and/or machine-readable medium comprising machine-implementable instructions for, activities that can comprise and/or relate to, positioning a rotating shaft within a machine via an externally-pressured gas bearing system.

87. 发明申请

US20170298752A1 GAS BEARING SEAL 审中-公开
公开(公告)号：US20170298752A1
公开(公告)日：2017-10-19
申请号：US15131154
申请日：2016-04-18
申请人： General Electric Company
发明人： Joshua Tyler Mook , Bugra Han Ertas , Jason Joseph Bellardi , Nathan Evan McCurdy Gibson
IPC分类号： F01D11/04 , F01D25/22 , F16J15/40 , F16C32/06 , F16J15/447 , F01D11/00 , F01D25/16
CPC分类号： F01D11/04 , F01D11/003 , F01D25/16 , F01D25/22 , F05D2220/32 , F05D2240/53 , F05D2240/55 , F05D2260/98 , F16C32/0607 , F16C32/0622 , F16C2360/23 , F16J15/40 , F16J15/447
摘要： A turbomachine includes a compressor section, a turbine section, and a rotary component. The rotary component is attached to and rotatable with a portion of at least one of the compressor section and the turbine section. The turbomachine additionally includes a seal having a gas bearing. The gas bearing defines an inner surface along a radial direction of the turbomachine, a high pressure end, and a low pressure end. The gas bearing supports the rotary component and also prevents an airflow from the high pressure end to the low pressure end between the rotary component and the inner surface of the gas bearing.

88. 发明申请

US20170169851A1 SPINDLE MOTOR 有权
公开(公告)号：US20170169851A1
公开(公告)日：2017-06-15
申请号：US15348262
申请日：2016-11-10
申请人： Nidec Corporation
发明人： Takeyuki SHUTO , Toshinari TAKEUCHI
IPC分类号： G11B19/20 , F16C33/72 , F16C32/06
CPC分类号： G11B19/2036 , F16C17/105 , F16C32/0607 , F16C33/72 , F16C33/74 , F16C41/005 , F16C2370/12
摘要： A bearing portion includes an upper dynamic pressure portion, a lower dynamic pressure portion, and an intra-bearing space defined between a lower surface of a fluid in the upper dynamic pressure portion and an upper surface of a fluid in the lower dynamic pressure portion, and not including the fluid. An airway defined in a shaft includes an inner opening arranged to be in communication with the intra-bearing space, and an outer opening arranged to be in communication with an extra-bearing space. Each of the inner and outer openings is defined in a side surface of the shaft. The extra-bearing space and the intra-bearing space are arranged to be in communication with each other through the airway. The airway is arranged to extend substantially in a straight line or lines, is angled with respect to a central axis, and has no other openings than the inner and outer openings. This contributes to preventing a gas inside of a housing from leaking out of the housing through the airway. In addition, since the airway is arranged to extend substantially in a straight line or lines to join the inner and outer openings to each other, the airway can be defined by a single process using a drill, an EDM, or the like.

89. 发明申请

US20170082144A1 ACTIVE AIRBEARING DEVICE 有权
公开(公告)号：US20170082144A1
公开(公告)日：2017-03-23
申请号：US15126537
申请日：2014-04-02
申请人： HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
发明人： Wei JIANG , Xuedong CHEN , Xin LUO , Lizhan ZENG
IPC分类号： F16C32/06 , F16C29/00
CPC分类号： F16C32/0607 , F16C29/00 , F16C29/025 , F16C32/0614 , F16C32/067 , F16C2233/00 , F16C2322/39
摘要： The present invention discloses an active airbearing device, including a airbearing body, a gas film active adjusting unit, a support body detection unit and a drive control unit, wherein the support body detection device measures a state of airbearing, the drive control system generates a control signal according to a detection signal, drives and controls the gas film active adjusting device to generate an active action, and dynamically adjusts the form of gas films on a airbearing surface, so as to dynamically adjust pressure distribution of gaps between the gas films of the airbearing device, thereby improving dynamic stiffness characteristics of the airbearing. Through the present invention, the dynamic stiffness characteristics of the airbearing can be improved significantly, and the purpose of stabilizing the airbearing is achieved; in addition, the active airbearing device according to the present invention also has the characteristics of a compact structure, convenient operation and control, and high precision, and thus is especially suitable for occasions such as ultra-precision machining or high speed spindle which has high requirements for dynamic stiffness of support.

90. 发明申请

US20160369938A1 TABLE DEVICE AND CONVEYANCE DEVICE 有权
标题翻译：表装置和输送装置
公开(公告)号：US20160369938A1
公开(公告)日：2016-12-22
申请号：US14902369
申请日：2013-12-18
申请人： NSK LTD.
发明人： Toshinori SATOU
IPC分类号： F16M11/18 , H01L21/677 , F16M11/04
CPC分类号： F16M11/18 , F16C29/06 , F16C32/06 , F16C32/0607 , F16C2322/39 , F16M11/046 , F16M2200/047 , G03F7/70716 , G03F7/70816 , H01L21/67796
摘要： A table device including: a first member; a second member; a first guide device guiding the second member; a table supported by the second member; a first movable member connected to the table; a second movable member connected to the table; a first bearing member movably supporting the first movable member; a second bearing member movably supporting the second movable member; an actuator; and a gravity compensation device that includes a first supply portion supplying a gas to a first space facing the first movable member, a first adjustment portion adjusting an amount of the gas from the first supply portion, a second supply portion supplying a gas to a second space facing the second movable member, and a second adjustment portion adjusting an amount of the gas from the second supply portion, and can adjust a pressure in each of the first and second spaces.
摘要翻译：一种桌子装置，包括：第一构件; 第二名成员引导第二构件的第一引导装置; 由第二个成员支持的表; 连接到桌子的第一可动构件; 连接到所述台的第二可动构件; 可移动地支撑所述第一可动构件的第一支承构件; 可移动地支撑所述第二可动构件的第二轴承构件; 执行机构以及重力补偿装置，其包括向面向所述第一可动构件的第一空间供给气体的第一供给部，调整来自所述第一供给部的气体量的第一调整部，向第二供给部供给气体的第二供给部以及第二调节部分，其调节来自第二供应部分的气体的量，并且可以调节第一和第二空间中的每一个中的压力。

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