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热词
    • 90. 发明授权
    • Piezoelectric or electrostrictive actuator
    • 压电或电致动器
    • EP2418086B1
    • 2013-11-27
    • EP11177065.7
    • 2011-08-10
    • NGK Insulators, Ltd.
    • Ebigase, Takashi
    • B41J2/14H01L41/09H01L41/053
    • H01L41/0533B41J2/14032H01L41/0973
    • Objective The present invention intends to provide a piezoelectric/electrostrictive actuator presenting excellent insulation durability even under high humidity atmosphere while suppressing inhibition of piezoelectric displacement. Means for Solution A piezoelectric/electrostrictive actuator (100), which comprises: a piezoelectric/electrostrictive element (90) that comprises at least one laminate including one piezoelectric/electrostrictive layer (40,60) and one pair of electrodes (30,50,70) disposed respectively on both sides of said piezoelectric/electrostrictive layer (40,60) and has a moving part corresponding to a portion where said piezoelectric/electrostrictive layer is sandwiched by one pair of said electrodes and a non-moving part corresponding to a portion where said piezoelectric/electrostrictive layer is not sandwiched by one pair of said electrodes, and a moistureproof membrane (80) disposed to cover at least the proximity of the boundary between said moving part and said non-moving part and consisting of silicone-based organic insulation material with storage elastic modulus of 100 kPa or less obtained by dynamic viscoelastic measurement using a parallel cone with diameter of 25 mm under a condition with strain of 0.1 %, frequency of 1 Hz, gap of 0.5 mm and temperature of 22 °C.