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    • 89. 发明申请
    • Plasma generating electrode and plasma reactor
    • 等离子体发生电极和等离子体反应器
    • US20060152133A1
    • 2006-07-13
    • US10562467
    • 2004-07-07
    • Yukio Miyairi
    • Yukio Miyairi
    • H01J63/04
    • B01D53/92B01D53/56B01D53/62B01J19/088B01J2219/0813B01J2219/0835B01J2219/0843B01J2219/0875F01N3/0892
    • A plasma generating electrode 1 of the present invention includes two or more electrodes 2 disposed to face each other, and holding members 3 for holding electrodes 2 at a predetermined interval, and can generate plasma by applying voltage between electrodes 2. At least one of electrodes facing each other 2 has a plate-shaped ceramic body 6 serving as a dielectric body, and a conductive film 7 disposed inside the body 6, and the holding members 3 fix the opposite side end portions 5 (fixed end portions 5a) of electrodes facing each other 2 in the state of a cantilever in such a condition that electrodes 2 are held by holding members in the state of cantilevers of the different directions alternately at a predetermined interval as a whole. This relaxes the thermal stress and effectively prevents distortion and breakage of electrodes caused by to a temperature change.
    • 本发明的等离子体产生电极1包括彼此相对设置的两个或更多个电极2和用于以预定间隔保持电极2的保持构件3,并且可以通过在电极2之间施加电压来产生等离子体。 彼此面对的电极中的至少一个2具有用作电介质体的板状陶瓷体6和设置在主体6内部的导电膜7,并且保持构件3固定相对侧端部5(固定端部 如图5A所示,在悬臂状态下,电极2以由不同方向的悬臂状态的保持构件整体以预定的间隔交替地保持的状态保持悬臂的状态。 这样放松了热应力,并有效地防止了由温度变化引起的电极的变形和断裂。