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81. 发明申请

US20060093547A1 Process for treating fluorine compound-containing gas 审中-公开
标题翻译：含氟化合物气体处理方法
公开(公告)号：US20060093547A1
公开(公告)日：2006-05-04
申请号：US11294376
申请日：2005-12-06
申请人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
发明人： Shuichi Kanno , Toshiaki Arato , Shinzo Ikeda , Ken Yasuda , Hisao Yamashita , Shigeru Azuhata , Shin Tamata , Kazuyoshi Irie
IPC分类号： C01B7/19
CPC分类号： A62D3/20 , A62D2101/22 , A62D2101/49 , B01D53/8659 , B01D53/8662 , B01D53/8671 , B01D2255/2092 , B01D2257/204 , B01D2258/0216 , C01B7/191 , Y02C20/30
摘要： A gas stream containing at least one fluorine compound selected from the group consisting of compounds of carbon and fluorine, compounds of carbon, hydrogen and fluorine, compounds of sulfur and fluorine, compounds of nitrogen and fluorine and compounds of carbon, hydrogen, oxygen and fluorine is contacted with a catalyst comprising at least one of alumina, titania, zirconia and silica, preferably a catalyst comprising alumina and at least one of nickel oxide, zinc oxide and titania in the presence of steam, thereby hydrolyzing the fluorine compound at a relatively low temperature, e.g. 200.degree.-800° C., to convert the fluorine of the fluorine compound to hydrogen fluoride.
摘要翻译：含有选自碳和氟的化合物，碳，氢和氟的化合物，硫和氟的化合物，氮和氟的化合物，碳，氢，氧和氟的化合物的至少一种氟化合物的气流与包含氧化铝，二氧化钛，氧化锆和二氧化硅中的至少一种的催化剂接触，优选在蒸汽存在下包含氧化铝和氧化镍，氧化锌和二氧化钛中的至少一种的催化剂，从而以相对低的水解水解氟化合物温度，例如将该氟化合物的氟转化成氟化氢。

82. 发明申请

US20060013745A1 Enhanced PFC waste-gas treating system 审中-公开
标题翻译：增强型PFC废气处理系统
公开(公告)号：US20060013745A1
公开(公告)日：2006-01-19
申请号：US10892184
申请日：2004-07-16
申请人： Yi-Rong Chen
发明人： Yi-Rong Chen
IPC分类号： B01D53/34 , B01D50/00
CPC分类号： B01D53/8659 , B01D53/8662 , B01D2257/2027 , B01D2257/2047 , B01D2257/2066 , Y02C20/30
摘要： The waste-gas treating system is designed for treating the waste gas created in general semiconductor processing in production; the waste-gas treating system mainly is provided at one side of a waste-gas treating equipment, and contains therein mainly a condensing tube, a catalyst treating unit, a water treating unit and water collecting tanks; the catalyst treating unit decomposes toxic gases such as per-fluorine compound (PFC) etc. that are remained in the waste-gas treating equipment and are unable to be dealt with to thereby form non-toxic gases, and does water treating on the byproduct from dissociation, thus a function of lowering temperature can be acquired, then the gases are exhausted to the atmosphere to perform secondarily treating to reduce the content of PFC in the atmosphere and to reduce damage of the hothouse effect.
摘要翻译：废气处理系统设计用于处理生产中通常的半导体加工产生的废气; 废气处理系统主要设置在废气处理设备的一侧，主要包括冷凝管，催化剂处理单元，水处理单元和集水箱; 催化剂处理单元分解残留在废气处理设备中的无氟化合物（PFC）等有毒气体，不能处理，从而形成无毒气体，并对副产物进行水处理从解离出来，可以获得降低温度的功能，然后将气体排放到大气中进行二次处理以降低大气中PFC的含量并减少温室效应的损害。

83. 发明授权

US06764666B2 Process for treating gas containing fluorine-containing compounds and CO 有权
标题翻译：含氟化合物和CO的气体处理方法
公开(公告)号：US06764666B2
公开(公告)日：2004-07-20
申请号：US10060224
申请日：2002-02-01
申请人： Yoichi Mori
发明人： Yoichi Mori
IPC分类号： B01J2104
CPC分类号： B01D53/8659 , B01D53/86 , B01D53/864 , B01D2251/00 , B01D2251/102 , B01D2257/2027 , B01D2257/502
摘要： The purpose of the present invention is to provide a process and an apparatus for efficiently treating a gas containing fluorine-containing compounds and CO to be discharged, for example, from the step of dry cleaning the inner surfaces and the like of a semiconductor manufacturing apparatus or the step of etching various types of formed films such as oxide films in the semiconductor industry. In order to accomplish the above-mentioned purpose, the gas treating process according to the present invention is a process for treating a gas containing fluorine-containing compounds and CO which comprises contacting the above described gas with O2 and H2O at a temperature of 850° C. or higher to oxidize the CO to CO2; and then contacting the gas with &ggr;-alumina at a temperature of 600 to 900° C. to decompose the fluorine-containing compounds.
摘要翻译：本发明的目的是提供一种用于有效处理含氟化合物和待排出的CO的气体的方法和装置，例如，从干燥半导体制造装置的内表面等的步骤或在半导体工业中蚀刻各种类型的成膜（例如氧化物膜）的步骤。为了实现上述目的，根据本发明的气体处理方法是一种处理含有氟化合物和CO的气体的方法，该方法包括使上述气体与O 2和H 2 O在850℃的温度下接触 C以上以将CO氧化成CO 2; 然后使气体与γ-氧化铝在600〜900℃的温度下接触，分解含氟化合物。

84. 发明授权

US06689252B1 Abatement of hazardous gases in effluent 失效
标题翻译：废水中有害气体的消除
公开(公告)号：US06689252B1
公开(公告)日：2004-02-10
申请号：US09363250
申请日：1999-07-28
申请人： Shamouil Shamouilian , Tony S. Kaushal
发明人： Shamouil Shamouilian , Tony S. Kaushal
IPC分类号： B01J1908
CPC分类号： B01D53/8659 , B01D53/68 , B01D53/70 , B01D53/74 , B01D53/8662 , B01D2257/2066 , B01J19/08 , B01J19/12 , B01J19/129 , Y02C20/30
摘要： An apparatus and method for reducing hazardous gases exhausted from a process chamber 25 includes an effluent plasma reactor 210 and a downstream catalytic reactor 220. The reactor 210 may include a consumable liner that reacts with the energized effluent to remove the hazardous gases. The catalytic reactor 220 may also include catalytic surfaces 227 in a honeycomb, foam, or pellet structure 225 to catalyze reactions that further reduce hazardous gas content.
摘要翻译：用于减少从处理室25排出的有害气体的装置和方法包括流出物等离子体反应器210和下游催化反应器220.反应器210可包括消耗性衬里，其与通电的流出物反应以除去有害气体。催化反应器220还可以包括在蜂窝状，泡沫状或颗粒结构225中的催化表面227，以催化进一步减少有害气体含量的反应。

85. 发明申请

US20030049190A1 Method for processing perfluorocarbon, and apparatus therefor 有权
标题翻译：全氟化碳加工方法及其设备
公开(公告)号：US20030049190A1
公开(公告)日：2003-03-13
申请号：US10244010
申请日：2002-09-16
发明人： Kazuyoshi Irie , Toshihiro Mori , Hisao Yokoyama , Takayuki Tomiyama , Toshihide Takano , Shin Tamata , Shuichi Kanno
IPC分类号： B01D053/70
CPC分类号： B01D53/8659 , B01D53/8662 , Y02C20/30
摘要： An exhaust gas containing a perfluoride compound (PFC) and SiF4 is conducted into a silicon remover and brought into contact with water. A reaction water supplied from a water supplying piping and air supplied from an air supplying piping are mixed with the exhaust gas exhausted from the silicon remover. The exhaust gas containing water, air, and CF4 is heated at 700null C. by a heater. The exhaust gas containing PFC is conducted to a catalyst layer filled with an alumina group catalyst. The PFC is decomposed to HF and CO2 by the catalyst. The exhaust gas containing HF and CO2 at a high temperature exhausted from the catalyst layer is cooled in a cooling apparatus. Subsequently, the exhaust gas is conducted to an acidic gas removing apparatus to remove HF. In this way, the silicon component is removed from the exhaust gas before introducing the exhaust gas into the catalyst layer. Therefore, the surface of the catalyst can be utilized effectively, and the decomposition reaction of the perfluoride compound can be improved.
摘要翻译：将含有全氟化合物（PFC）和SiF 4的废气导入硅去除剂中并与水接触。从供水管道供应的反应水和从供气管道供应的空气与从硅去除器排出的废气混合。含有水，空气和CF4的废气通过加热器在700℃加热。含有PFC的废气被传导到填充有氧化铝基催化剂的催化剂层。 PFC通过催化剂分解成HF和CO2。在从催化剂层排出的高温下含有HF和CO 2的废气在冷却装置中被冷却。随后，将废气导入酸性气体去除装置中去除HF。以这种方式，在将废气引入催化剂层之前，从排气中除去硅组分。因此，可有效利用催化剂的表面，可以提高全氟化合物的分解反应。

86. 发明申请

US20030017090A1 Environmental control system including vapor cycle system and isothermal CATOX/PTF 有权
标题翻译：环境控制系统包括蒸气循环系统和等温CATOX / PTF
公开(公告)号：US20030017090A1
公开(公告)日：2003-01-23
申请号：US09907798
申请日：2001-07-18
发明人： Peter M. Michalakos , Norman Van Den Bussche , Robert Tom
IPC分类号： B01D053/54 , B01D053/68 , B01D053/04
CPC分类号： B60H1/00414 , B01D53/8609 , B01D53/8631 , B01D53/8659 , B01D53/8668 , B60H3/00 , B64D13/06 , B64D2013/0651 , F24F2003/1628 , Y02T50/56
摘要： An environmental control system includes a catalytic reactor and a post treatment filter for cleaning incoming air, and a vapor cycle system for conditioning the air.
摘要翻译：环境控制系统包括用于清洁进入空气的催化反应器和后处理过滤器，以及用于调节空气的蒸气循环系统。

87. 发明授权

US5756060A Process for cleaning harmful gas 失效
标题翻译：清洁有害气体的过程
公开(公告)号：US5756060A
公开(公告)日：1998-05-26
申请号：US740855
申请日：1996-11-04
申请人： Kenji Otsuka , Satoshi Arakawa , Youji Nawa
发明人： Kenji Otsuka , Satoshi Arakawa , Youji Nawa
IPC分类号： B01D53/34 , B01D53/68 , B01D53/86
CPC分类号： B01D53/68 , B01D53/8659
摘要： A process for cleaning a harmful gas which comprises bringing a harmful gas containing a halogen gas and/or a halogen compound gas such as hydrogen fluoride, hydrogen chloride, tungsten hexafluoride, silicon tetrafluoride and boron trifluoride into contact with a cleaning agent comprising metal oxides composed principally of copper (II) oxide and manganese (IV) oxide that are spreadingly and adhesively incorporated with sodium formate so as to remove a harmful component from the harmful gas. According to the cleaning process of the present invention, it is possible to remove harmful components from the harmful gas in extremely high efficiency at ordinary temperature, dispensing with heating or cooling irrespective of the concentration of the harmful components. The cleaning capacity of the cleaning agent is favorably maintained without deterioration even when the harmful gas is in a dry state. Furthermore, the cleaning agent can remove the harmful gas in safety without a fear of causing fire or elimination of the harmful component therefrom. The cleaning process is highly useful and significant in that it is well suited for cleaning exhaust gases from a semiconductor manufacturing process as well as an emergency countermeasure against the leakage of harmful gas from a gas cylinder.
摘要翻译：一种清洁有害气体的方法，包括使含有卤素气体和/或卤素化合物气体如氟化氢，氯化氢，六氟化钨，四氟化硅和三氟化硼的有害气体与包含金属氧化物的清洗剂接触主要是氧化铜（II）和氧化锰（IV），它们与甲酸钠扩散并粘合并入，以便从有害气体中除去有害成分。根据本发明的清洗方法，可以在常温下以非常高的效率从有害气体中除去有害成分，而不管有害成分的浓度如何，分配加热或冷却。即使当有害气体处于干燥状态时，清洁剂的清洁能力也被有利地保持而不劣化。此外，清洁剂可以安全地除去有害气体，而不用担心引起火灾或从中消除有害成分。清洁过程是非常有用和重要的，因为它非常适合于清洁半导体制造过程中的废气以及应对措施，防止来自气瓶的有害气体的泄漏。

88. 发明授权

US5599457A Machine coolant treatment method 失效
标题翻译：机器冷却液处理方法
公开(公告)号：US5599457A
公开(公告)日：1997-02-04
申请号：US230677
申请日：1994-04-21
申请人： Chris E. Fanning , Gary C. Garrett
发明人： Chris E. Fanning , Gary C. Garrett
IPC分类号： B01D39/20 , B01D53/86 , B01D53/88 , C02F1/00 , C02F1/50 , C02F1/70 , B01D15/00
CPC分类号： B01D39/2051 , B01D53/8603 , B01D53/8659 , B01D53/8665 , B01D53/885 , C02F1/003 , C02F1/505 , C02F1/705 , C02F2201/006
摘要： A filtering apparatus and filtering method for removing free-oils, particulate matter and dissolved heavy metals from a machine coolant by withdrawing a portion of the machine coolant from a machine coolant reservoir through a skimmer assembly and thereafter passing the machine coolant through a filter assembly containing an oil absorbent, a particulate matter filter and a filter element having metal particles bound together in a porous metal sponge-like structure.
摘要翻译：一种过滤装置和过滤方法，用于通过将来自机器冷却剂储存器的一部分机器冷却剂通过撇渣器组件抽出来从机器冷却剂中除去游离油，颗粒物质和溶解的重金属，然后使机器冷却剂通过过滤组件，该过滤组件包含油吸收剂，颗粒物质过滤器和具有多孔金属海绵状结构结合在一起的金属颗粒的过滤元件。

89. 发明授权

US5599456A Fluid treatment utilizing a reticulated foam structured media consisting of metal particles 失效
标题翻译：利用由金属颗粒组成的网状泡沫结构介质进行流体处理
公开(公告)号：US5599456A
公开(公告)日：1997-02-04
申请号：US321279
申请日：1994-10-11
申请人： Chris E. Fanning
发明人： Chris E. Fanning
IPC分类号： B01D39/20 , B01D53/86 , B01D53/88 , C02F1/00 , C02F1/28 , C02F1/50 , C02F1/70 , B01D15/00 , B01D53/04
CPC分类号： C02F1/003 , B01D39/2051 , B01D53/8603 , B01D53/8659 , B01D53/8665 , B01D53/885 , C02F1/281 , C02F1/505 , C02F1/705 , C02F2201/006
摘要： A method for treating a fluid or gas containing contaminants wherein the fluid or gas is passed through a contactor having at least one reticulated foam structured fluid treatment element formed from metal particles bound together in an interconnected form and capable of promoting a reduction/oxidation reaction between the contaminants and the reticulated foam structured fluid treatment element. The metal particles employed in the fabrication of the reticulated foam structured fluid treatment element are selected from a group of particles comprising zinc, copper or combinations thereof.
摘要翻译：一种用于处理含有污染物的流体或气体的方法，其中所述流体或气体通过接触器，所述接触器具有由互连形式结合在一起的金属颗粒形成的至少一个网状泡沫结构化流体处理元件，并且能够促进污染物和网状泡沫结构化流体处理元件。用于制造网状泡沫结构化流体处理元件的金属颗粒选自包含锌，铜或其组合的一组颗粒。

90. 发明授权

US5578283A Catalytic oxidation catalyst and method for controlling VOC, CO and halogenated organic emissions 失效
标题翻译：催化氧化催化剂和控制VOC，CO和卤化有机物排放的方法
公开(公告)号：US5578283A
公开(公告)日：1996-11-26
申请号：US366537
申请日：1994-12-30
申请人： James M. Chen , Pascaline H. Nguyen
发明人： James M. Chen , Pascaline H. Nguyen
IPC分类号： B01D53/86 , B01D53/94 , B01J23/63 , B01J23/656 , B01J23/66 , B01J23/68 , B01J23/89 , B01J32/00 , B01J37/00 , C07D301/10 , C07D303/04 , C01B7/00
CPC分类号： C07D301/10 , B01D53/864 , B01D53/8659 , B01D53/8662 , B01D53/8668 , B01J23/63 , B01J23/6562 , B01J23/66 , B01J23/688 , B01J23/8913 , B01J37/0018 , B01D2255/102 , B01D2255/20715 , B01D2257/2062 , Y02P20/154
摘要： A catalyst and process for treating gas streams which contain halogenated organic compounds, non-halogenated organic compounds, carbon monoxide or mixtures thereof, and particularly gas streams which contain organobromides. The catalyst comprises at least one platinum group metal, zirconium oxide and at least one oxide of manganese, cerium or cobalt.
摘要翻译：用于处理含有卤化有机化合物，非卤代有机化合物，一氧化碳或其混合物，特别是包含有机溴化物的气流的气流的催化剂和方法。催化剂包含至少一种铂族金属，氧化锆和至少一种锰，铈或钴的氧化物。

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