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    • 83. 发明公开
    • Inductively coupled plasma generator
    • Induktiv gekoppelte Plasmaquelle。
    • EP0568920A1
    • 1993-11-10
    • EP93106923.1
    • 1993-04-28
    • THE PERKIN-ELMER CORPORATION
    • Gagne, Peter H.Morrisroe, Peter J.
    • H05H1/30H05H1/36
    • H05H1/36
    • An inductively coupled plasma generator wherein actual power delivered to the load is measured and used to control output power. Means are provided for detecting generated RF voltage and current and multiplying these together to produce a continuous signal representative of actual RF power. Microprocessor means provides a signal representative of commanded power. These signals are compared to provide an error signal for controlling power delivered by the generator. Generator parameters are further monitored and plasma potential is maintained at zero potential with respect to ground to eliminate damage to the circuitry and instruments connected thereto.
    • 一种电感耦合等离子体发生器,其中测量传送到负载的实际功率并用于控制输出功率。 提供了用于检测产生的RF电压和电流并将它们相乘并产生表示实际RF功率的连续信号的装置。 微处理器装置提供代表指令功率的信号。 将这些信号进行比较以提供用于控制由发电机输送的功率的误差信号。 进一步监测发电机参数,并将等离子体电位保持在相对于地面的零电位,以消除与其相连的电路和仪器的损坏。
    • 86. 发明公开
    • Photodetector amplitude linearity
    • Verfahren zur Bestimmung derAusschlagslinearitäteines Photodetektors。
    • EP0552604A1
    • 1993-07-28
    • EP93100102.8
    • 1993-01-07
    • THE PERKIN-ELMER CORPORATION
    • Ganz, Alan M.Tracy, David H.
    • G01N21/27G01J1/08
    • G01J1/08G01N21/274
    • To calibrate a photodetector, a rotating disk with a slot is disposed in a light beam with decreasing speed from a defined maximum rotational speed to a defined minimum speed, while magnitudes and times of signals are read out and stored. Vernier pairs of signals occur in adjacent readout intervals, and non-vernier signals exclude the verniers. Readout times for verniers are used to estimate a preliminary function of rotations versus time. From the function are estimated an occurrence time for each pair and period of disk rotation at the time. Vernier fraction is the ratio of one signal in the pair to the sum of the pair. A time offset is the product of vernier fraction, slot fraction of the disk and the estimated period. Occurrence times corrected with the time offset are utilized to fit a corrected function of disk rotations versus time. Points of time for the non-vernier signals are determined from the corrected function, each point corresponding to disk rotations to a corresponding non-vernier signal. These points of time are employed with corresponding signals for linearly calibrating the photodetector.
    • 为了校准光电检测器,具有狭槽的旋转盘以从限定的最大转速降低到限定的最小速度的光束布置,同时读出并存储信号的幅度和时间。 游标对信号发生在相邻的读出间隔中,非游标信号排除游标。 用于游标的读数时间用于估计旋转与时间的初步功能。 从该功能估计每一对的发生时间和当时磁盘旋转周期。 游标分数是该对中的一个信号与该对之和的比率。 时间偏移是游标分数,磁盘的时隙分数和估计周期的乘积。 使用时间偏移校正的发生次数用于适应盘旋转与时间的校正功能。 从校正函数确定非游标信号的时间点,每个点对应于盘旋转到相应的非游标信号。 这些时间点用于线性校准光电检测器的相应信号。