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81. 发明公开

EP0408168A1 Method of pretreating metallic works and method of nitriding steel 失效
标题翻译：一种用于金属工件的预处理和钢的氮化处理。
公开(公告)号：EP0408168A1
公开(公告)日：1991-01-16
申请号：EP90302232.5
申请日：1990-03-01
申请人： DAIDOUSANSO CO., LTD.
发明人： Tahara, Masaaki , Tomoda, Takakazu , Kitano, Kenzo , Minato, Teruo
IPC分类号： C23C8/02 , C23C8/24
CPC分类号： C23C8/34 , C23C8/02
摘要： A method of pretreating metallic works comprises beating a metallic work in a furnace and introducing a fluorine- or fluoride-containing gas into the furnace in thta state to thereby cause destruction and elimination of the foreign matters adhering to the metallic work surface and of the oxidized layer occurring on the metallic work surface and simultaneous formation of a fluorinated layer. Just prior to the main thermal treatment, for example nitriding, the fluorinated layer is decomposed and eliminated by introducing an appropriate gas, for example H₂, into the furnace. In this way, the metallic work reveals its cleaned and activated surface.
A steel nitriding method comprises heating a steel work placed in a furnace to a temperature of about 300-500 o C, feeding a fluorine- or fluoride-containing gas into the furnace at that temperature, and then subjecting the steel works to nitriding treatment to thereby remove impurities and at the same time activate a steel work surface, make N atoms penetrate rapidly to the thus-activated steel work surface and diffuse into the inside. As a result, a uniform nitrided layer can be formed.
摘要翻译：预处理金属的方法的工作原理包括跳动在炉中的金属的工作和引入含氟或含氟化物的气体进入炉中thta状态，从而使异物秉承金属工作台面和氧化的破坏和消除在金属工作台面和氟化层的同时形成发生层。就在主热处理，氮化对于实施例之前，氟化层被分解，并通过在适当的气体引入，例如H2，入炉消除。通过这种方式，金属工作揭示了其清洁和活化表面。的钢渗氮方法，包括加热在炉中放置约300-500nm的温度的钢结构 C，在该温度下进给含氟或含氟化物的气体到炉中并，然后使钢工作以氮化处理，从而除去杂质，并在同一时间激活一个钢工作台面，使N原子渗入迅速向由此活化的钢工作台面和扩散到内部。其结果是，均匀的氮化层，可以形成。

82. 发明公开

EP0396239A2 Apparatus for producing semiconductors by vapour phase deposition 失效
标题翻译：对于通过沉积从气相中制造半导体的装置。
公开(公告)号：EP0396239A2
公开(公告)日：1990-11-07
申请号：EP90302831.4
申请日：1990-03-16
申请人： DAIDOUSANSO CO., LTD.
发明人： Yoshino, Akira , Ohmori, Yoshinori , Okumura, Kenji , Ohnishi, Toshiharu
IPC分类号： C30B25/14 , C23C16/44
CPC分类号： C23C16/45514 , C23C16/455 , C23C16/45591 , C30B25/14
摘要： Apparatus for manufacturing semiconductors comprises a reactant gas dispersion chamber 3 disposed under a reaction chamber 2 within a vacuum chamber 1, the chambers communicating with each other by a plurality of communicating holes 9, a first feed pipe 15 for supplying reactant gas extends into the reactant gas dispersion chamber, the opening 16 thereof facing downward and having a collar 17 formed around it. The reactant gas is blown downward from the opening of the feed pipe and dispersed by the collar portion and homogenised in the reactant gas dispersing chamber, and is introduced into the reaction chamber through the communicating holes. Therefore even on a substrate of large area, an homogeneous semiconductor layer can be formed.
摘要翻译：一种用于制造半导体包括真空室1内的反应室2的下方设置在反应气体分散室3，彼此通过连通孔9，第一供给管15的多个用于供应反应气体连通的腔室延伸到反应物气体分散室，朝下并且具有围绕它形成的轴环17其开口16中。反应物气体从进料管的开口向下吹出并分散的衣领部分和在反应气体分散室均质化，并通过连通孔引入到反应室中。因此，即使对在均匀半导体层的大面积衬底，可以形成。

83. 发明授权

EP0175791B1 APPARATUS FOR PRODUCING HIGH-PURITY NITROGEN GAS 失效
标题翻译：用于生产高纯度氮气的装置
公开(公告)号：EP0175791B1
公开(公告)日：1988-11-09
申请号：EP84901401.4
申请日：1984-03-29
申请人： DAIDOUSANSO CO., LTD.
发明人： YOSINO, Akira 30-13, Nisiyamadai 2-chome
IPC分类号： F25J3/04
CPC分类号： F25J3/044 , F17C9/04 , F17C2201/0109 , F17C2203/0391 , F17C2221/011 , F17C2221/014 , F17C2221/031 , F17C2223/0123 , F17C2223/0161 , F17C2270/0518 , F25J3/0426 , F25J3/04636 , F25J3/04824 , F25J2200/74 , F25J2205/60 , F25J2210/42 , F25J2245/42 , F25J2250/42 , F25J2290/10 , F25J2290/62 , Y10S62/908 , Y10S62/913
摘要： This apparatus produces ultra-high purity nitrogen gas employed in fields such as the electronics industry when manufacturing a silicon semiconductor, for example. Conventional cryogenic liquefaction and PSA nitrogen gas production apparatuses often break down, and the nitrogen gas obtained by these conventional apparatuses is expensive, but its purity is not particularly high. In the apparatus of the present invention, a liquid nitrogen storage means (23) is connected to heat exchange means (13), (14) by an inlet path (16), and compressed air arriving at the heat exchanger means (13), (14) through an air compression means (9) and an elimination means (12) is cooled to an ultra-low temperature by the heat of evaporation of liquid nitrogen, and is pumped into a fractionating tower (15) from which nitrogen is taken out in a gaseous state leaving oxygen as a liquid, making use of the difference in boiling points therebetween. The obtained nitrogen gas is mixed with vaporized liquid nitrogen from the liquid nitrogen storage means (23) to obtain the final nitrogen gas. This makes it possible to produce inexpensive, high-purity nitrogen gas, with little likelihood of mechanical failure.
摘要翻译：例如，该设备在制造硅半导体时生产用于电子工业等领域的超高纯氮气。常规的低温液化和PSA氮气生产设备经常分解，并且由这些常规设备获得的氮气昂贵，但其纯度不是特别高。在本发明的设备中，液氮储存装置（23）通过入口通道（16）连接到热交换装置（13），（14），并且到达热交换器装置（13）的压缩空气，通过空气压缩装置（9）将空气压缩机（14）和消除装置（12）通过液氮的蒸发热冷却至超低温，并且将其泵入分馏塔（15）中，从其中取出氮气利用它们之间的沸点差异以气态离开氧气作为液体。将得到的氮气与来自液氮贮存装置（23）的汽化液氮混合，得到最终的氮气。这使得制造廉价，高纯度的氮气成为可能，而机械故障的可能性很小。

84. 发明公开

EP0279500A3 Highly pure nitrogen gas producing apparatus 失效
标题翻译：高纯氮气生产设备
公开(公告)号：EP0279500A3
公开(公告)日：1988-10-26
申请号：EP88200470
申请日：1984-03-07
申请人： DAIDOUSANSO CO., LTD.
发明人： Yoshino, Akira
IPC分类号： F25J03/04
CPC分类号： F25J3/044 , F25J3/04254 , F25J3/04824 , F25J2200/74 , F25J2205/60 , F25J2210/42 , F25J2215/44 , F25J2290/62
摘要： A producing apparatus of highly pure nitrogen gas which is used in electronic industry for manufacturing silicon semi-conductors. By the apparatus of this invention, the liquefied nitrogen storage means (23) is connected to rectifying column (15) through the inlet channel (24), the ultra low temperature compressed air supplied into the rectifying column (15) through the air compression means (9), water and carbon dioxide removing means (12) and heat exchangers (13) (14) is cooled further by the evaporating heat of the liquefied nitrogen, the nitrogen is taken out in gas form by utilizing the difference in boiling point, the oxygen is left as liquid. The obtained nitrogen gas is combined with the gassified liquid nitrogen from the liquefied nitrogen storage means (23) and made into product nitrogen gas.

85. 发明公开

EP0235295A1 OXYGEN GAS PRODUCTION UNIT 失效
标题翻译：氧气生产装置
公开(公告)号：EP0235295A1
公开(公告)日：1987-09-09
申请号：EP86904929.6
申请日：1986-08-08
申请人： DAIDOUSANSO CO., LTD.
发明人： YOSHINO, Akira 30-13, Nisiyamadai 2-chome
IPC分类号： F25J3/04
CPC分类号： F25J3/0483 , F25J3/0409 , F25J3/04254 , F25J3/04309 , F25J3/04412 , F25J3/04824 , F25J3/04866 , F25J2210/50 , F25J2235/50 , F25J2250/50 , F25J2250/52 , F25J2290/62 , Y10S62/913
摘要： A unit for producing an oxygen gas of a superhigh purity by deep freezing of the air, and an object of the present invention is to obtain a unit which is capable of dealing with sudden variations in the demand for an oxygen gas, by using both an expansion turbine and a liquid oxygen storage means as the refrigerating source. In this unit, a liquid oxygen storage means (23) is connected to an upper portion (14) of a rectifier, provided with a condenser (17) therein, via an introduction passage (23a) so as to cool said condenser with a liquid oxygen, and a lower portion (15) of the rectifier and an expansion turbine (31) for cooling a heat exchanger (7) are connected by an introduction passage (29). The raw compressed air is cooled to a super-low temperature in the heat exchanger, and then fed to the lower portion of the rectifier, in which the resultant air is further cooled with the latent heat of vaporization of a refluxing liquid nitrogen obtained in the condenser, to obtain liquid air having a higher oxygen content. This liquid air is introduced into the upper portion of the rectifier to separate a liquid containing oxygen alone from the liquid air, by utilizing a boiling point difference, and the remainder is discharged to the outside as waste nitrogen. The liquid oxygen is taken out through a conduit (32), and then gasified and taken out as a product oxygen gas through a conduit (35).
摘要翻译：一种用于通过空气的深度冷冻来生产超高纯度氧气的单元，并且本发明的一个目的是获得一种能够应对氧气需求的突然变化的单元，其通过使用膨胀涡轮和液氧储存装置作为制冷源。在该装置中，液态氧储存装置（23）通过引入通道（23a）连接到装有冷凝器（17）的精馏器的上部（14），以便用液体冷却所述冷凝器氧气和精馏器的下部（15）以及用于冷却热交换器（7）的膨胀涡轮（31）通过引入通道（29）连接。原始压缩空气在热交换器中被冷却至超低温，然后被供给到精馏器的下部，在精馏器的下部，所得到的空气被进一步冷却，同时得到的回流液氮的汽化潜热冷凝器，以获得具有较高氧含量的液体空气。该液态空气被导入精馏塔的上部，利用沸点差将含有氧的液体与液体空气分离，剩余部分作为废氮排出到外部。液氧通过导管（32）排出，然后气化并作为产品氧气通过导管（35）排出。

86. 发明公开

EP0211957A1 APPARATUS FOR PRODUCING HIGH-PURITY NITROGEN AND OXYGEN GASES 失效
标题翻译：器具，用于产生高清洁和氮氧气。
公开(公告)号：EP0211957A1
公开(公告)日：1987-03-04
申请号：EP85903389.6
申请日：1985-07-08
申请人： DAIDOUSANSO CO., LTD.
发明人： YOSINO, Akira
IPC分类号： F25J3/04
CPC分类号： F25J3/0486 , F25J3/04218 , F25J3/04254 , F25J3/0443 , F25J3/04454 , F25J3/04824 , F25J2200/34 , F25J2200/54 , F25J2205/60 , F25J2210/42 , F25J2210/50 , F25J2215/44 , F25J2250/40 , F25J2250/42 , F25J2250/50 , F25J2280/02 , F25J2290/62 , Y10S62/913
摘要： Apparatus for producing nitrogen and oxygen gases of super-high purity by subjecting air to supercooling, liquefaction and separation. It is an object of this invention to obtain an apparatus for producing high-purity nitrogen and oxygen gases, which does not require an expensive expansion turbine which frequently malfunctions. In this apparatus, a liquid nitrogen storage means (14) is connected to a fractionating tower (12), and the supercooled compressed air introduced from an air-compressing means (1) into the fractionating tower (12) is further cooled through the heat loss of evaporating liquid nitrogen to recover the nitrogen in the gas phase and leave the oxygen in the liquid phase by utilizing the difference in the boiling points thereof. The resultant oxygen is condensed in an oxygen condenser (15). This condensed oxygen is further condensed in an oxygen fractionating tower (21) which is connected to the liquid oxygen storage means (23). The oxygen thus condensed is mixed with liquid oxygen from the liquid oxygen storage means (23), and the resultant mixture is gasified to obtain the finished product, oxygen gas. The nitrogen gas obtained from the fractionating tower is mixed with the liquid nitrogen from the liquid nitrogen storage means (14) to obtain a finished product, nitrogen gas.

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