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81. 发明授权

US07952257B2 Piezoelectric thin-film resonator 有权
标题翻译：压电薄膜谐振器
公开(公告)号：US07952257B2
公开(公告)日：2011-05-31
申请号：US12368801
申请日：2009-02-10
申请人： Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号： H01L41/047 , H03H9/13
CPC分类号： H03H9/174 , H03H9/02118
摘要： There is provided a piezoelectric thin-film resonator including a substrate, a lower electrode disposed on the substrate, a piezoelectric film disposed on the lower electrode, an upper electrode disposed on the piezoelectric film in such a manner that a portion of the upper electrode is opposed to the lower electrode, and a mass element disposed on the upper electrode in a portion of an edge of the region of the upper electrode in which the upper electrode and the lower electrode are opposed to each other.
摘要翻译：提供一种压电薄膜谐振器，其包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜，设置在压电薄膜上的上电极，上电极的一部分为与上电极相对的上电极区域的一部分边缘上设置的上电极上的质量元件，其中上电极和下电极相对。

82. 发明授权

US07602101B2 Piezoelectric thin-film resonator and filter using the same 有权
标题翻译：压电薄膜谐振器和使用其的滤波器
公开(公告)号：US07602101B2
公开(公告)日：2009-10-13
申请号：US11976608
申请日：2007-10-25
申请人： Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
发明人： Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
IPC分类号： H01L41/047
CPC分类号： H03H9/174 , H03H3/04 , H03H9/13 , H03H9/132 , H03H9/173 , H03H9/568 , H03H2003/023
摘要： A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and the substrate; and an upper electrode provided on the piezoelectric film so as to form a resonance portion in which the upper electrode faces the lower electrode across the piezoelectric film. At least one of the lower electrode and the upper electrode has an interconnection portion used to extract a signal from the resonance portion and located above the space. The at least one of the lower electrode and the upper electrode has a first mass per unit area in which the at least one of the lower electrode and the upper electrode contacts the piezoelectric film and a second mass per unit area in the resonance portion. The first mass per unit area is smaller than the second mass per unit area.
摘要翻译：压电薄膜谐振器包括：由基板支撑的下电极，在下电极下方限定空间; 设置在下电极和基板上的压电膜; 以及设置在压电膜上的上电极，以形成谐振部分，其中上电极面向下电极穿过压电膜。下电极和上电极中的至少一个具有用于从谐振部分提取信号并位于空间上方的互连部分。下电极和上电极中的至少一个具有每单位面积的第一质量，其中下电极和上电极中的至少一个与压电膜接触，并且在谐振部分中每单位面积具有第二质量。每单位面积的第一个质量小于每单位面积的第二个质量。

83. 发明申请

US20080150653A1 Film bulk acoustic resonator and filter 有权
标题翻译：薄膜体声波谐振器和滤波器
公开(公告)号：US20080150653A1
公开(公告)日：2008-06-26
申请号：US12000654
申请日：2007-12-14
申请人： Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
发明人： Motoaki Hara , Tokihiro Nishihara , Masanori Ueda , Go Endo
IPC分类号： H03H9/54 , H01L41/053 , H01L41/047
CPC分类号： H03H9/174 , H03H3/02 , H03H9/02118 , H03H9/173
摘要： A film bulk acoustic resonator includes a lower electrode that is formed on a void of a substrate or is formed so that a void is formed between the lower electrode and the substrate, a piezoelectric film that is formed on the lower electrode, an upper electrode that is formed on the piezoelectric film so as to have a resonance region facing the lower electrode through the piezoelectric film, a support region that is provided around the resonance region, has a width of 0.35 times to 0.65 times a wavelength of a wave propagating in a lateral direction, and transmits the wave passes, and an adjacent region that is provided around the support region and blocks the wave.
摘要翻译：薄膜体声波谐振器包括形成在基板的空隙上或形成为在下电极和基板之间形成空隙的下电极，形成在下电极上的压电膜，上电极形成在压电膜上，以便具有通过压电膜面向下电极的共振区域，设置在谐振区域周围的支撑区域的宽度是在波长传播的波长的波长的0.35倍至0.65倍横向传播，并且传递波通，以及设置在支撑区域周围并阻挡波的相邻区域。

84. 发明授权

US08912971B2 Filter, duplexer and electronic device 有权
标题翻译：滤波器，双工器和电子设备
公开(公告)号：US08912971B2
公开(公告)日：2014-12-16
申请号：US13131833
申请日：2008-11-28
申请人： Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号： H01Q1/50 , H03H9/60 , H03H9/05 , H03H9/56 , H03H9/64
CPC分类号： H03H9/605 , H03H9/0571 , H03H9/0576 , H03H9/564 , H03H9/568 , H03H9/6483
摘要： A ladder type filter includes series resonators S1˜S4 connected in series between an input terminal In and an output terminal Out, parallel resonators P1˜P3 connected in parallel between the input terminal In and the output terminal Out, a resonator RP connected in series with the series resonators S1˜S4 between the input terminal and the output terminal, the resonator RP having a resonance frequency lower than resonance frequencies of the series resonators S1˜S4, and an inductor Lp connected in parallel with the resonator. According to the present ladder filter, signals having frequencies away from the pass band can be suppressed by an attenuation pole formed by the inductor. It is further possible to suppress the insertion loss in the pass band by the resonator.
摘要翻译：梯形滤波器包括串联连接在输入端子In和输出端子Out之间的串联谐振器S1〜S4，并联在输入端子In和输出端子Out之间的并联谐振器P1〜P3，与输入端子和输出端子之间的串联谐振器S1〜S4，谐振器RP的谐振频率低于串联谐振器S1〜S4的谐振频率，以及与谐振器并联连接的电感器Lp。根据本梯形滤波器，可以通过由电感器形成的衰减极来抑制具有远离通带的频率的信号。还可以通过谐振器抑制通带中的插入损耗。

85. 发明授权

US06949990B2 Filter device 失效
标题翻译：过滤装置
公开(公告)号：US06949990B2
公开(公告)日：2005-09-27
申请号：US10665209
申请日：2003-09-22
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Tsutomu Miyashita , Yoshio Satoh
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Tsutomu Miyashita , Yoshio Satoh
IPC分类号： H03H9/58 , H03H9/02 , H03H9/10 , H03H9/17 , H03H9/205 , H03H9/25 , H03H9/64 , H03H9/56
CPC分类号： H03H9/0547 , H03H9/0523 , H03H9/564 , H03H9/568
摘要： A filter device includes a filter element that has piezoelectric thin-film resonators arranged in series arms and parallel arms, and a package that houses the filter element in a face-down state. In this filter device, the filter element and the package are electrically connected to each other through bumps. The package includes first pad parts on which the bumps are placed, and transmission paths that electrically connect the first pad parts to the outside. The filter element includes second pad parts that are electrically connected to the first pad parts through the bumps, and wiring parts that electrically connect the second pads to the piezoelectric thin-film resonators and electrically connect the piezoelectric thin-film resonators to one another. In this structure, inductances formed with the transmission paths are connected in series to the piezoelectric thin-film resonators.
摘要翻译：滤波器装置包括具有布置成串联臂和平行臂的压电薄膜谐振器的滤波器元件和以面朝下的状态容纳滤波元件的封装。在该过滤器装置中，过滤元件和封装通过凸块彼此电连接。该包装包括其上放置有凸块的第一垫片部分和将第一垫片部分电连接到外部的传输路径。滤波器元件包括通过凸块电连接到第一焊盘部分的第二焊盘部分，以及将第二焊盘电连接到压电薄膜谐振器并将压电薄膜谐振器彼此电连接的布线部分。在该结构中，形成有传输路径的电感与压电薄膜谐振器串联连接。

86. 发明授权

US06734763B2 Thin-film piezoelectric resonator, band-pass filter and method of making thin-film piezoelectric resonator 有权
标题翻译：薄膜压电谐振器，带通滤波器和制造薄膜压电谐振器的方法
公开(公告)号：US06734763B2
公开(公告)日：2004-05-11
申请号：US10117219
申请日：2002-04-08
申请人： Tokihiro Nishihara , Takeshi Sakashita , Rei Kimachi , Tsuyoshi Yokoyama , Tsutomu Miyashita
发明人： Tokihiro Nishihara , Takeshi Sakashita , Rei Kimachi , Tsuyoshi Yokoyama , Tsutomu Miyashita
IPC分类号： H03H900
CPC分类号： H03H9/174 , H03H3/02 , H03H9/173 , H03H9/564 , H03H9/568 , Y10T29/42
摘要： A thin-film piezo-resonator includes a silicon substrate and a resonator assembly. The substrate is formed with a cavity or through-hole which is opened in the upper and the lower surfaces of the substrate. The resonator assembly, disposed at a location corresponding to the cavity, is composed of a first electrode contacting the upper surface of the substrate, a piezoelectric layer formed on the first electrode and a second electrode formed on the piezoelectric layer. The cavity has a side surface extending in a substantially perpendicular direction to the first surface.
摘要翻译：薄膜压电谐振器包括硅衬底和谐振器组件。衬底形成有在衬底的上表面和下表面中打开的空腔或通孔。设置在与空腔对应的位置处的谐振器组件由与基板的上表面接触的第一电极，形成在第一电极上的压电层和形成在压电层上的第二电极组成。空腔具有在与第一表面大致垂直的方向上延伸的侧表面。

87. 发明授权

US07271684B2 Filter element, and filter device, duplexer, and high-frequency circuit each including said filter element 有权
标题翻译：滤波器元件，滤波器装置，双工器和高频电路，每个包括所述滤波元件
公开(公告)号：US07271684B2
公开(公告)日：2007-09-18
申请号：US10717487
申请日：2003-11-21
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Tsutomu Miyashita
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Tsutomu Miyashita
IPC分类号： H03H9/70 , H03H9/54
CPC分类号： H03H9/564 , H03H9/0095 , H03H9/1014 , H03H9/568
摘要： A filter element includes resonators that are arranged in series arms and parallel arms in a circuit. In this filter element, at least one of the series-arm resonators includes a plurality of single-terminal pair piezoelectric thin-film resonators connected in parallel.
摘要翻译：滤波器元件包括在电路中以串联臂和并联臂布置的谐振器。在该滤波元件中，串联臂谐振器中的至少一个包括并联连接的多个单端对的压电薄膜谐振器。

88. 发明授权

US07145417B2 Filter chip and filter device 有权
公开(公告)号：US07145417B2
公开(公告)日：2006-12-05
申请号：US10397172
申请日：2003-03-27
申请人： Rei Kimachi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Tsutomu Miyashita
发明人： Rei Kimachi , Tokihiro Nishihara , Takeshi Sakashita , Tsuyoshi Yokoyama , Tsutomu Miyashita
IPC分类号： H03H9/54 , H03H9/64
CPC分类号： H03H9/1014 , H03H9/0523 , H03H9/564 , H03H9/568 , H03H9/6483
摘要： A filter chip includes multiple series-arm resonators arranged in series arms of a ladder arrangement, and multiple parallel-arm resonators arranged in parallel arms of the ladder arrangement. A common line is connected to first electrodes of at least two parallel-arm resonators among the multiple parallel-arm resonators. Second electrodes of said at least two parallel-arm resonators are connected to associated series-arm resonators among the multiple series-arm resonators.

89. 发明授权

US07323953B2 Film bulk acoustic resonator and method of producing the same 有权
标题翻译：薄膜体声共振器及其制造方法
公开(公告)号：US07323953B2
公开(公告)日：2008-01-29
申请号：US10926329
申请日：2004-08-26
申请人： Tsuyoshi Yokoyama , Takeshi Sakashita , Tokihiro Nishihara , Tsutomu Miyashita , Yoshio Satoh
发明人： Tsuyoshi Yokoyama , Takeshi Sakashita , Tokihiro Nishihara , Tsutomu Miyashita , Yoshio Satoh
IPC分类号： H03H9/00
CPC分类号： H03H9/174 , H03H3/02 , H03H9/02133 , H03H9/131 , H03H9/132 , H03H9/562 , H03H9/564 , H03H9/568 , H03H2003/023
摘要： A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the piezoelectric thin film is made of aluminum nitride, and at least one of the lower electrode and the upper electrode contains a ruthenium or ruthenium-alloy layer.
摘要翻译：膜体声波谐振器包括：形成在基板的主表面上的压电薄膜; 以及布置成夹持压电薄膜的下电极和上电极。在该膜体声波谐振器中，压电薄膜由氮化铝制成，下电极和上电极中的至少一方含有钌或钌合金层。

90. 发明申请

US20050046519A1 Film bulk acoustic resonator and method of producing the same 有权
标题翻译：薄膜体声共振器及其制造方法
公开(公告)号：US20050046519A1
公开(公告)日：2005-03-03
申请号：US10926329
申请日：2004-08-26
申请人： Tsuyoshi Yokoyama , Takeshi Sakashita , Tokihiro Nishihara , Tsutomu Miyashita , Yoshio Satoh
发明人： Tsuyoshi Yokoyama , Takeshi Sakashita , Tokihiro Nishihara , Tsutomu Miyashita , Yoshio Satoh
IPC分类号： H01L41/187 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/319 , H03H3/02 , H03H3/04 , H03H9/13 , H03H9/17 , H03H9/56 , H03H9/58
CPC分类号： H03H9/174 , H03H3/02 , H03H9/02133 , H03H9/131 , H03H9/132 , H03H9/562 , H03H9/564 , H03H9/568 , H03H2003/023
摘要： A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the piezoelectric thin film is made of aluminum nitride, and at least one of the lower electrode and the upper electrode contains a ruthenium or ruthenium-alloy layer.
摘要翻译：膜体声波谐振器包括：形成在基板的主表面上的压电薄膜; 以及布置成夹持压电薄膜的下电极和上电极。在该膜体声波谐振器中，压电薄膜由氮化铝制成，下电极和上电极中的至少一方含有钌或钌合金层。

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