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81. 发明授权

US08257598B2 Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks 有权
公开(公告)号：US08257598B2
公开(公告)日：2012-09-04
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.

82. 发明申请

US20120111827A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权
标题翻译：使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法
公开(公告)号：US20120111827A1
公开(公告)日：2012-05-10
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B05D3/10 , B05D5/12
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
摘要翻译：本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或条带。嵌段共聚物材料沉积在图案上，导致嵌段共聚物引导自组装成其组分，以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。除去其中一个部件的径向线，并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。常规光刻用于在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。

83. 发明申请

US20110226737A1 METHOD FOR MAKING A MASTER DISK FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权
标题翻译：用于制作用于印制图形磁记录盘的主磁盘的方法
公开(公告)号：US20110226737A1
公开(公告)日：2011-09-22
申请号：US13151981
申请日：2011-06-02
申请人： Thomas R. Albrecht
发明人： Thomas R. Albrecht
IPC分类号： C23F1/00 , B28B7/38
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743 , G11B5/82
摘要： A method for making a master disk to be used for nanoimprinting patterned-media magnetic recording disks uses sidewall lithography. In one implementation, the master disk substrate has a first pattern of concentric rings formed on it by sidewall lithography, followed by a second pattern of generally radially-directed pairs of parallel lines, also formed by sidewall lithography, with the pairs of parallel lines intersecting the rings. An etching process is then performed, using the upper pattern as an etch mask, to remove unprotected portions of the underlying concentric rings. This leaves a pattern of pillars on the substrate, which then serve as an etch mask for an etching process that etches unprotected portions of the master disk substrate. The resulting master disk then has pillars of substrate material arranged in a pattern of concentric rings and generally radially-directed pairs of parallel lines.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法使用侧壁光刻。在一个实施方案中，母盘基板具有通过侧壁光刻在其上形成的同心环的第一图案，随后是也通过侧壁光刻形成的大体上径向指向的一对平行线的第二图案，并且所述平行线对相交戒指。然后使用上部图案作为蚀刻掩模进行蚀刻工艺，以去除下面的同心环的未受保护的部分。这在衬底上留下了柱状图案，其然后用作用于蚀刻母盘衬底的未受保护部分的蚀刻工艺的蚀刻掩模。所得到的母盘然后具有以同心环和大体上径向指向的平行线对图案布置的基底材料柱。

84. 发明申请

US20110096436A1 PATTERNED MAGNETIC RECORDING DISK WITH PATTERNED SERVO SECTORS AND METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD FOR NANOIMPRINTING THE DISK 有权
标题翻译：带有图案伺服器的图形磁记录盘和使用块状共聚物制备用于纳米片的主模的方法
公开(公告)号：US20110096436A1
公开(公告)日：2011-04-28
申请号：US12604333
申请日：2009-10-22
申请人： Thomas R. Albrecht , Jonathan Darrel Coker , Ricardo Ruiz , Bruce Alexander Wilson
发明人： Thomas R. Albrecht , Jonathan Darrel Coker , Ricardo Ruiz , Bruce Alexander Wilson
IPC分类号： G11B5/82 , B05D7/00 , B44C1/22
CPC分类号： G11B5/855
摘要： A patterned-media perpendicular magnetic recording disk has patterned servo regions and is nanoimprinted from a master mold made using directed self-assembly of block copolymers. The disk has patterned concentric circular data tracks of discrete data islands, with the tracks having a track pitch in the radial or cross-track direction. The disk also has patterned servo sectors extending generally radially across the patterned data tracks. The servo pattern is a chevron pattern of slanted or non-radial stripes that have a stripe pitch in the cross-stripe direction substantially equal to the track pitch. As a result of the method of making the master mold, the nanoimprinted disk has a chevron servo pattern with non-radial stripes that are magnetized segments of radial lines separated by nonmagnetic spaces.
摘要翻译：图形介质垂直磁记录盘具有图案化的伺服区域，并且由使用嵌段共聚物的定向自组装制成的母模进行纳米压印。磁盘具有离散数据岛的图案化的同心圆形数据轨道，轨道具有径向或交叉轨道方向的轨道间距。磁盘还具有沿图案化数据磁道大致径向延伸的图案化伺服扇区。伺服图案是斜横条纹或非径向条纹的人字形图案，其在横条方向上具有基本上等于轨道间距的条纹间距。作为制造母模的方法，纳米压印盘具有具有非径向条纹的人字形伺服图案，其是由非磁性空间分开的径向线的磁化段。

85. 发明授权

US07867406B2 Patterned magnetic media having an exchange bridge structure connecting islands 有权
标题翻译：具有连接岛的交换桥结构的图案化磁介质
公开(公告)号：US07867406B2
公开(公告)日：2011-01-11
申请号：US11964685
申请日：2007-12-26
申请人： Thomas R. Albrecht , Manfred E. Schabes
发明人： Thomas R. Albrecht , Manfred E. Schabes
IPC分类号： G11B5/84
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855
摘要： Patterned magnetic recording media and associated methods of fabrication are described. The patterned magnetic recording media includes a perpendicular magnetic recording layer that is patterned into a plurality of discrete magnetic islands. The patterned magnetic recording media also includes an exchange bridge structure formed from magnetic material that connects the islands of the perpendicular magnetic recording layer. Connecting the islands with magnetic material increases exchange coupling between the islands, which makes the islands more magnetically stable.
摘要翻译：描述了图案化的磁记录介质和相关的制造方法。图案化的磁记录介质包括被图案化成多个离散磁岛的垂直磁记录层。图案化的磁记录介质还包括由连接垂直磁记录层的岛的磁性材料形成的交换桥结构。用磁性材料连接岛增加了岛之间的交换耦合，这使得岛更加磁稳定。

86. 发明授权

US07848047B2 Patterned media magnetic recording disk drive with write clock phase adjustment for data pattern circumferential misalignment 有权
标题翻译：带图案的介质磁记录磁盘驱动器，具有写时钟相位调整，用于数据模式周向未对准
公开(公告)号：US07848047B2
公开(公告)日：2010-12-07
申请号：US12056178
申请日：2008-03-26
申请人： Thomas R. Albrecht
发明人： Thomas R. Albrecht
IPC分类号： G11B21/02
CPC分类号： G11B5/59616 , B82Y10/00 , G11B5/59627 , G11B5/743 , G11B5/746 , G11B5/82 , G11B20/10009 , G11B20/10222 , G11B20/1258 , G11B2005/0005 , G11B2020/1242 , G11B2020/1281 , G11B2220/252
摘要： A patterned-media magnetic recording disk drive compensates for circumferential misalignment of data island patterns among the data tracks as a result of errors in fabrication of the master template used to make the disks. Each data track on the disk has its pattern shifted from a generally radial or arcuate line by a certain amount of pattern circumferential misalignment (PCM). The disk drive includes a write clock where writing to the data islands is controlled by detection of synchronization marks by the read head, and circuitry to adjust the phase of the write clock to compensate for PCM. The phase difference between the data pattern of the selected data track where data is to be written and the data pattern of the track where the synchronization marks are being detected is the difference in their respective PCM values.
摘要翻译：图形介质磁记录磁盘驱动器补偿由于制造用于制造磁盘的主模板的错误而导致数据磁道之间的数据岛模式的周向未对准。磁盘上的每个数据轨道的图案都从大体径向或弧形线移动了一定量的图形圆周错位（PCM）。磁盘驱动器包括写入时钟，其中通过读取头检测同步标记来控制对数据岛的写入，以及用于调整写入时钟的相位以补偿PCM的电路。要写入数据的所选数据轨道的数据模式与正在检测同步标记的轨迹的数据模式之间的相位差是它们各自的PCM值的差。

87. 发明授权

US07771852B2 Magnetic recording disk with patterned nondata islands of alternating polarity 有权
标题翻译：具有交替极性的图案化非磁性岛的磁记录盘
公开(公告)号：US07771852B2
公开(公告)日：2010-08-10
申请号：US11148918
申请日：2005-06-09
申请人： Thomas R. Albrecht , Zvonimir Bandic
发明人： Thomas R. Albrecht , Zvonimir Bandic
IPC分类号： G11B5/66
CPC分类号： B82Y10/00 , G11B5/1278 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A magnetic recording disk has patterned nondata regions that are used for read/write head positioning and data synchronization. The nondata regions contain nondata islands of magnetizable material separated by nonmagnetic spaces with the nondata islands having alternating magnetization polarity in the along-the-track direction. In each nondata region, every other nondata island in the along-the track direction has the same magnetization direction, with adjacent nondata islands having antiparallel magnetization directions. The disk may be either a horizontal magnetic recording disk, wherein the antiparallel magnetization directions are in the plane of the recording layer and parallel to the along-the-track direction, or a perpendicular magnetic recording disk, wherein the antiparallel the magnetization directions are “into” and “out of” the recording layer.
摘要翻译：磁记录盘具有用于读/写头定位和数据同步的非图形区域。非磁性区域包含由非磁性空间分离的可磁化材料的非磁性岛，其中沿着磁道方向具有交变磁化极性的非磁性岛。在每个非数据区域中，沿轨道方向的每隔一个非数据岛具有相同的磁化方向，相邻的非数据岛具有反平行的磁化方向。盘可以是水平磁记录盘，其中反平行磁化方向在记录层的平面中并且平行于轨道方向，或垂直磁记录盘，其中反并联的磁化方向为“ 进入“和”离开“记录层。

88. 发明授权

US07758981B2 Method for making a master disk for nanoimprinting patterned magnetic recording disks, master disk made by the method, and disk imprinted by the master disk 有权
标题翻译：用于制造用于纳米压印图案化磁记录盘的母盘的方法，由该方法制造的母盘和由主盘印制的盘
公开(公告)号：US07758981B2
公开(公告)日：2010-07-20
申请号：US11782664
申请日：2007-07-25
申请人： Thomas R. Albrecht
发明人： Thomas R. Albrecht
IPC分类号： G11B5/66
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743 , G11B5/82
摘要： A method for making a master disk to be used for nanoimprinting patterned-media magnetic recording disks uses sidewall lithography. In one implementation, the master disk substrate has a first pattern of concentric rings formed on it by sidewall lithography, followed by a second pattern of generally radially-directed pairs of parallel lines, also formed by sidewall lithography, with the pairs of parallel lines intersecting the rings. An etching process is then performed, using the upper pattern as an etch mask, to remove unprotected portions of the underlying concentric rings. This leaves a pattern of pillars on the substrate, which then serve as an etch mask for an etching process that etches unprotected portions of the master disk substrate. The resulting master disk then has pillars of substrate material arranged in a pattern of concentric rings and generally radially-directed pairs of parallel lines.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法使用侧壁光刻。在一个实施方案中，母盘基板具有通过侧壁光刻在其上形成的同心环的第一图案，随后是也通过侧壁光刻形成的大致径向定向的一对平行线的第二图案，并且所述平行线对相交戒指。然后使用上部图案作为蚀刻掩模进行蚀刻工艺，以去除下面的同心环的未受保护的部分。这在衬底上留下了柱状图案，其然后用作用于蚀刻母盘衬底的未受保护部分的蚀刻工艺的蚀刻掩模。所得到的母盘然后具有以同心环和大体上径向指向的平行线对图案布置的基底材料柱。

89. 发明授权

US07675699B2 Patterned-media magnetic recording disk and disk drive with data zones having nondata regions near the zone boundaries 有权
标题翻译：图案化介质磁记录磁盘和磁盘驱动器，数据区具有靠近区域边界的非数据区域
公开(公告)号：US07675699B2
公开(公告)日：2010-03-09
申请号：US11852252
申请日：2007-09-07
申请人： Thomas R. Albrecht
发明人： Thomas R. Albrecht
IPC分类号： G11B5/09
CPC分类号： G11B5/59633 , B82Y10/00 , G11B5/012 , G11B5/3967 , G11B5/743 , G11B5/746 , G11B5/82 , G11B2005/0002
摘要： A patterned-media magnetic recording disk has data islands arranged into concentric data tracks and the data tracks arranged into radially-spaced annular zones, with each zone having an inside-diameter (ID) perimeter and an outside-diameter (OD) perimeter and at least one annular nondata region near one of its perimeters. Each zone includes generally radially-directed synchronization (sync) marks that extend from the zone ID perimeter to the zone OD perimeter so as to extend into the annular nondata region or regions of the zone. In the disk drive that uses the patterned-media disks the read head and write head have an effective radial offset relative to one another, so the write head may be on a data track near a zone perimeter when the read head is located in a nondata region. The read head detects the sync marks that extend into the nondata region so that the write head can be synchronized with the data islands in the data track.
摘要翻译：图形介质磁记录盘具有排列成同心数据轨道的数据岛和布置成径向间隔的环形区域的数据轨道，每个区域具有内径（ID）周长和外径（OD）周长在其周边的一个附近的至少一个环形非圆形区域。每个区域包括从区域ID周边延伸到区域OD周边的大体上径向定向的同步（sync）标记，以便延伸到区域的环形非区域或区域中。在使用图案化介质盘的磁盘驱动器中，读头和写头相对于彼此具有有效的径向偏移，因此当读头位于非数据位时，写头可以在区周边附近的数据轨道上地区。读取头检测延伸到非数据区域的同步标记，使得写入头可以与数据轨道中的数据岛同步。

90. 发明申请

US20090308837A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权
标题翻译：使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法
公开(公告)号：US20090308837A1
公开(公告)日：2009-12-17
申请号：US12141062
申请日：2008-06-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
摘要翻译：本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或条带。嵌段共聚物材料沉积在图案上，导致嵌段共聚物引导自组装成其组分，以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。除去其中一个部件的径向线，并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。常规光刻用于在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。

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